GB2126716B - Automatic checking of surfaces - Google Patents
Automatic checking of surfacesInfo
- Publication number
- GB2126716B GB2126716B GB08321411A GB8321411A GB2126716B GB 2126716 B GB2126716 B GB 2126716B GB 08321411 A GB08321411 A GB 08321411A GB 8321411 A GB8321411 A GB 8321411A GB 2126716 B GB2126716 B GB 2126716B
- Authority
- GB
- United Kingdom
- Prior art keywords
- automatic checking
- checking
- automatic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19823232885 DE3232885A1 (en) | 1982-09-04 | 1982-09-04 | METHOD FOR AUTOMATICALLY INSPECTING SURFACES |
Publications (3)
Publication Number | Publication Date |
---|---|
GB8321411D0 GB8321411D0 (en) | 1983-09-07 |
GB2126716A GB2126716A (en) | 1984-03-28 |
GB2126716B true GB2126716B (en) | 1986-05-08 |
Family
ID=6172447
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB08321411A Expired GB2126716B (en) | 1982-09-04 | 1983-08-09 | Automatic checking of surfaces |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPS5960344A (en) |
DE (1) | DE3232885A1 (en) |
GB (1) | GB2126716B (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3540916A1 (en) * | 1985-11-19 | 1987-05-21 | Zeiss Carl Fa | METHOD AND DEVICE FOR SCREEN LIGHT MICROSCOPIC DISPLAY OF OBJECTS IN THE DARK FIELD |
US5428452A (en) * | 1994-01-31 | 1995-06-27 | The United States Of America As Represented By The Secretary Of The Air Force | Optical fourier transform method for detecting irregularities upon two-dimensional sheet material such as film or tape |
DE19510535A1 (en) * | 1995-03-23 | 1996-09-26 | Siemens Ag | Defect detection method for glass or plastic body |
DE19632763C2 (en) * | 1996-08-14 | 1998-09-10 | Holger Moritz | Measuring head for the observation of photoresist development |
DE19720308C2 (en) * | 1997-05-15 | 1999-05-20 | Parsytec Computer Gmbh | Device for the continuous detection of defects by size and type on the surface of a moving material |
US6236454B1 (en) | 1997-12-15 | 2001-05-22 | Applied Materials, Inc. | Multiple beam scanner for an inspection system |
DE19946520B4 (en) * | 1999-09-28 | 2010-09-16 | Parsytec Ag | Apparatus and method for surface inspection of a continuously tapered strip material |
US7339661B2 (en) * | 2002-09-30 | 2008-03-04 | Doron Korngut | Dark field inspection system |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5843681B2 (en) * | 1972-06-16 | 1983-09-28 | 三菱電機株式会社 | Hiyoumenjiyou Taikansokuuchi |
DE2532603C3 (en) * | 1975-07-21 | 1978-12-14 | Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch | Optical device for determining the light exit angle |
DE2727927C3 (en) * | 1977-06-21 | 1980-01-24 | Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch | Device for the separate detection of light beams |
DE2727926C3 (en) * | 1977-06-21 | 1980-11-13 | Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch | Device for the detection of imperfections on the reflective surface of a web |
JPS5599049A (en) * | 1979-01-24 | 1980-07-28 | Toshiba Corp | Defect detector |
EP0065517B1 (en) * | 1980-11-17 | 1988-12-28 | Caterpillar Inc. | Surface roughness gauge |
-
1982
- 1982-09-04 DE DE19823232885 patent/DE3232885A1/en not_active Withdrawn
-
1983
- 1983-08-09 GB GB08321411A patent/GB2126716B/en not_active Expired
- 1983-08-30 JP JP15727483A patent/JPS5960344A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
GB8321411D0 (en) | 1983-09-07 |
JPS5960344A (en) | 1984-04-06 |
DE3232885A1 (en) | 1984-03-08 |
GB2126716A (en) | 1984-03-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |