GB2109545B - Surface profile interferometer - Google Patents

Surface profile interferometer

Info

Publication number
GB2109545B
GB2109545B GB08229353A GB8229353A GB2109545B GB 2109545 B GB2109545 B GB 2109545B GB 08229353 A GB08229353 A GB 08229353A GB 8229353 A GB8229353 A GB 8229353A GB 2109545 B GB2109545 B GB 2109545B
Authority
GB
United Kingdom
Prior art keywords
surface profile
interferometer
profile interferometer
profile
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08229353A
Other versions
GB2109545A (en
Inventor
Michael John Downs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to GB08229353A priority Critical patent/GB2109545B/en
Publication of GB2109545A publication Critical patent/GB2109545A/en
Application granted granted Critical
Publication of GB2109545B publication Critical patent/GB2109545B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
GB08229353A 1981-10-30 1982-10-14 Surface profile interferometer Expired GB2109545B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB08229353A GB2109545B (en) 1981-10-30 1982-10-14 Surface profile interferometer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB8132745 1981-10-30
GB08229353A GB2109545B (en) 1981-10-30 1982-10-14 Surface profile interferometer

Publications (2)

Publication Number Publication Date
GB2109545A GB2109545A (en) 1983-06-02
GB2109545B true GB2109545B (en) 1985-07-24

Family

ID=26281126

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08229353A Expired GB2109545B (en) 1981-10-30 1982-10-14 Surface profile interferometer

Country Status (1)

Country Link
GB (1) GB2109545B (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5975108A (en) * 1982-10-22 1984-04-27 Hitachi Ltd Method and device for optical measurement of fine cap
US4848908A (en) * 1983-10-24 1989-07-18 Lockheed Missiles & Space Company, Inc. Optical heterodyne roughness measurement system
EP0162973A1 (en) * 1984-05-30 1985-12-04 Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO Distance measuring device
US4639139A (en) * 1985-09-27 1987-01-27 Wyko Corporation Optical profiler using improved phase shifting interferometry
DE3574280D1 (en) * 1985-12-23 1989-12-21 Ibm Deutschland Method and arrangement for optically determining surface profiles
US5042949A (en) * 1989-03-17 1991-08-27 Greenberg Jeffrey S Optical profiler for films and substrates
US5017012A (en) * 1989-08-04 1991-05-21 Chapman Instruments, Inc. Viewing system for surface profiler
JP3351527B2 (en) * 1991-11-08 2002-11-25 ブリテイッシュ・テクノロジー・グループ・リミテッド Measuring device
GB2356931B (en) * 1999-12-03 2003-05-28 Aea Technology Plc Optical ultrasonic measurement
SG98388A1 (en) * 2000-05-13 2003-09-19 Univ Nanyang Testing of aspheric surfaces with a magneto-optic active compensator

Also Published As

Publication number Publication date
GB2109545A (en) 1983-06-02

Similar Documents

Publication Publication Date Title
GB2107482B (en) Polariscope
GB2089051B (en) Surface restivimeter
IL66295A (en) Interferometer system for measuring surface contours
ATA396180A (en) Interferometer arrangement
DE3476583D1 (en) Interferometer
GB2109329B (en) Roller fair-lead
GB2102535B (en) Rollers
GB2162924B (en) Rollers
EP0171836A3 (en) Interferometer interferometer
GB8323179D0 (en) Interferometer
GB2109545B (en) Surface profile interferometer
GB2094470B (en) Examining surface profile
DE3273648D1 (en) Extensometers
JPS5790146A (en) Surface inspecter
GB2106241B (en) Measuring surface roughness
AU86929S (en) Roller
BR8203712A (en) SURFACE MIXTURES
GB8512962D0 (en) Interferometers
GB2103128B (en) Surface finishing
GB2113272B (en) Railing
GB2091636B (en) Support surfaces
DE3279074D1 (en) Loose-lay flooring
YU255981A (en) Convex tile
GB8306570D0 (en) Interferometer
GB2087545B (en) Interferometer

Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19961014