GB2084315B - Interferometer - Google Patents
InterferometerInfo
- Publication number
- GB2084315B GB2084315B GB8128312A GB8128312A GB2084315B GB 2084315 B GB2084315 B GB 2084315B GB 8128312 A GB8128312 A GB 8128312A GB 8128312 A GB8128312 A GB 8128312A GB 2084315 B GB2084315 B GB 2084315B
- Authority
- GB
- United Kingdom
- Prior art keywords
- interferometer
- detection system
- grating
- measuring
- photodiodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 abstract 3
- 230000004913 activation Effects 0.000 abstract 1
- 238000006073 displacement reaction Methods 0.000 abstract 1
- 230000000694 effects Effects 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P13/00—Indicating or recording presence, absence, or direction, of movement
- G01P13/02—Indicating direction only, e.g. by weather vane
- G01P13/04—Indicating positive or negative direction of a linear movement or clockwise or anti-clockwise direction of a rotational movement
- G01P13/045—Indicating positive or negative direction of a linear movement or clockwise or anti-clockwise direction of a rotational movement with speed indication
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02062—Active error reduction, i.e. varying with time
- G01B9/02063—Active error reduction, i.e. varying with time by particular alignment of focus position, e.g. dynamic focussing in optical coherence tomography
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Recording Or Reproduction (AREA)
Abstract
Interferometers are known for measuring the displacement of an object 6 with an accuracy of a fraction of 1 mu m, having digital display, and forward/reverse motion discrimination. To avoid the use of a special frequency stabilised laser source producing oppositely polarised beams of different frequencies, an interferometer is provided having a simple laser source 1, in which an interference line pattern is formed on a detection system 20 having a moving grating-like structure whose grating period corresponds to the period of the interference pattern. The effect of a moving grating is provided by a detection system comprising a linear array of photodiodes in which sequential activation of interjacent groups of photodiodes by a ring counter moves an effective grating pattern along the array. By counting the number of periods in the output signal of the detection system, changes in the measuring arm b of the interferometer can be measured with high accuracy. The interferometer may assist in measuring and controlling the movement of an optical recording head (Figure 7). <IMAGE>
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL8005258A NL8005258A (en) | 1980-09-22 | 1980-09-22 | INTERFEROMETER. |
Publications (2)
Publication Number | Publication Date |
---|---|
GB2084315A GB2084315A (en) | 1982-04-07 |
GB2084315B true GB2084315B (en) | 1984-10-24 |
Family
ID=19835908
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB8128312A Expired GB2084315B (en) | 1980-09-22 | 1981-09-18 | Interferometer |
Country Status (9)
Country | Link |
---|---|
JP (2) | JPS5786007A (en) |
AU (1) | AU551571B2 (en) |
CA (1) | CA1163094A (en) |
DE (1) | DE3137211C2 (en) |
FR (1) | FR2490808B1 (en) |
GB (1) | GB2084315B (en) |
IT (1) | IT1139451B (en) |
NL (1) | NL8005258A (en) |
SE (1) | SE8105526L (en) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL8201975A (en) * | 1982-05-13 | 1983-12-01 | Philips Nv | LASER DEVICE AND INTERFEROMETER CONTAINING SUCH LASER DEVICE. |
JPS59134005U (en) * | 1983-02-23 | 1984-09-07 | 横河電機株式会社 | Optical mechanical quantity measuring device |
JPS6070563A (en) * | 1983-09-27 | 1985-04-22 | Toshiba Corp | High density spiral drawing device |
GB8415670D0 (en) * | 1984-06-20 | 1984-07-25 | Penlon Ltd | Gas analysis apparatus |
JPS6173003A (en) * | 1984-09-18 | 1986-04-15 | Yamazaki Mazak Corp | Laser length measuring machine |
GB2191855A (en) * | 1986-05-07 | 1987-12-23 | Univ London | Method and apparatus for detecting reflection sites |
FR2601128A1 (en) * | 1986-07-03 | 1988-01-08 | Etu Rech Machine Outil Centre | Laser source roughness meter for analysis and quality control of mechanical surfaces |
DE3642055A1 (en) * | 1986-12-09 | 1988-07-07 | Wolfgang Dr Littmann | Device for directly converting sound into digital information, digital microphone |
JPS63151802A (en) * | 1986-12-17 | 1988-06-24 | Rikagaku Kenkyusho | High preciseness polarizing interferometer |
DE3707331A1 (en) * | 1987-03-07 | 1988-09-15 | Zeiss Carl Fa | INTERFEROMETER FOR MEASURING OPTICAL PHASE DIFFERENCES |
CH676289A5 (en) * | 1987-03-24 | 1990-12-28 | Wild Leitz Ag | |
JPS63238504A (en) * | 1987-03-27 | 1988-10-04 | Satoru Toyooka | Interferometer for displacement measurement |
JP2779497B2 (en) * | 1988-03-31 | 1998-07-23 | 株式会社東京精密 | Interferometer |
DE4204857C2 (en) * | 1991-02-18 | 1998-01-22 | Asahi Optical Co Ltd | Method for examining a surface shape with an interferometer |
GB9500110D0 (en) * | 1995-01-05 | 1995-03-01 | Renishaw Plc | Laser interferometer |
US5991249A (en) * | 1997-07-29 | 1999-11-23 | Hoetron, Inc. | Optical track sensing device |
US6723980B2 (en) | 2001-07-16 | 2004-04-20 | Wai-Hon Lee | Position sensor with grating to detect moving object with periodic pattern |
CN1322308C (en) * | 2005-04-21 | 2007-06-20 | 中国科学院上海光学精密机械研究所 | Micro-corner interference measuring device |
JP5517665B2 (en) | 2010-02-17 | 2014-06-11 | フタバ産業株式会社 | Exhaust system |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3694088A (en) * | 1971-01-25 | 1972-09-26 | Bell Telephone Labor Inc | Wavefront measurement |
JPS4917264A (en) * | 1972-06-03 | 1974-02-15 | ||
NL7403468A (en) * | 1974-03-15 | 1975-09-17 | Philips Nv | DEVICE FOR DETERMINING THE MOVEMENT OF A PART OF A TOOL. |
JPS6024401B2 (en) * | 1975-06-28 | 1985-06-12 | キヤノン株式会社 | How to measure the physical constants of a measured object |
DE2722887C2 (en) * | 1977-05-20 | 1979-02-15 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V., 8000 Muenchen | Device for measuring (calibrating) laser interferometers |
US4157223A (en) * | 1977-10-28 | 1979-06-05 | The Perkin-Elmer Corporation | Sliding reference interferometer |
CH626992A5 (en) * | 1977-11-25 | 1981-12-15 | Nat Res Dev | |
PL124778B1 (en) * | 1978-11-03 | 1983-02-28 | Inst Geodezji I Kartografii | Apparatus for exact measurement of length and measuring system composed of such apparatuses |
DD139760B1 (en) * | 1978-11-27 | 1980-12-10 | Werner Krieg | INTERFEROMETRIC EQUIPMENT FOR MEASURING SPACES AND DISTANCE CHANGES |
-
1980
- 1980-09-22 NL NL8005258A patent/NL8005258A/en not_active Application Discontinuation
-
1981
- 1981-09-15 CA CA000385900A patent/CA1163094A/en not_active Expired
- 1981-09-18 IT IT24043/81A patent/IT1139451B/en active
- 1981-09-18 GB GB8128312A patent/GB2084315B/en not_active Expired
- 1981-09-18 SE SE8105526A patent/SE8105526L/en not_active Application Discontinuation
- 1981-09-18 AU AU75466/81A patent/AU551571B2/en not_active Ceased
- 1981-09-18 FR FR8117665A patent/FR2490808B1/en not_active Expired
- 1981-09-18 DE DE3137211A patent/DE3137211C2/en not_active Expired
- 1981-09-21 JP JP56149289A patent/JPS5786007A/en active Pending
-
1987
- 1987-08-04 JP JP62193850A patent/JPS63100626A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
JPS63100626A (en) | 1988-05-02 |
FR2490808A1 (en) | 1982-03-26 |
FR2490808B1 (en) | 1986-05-09 |
IT8124043A0 (en) | 1981-09-18 |
DE3137211A1 (en) | 1982-05-13 |
DE3137211C2 (en) | 1986-12-11 |
IT1139451B (en) | 1986-09-24 |
JPS5786007A (en) | 1982-05-28 |
CA1163094A (en) | 1984-03-06 |
NL8005258A (en) | 1982-04-16 |
SE8105526L (en) | 1982-03-23 |
GB2084315A (en) | 1982-04-07 |
AU7546681A (en) | 1982-04-01 |
AU551571B2 (en) | 1986-05-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 19940918 |