GB2116871B - Apparatus for growing single crystals from a melt using the czochralski method - Google Patents

Apparatus for growing single crystals from a melt using the czochralski method

Info

Publication number
GB2116871B
GB2116871B GB08207628A GB8207628A GB2116871B GB 2116871 B GB2116871 B GB 2116871B GB 08207628 A GB08207628 A GB 08207628A GB 8207628 A GB8207628 A GB 8207628A GB 2116871 B GB2116871 B GB 2116871B
Authority
GB
United Kingdom
Prior art keywords
melt
single crystals
czochralski method
growing single
growing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08207628A
Other versions
GB2116871A (en
Inventor
Vitaly Yakovlevich Apilat
Viktor Yakovlevich Vakulenko
Valentin Ivanovich Goriletsky
Vladimir Gavrilovich Maximov
Oleg Sergeevich Mjulendorf
Alexei Viktorovich Radkevich
Leonid Danilovich Chernitsky
Lev Georgievich Eidelman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VNII MONOKRISTALLOV
Original Assignee
VNII MONOKRISTALLOV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VNII MONOKRISTALLOV filed Critical VNII MONOKRISTALLOV
Priority to GB08207628A priority Critical patent/GB2116871B/en
Publication of GB2116871A publication Critical patent/GB2116871A/en
Application granted granted Critical
Publication of GB2116871B publication Critical patent/GB2116871B/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/32—Seed holders, e.g. chucks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
GB08207628A 1982-03-16 1982-03-16 Apparatus for growing single crystals from a melt using the czochralski method Expired GB2116871B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB08207628A GB2116871B (en) 1982-03-16 1982-03-16 Apparatus for growing single crystals from a melt using the czochralski method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB08207628A GB2116871B (en) 1982-03-16 1982-03-16 Apparatus for growing single crystals from a melt using the czochralski method

Publications (2)

Publication Number Publication Date
GB2116871A GB2116871A (en) 1983-10-05
GB2116871B true GB2116871B (en) 1985-11-13

Family

ID=10529033

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08207628A Expired GB2116871B (en) 1982-03-16 1982-03-16 Apparatus for growing single crystals from a melt using the czochralski method

Country Status (1)

Country Link
GB (1) GB2116871B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59190300A (en) * 1983-04-08 1984-10-29 Hitachi Ltd Method and apparatus for production of semiconductor
JP2605164B2 (en) * 1990-05-28 1997-04-30 信越半導体 株式会社 Single crystal rod unloading device and transport method thereof
US7608047B2 (en) 2005-07-18 2009-10-27 Dymedix Corporation Reusable snore/air flow sensor

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1284017A (en) * 1970-07-29 1972-08-02 Commissariat Energie Atomique Apparatus for growing crystalline bodies
GB1590204A (en) * 1977-12-31 1981-05-28 V N I Monokristal Apparatus for pulling single crystals from melt

Also Published As

Publication number Publication date
GB2116871A (en) 1983-10-05

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee