GB2082763A - Infrared-sensitive Multiple Photon Detector - Google Patents

Infrared-sensitive Multiple Photon Detector Download PDF

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Publication number
GB2082763A
GB2082763A GB8025091A GB8025091A GB2082763A GB 2082763 A GB2082763 A GB 2082763A GB 8025091 A GB8025091 A GB 8025091A GB 8025091 A GB8025091 A GB 8025091A GB 2082763 A GB2082763 A GB 2082763A
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United Kingdom
Prior art keywords
detector
detectors
infrared
radiation
germanium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB8025091A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Priority to GB8025091A priority Critical patent/GB2082763A/en
Publication of GB2082763A publication Critical patent/GB2082763A/en
Withdrawn legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/28Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using photoemissive or photovoltaic cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/041Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L31/00
    • H01L25/043Stacked arrangements of devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)

Abstract

An infrared-sensitive multiple photon detector has at least two detectors 1 and 10 in vacuum and cooled by finger 14. The detectors are arranged one behind the other, without touching, in the path of a beam to be investigated. Detector 1 is a small gold-doped germanium rod having a substantially rectangular surface and layer 4 for reducing the reflection of incident radiation. Beam exit surface 2 has a convex shape, so that the radiation not absorbed by the germanium detector is focused onto substantially smaller CdHgTe detector 10. The germanium detector absorbs short-wave radiation and the CdHgTe detector absorbs long-wave radiation. <IMAGE>

Description

SPECIFICATION Infrared-sensitive Multiple Photon Detector This invention relates to an infrared-sensitive multiple photon detector, preferably a double detector, for contactless temperature measurement, for infrared spectroscopy and for relative pyrometry.
A variety of multiple photon detectors have been described. The journal Infrared Physics, Vol.
16, No. 5, pages 509-514, German Offenlegungsschrift 2,119,945, British Patent 1,290,637 and German Auslegeschrift 1,439,306 describe detectors which consist of a compact piece of material. This piece of material has been treated, by diffusion or other known processes, in such a way that either diodes of differing spectral sensitivity are produced or that the material has a sensitivity depending on the thickness of the crystal. These detectors can no longer be separated without destroying them.
German Offenlegungsschrift 2,042,309 (see also British Patent 1,322,359) describes the preparation of CdHgTe multiple detectors. The individual very thin CdHgTe layers possess different spectral sensitivities over their area.
Several such layers are superposed in staggered arrangement, so that the upper layer serves as a filter for the lower layer. The journals Applied Optics Viol. 11, No. 10, T49-T53 and Infrared Physics, Vol. 16, pages 531-534 describe the preparation of multiple detectors which consist of CdHgT#e layers. The very thin, homogeneous layers obtain their different spectral sensitivity as a result of a different ratio of the concentration of Cd to Hg in the CdHgTe. As a result of the use of filters or epoxide resin adhesive layers, the infrared rays suffer a disadvantageous attenuation.
The journal Infrared Physics, Viol. 1 7, pages 419~421 describes a double detector of InSb and PbSnTe. It consists of two separate parts, and the upper InSb detector must be very thin (0.125 mm) so as still to transmit sufficiently long-wave infrared rays onto the PbSnTe detector. Because of its dimensions the InSb detector can easily be destroyed when stressed mechanically, for example through impacts or shocks.
It is an object of the invention to improve the usefulness of infrared-sensitive multiple photon detectors.
The invention solves the problem of producing mechanically stable infrared-sensitive multiple photon detectors possessing high sensitivity.
Accordingly, the present invention consists in an infrared-sensitive multiple photon detector, of which the detectors are in a vacuum and are cooled, wherein at least two detectors are arranged one behind the other, without touching, in the beam path, and at least one of the preceding detectors is of lens-shaped construction. Preferably the surfaces of the detectors which face the entering beam, and the last detector layer, are provided with an antireflection coating and the detector surfaces between these are provided with a beam-splitting coating. In particular, in the embodiment as a double photon detector, a CdHgTe detector which absorbs long-wave radiation is preceded by a rodshaped doped germanium detector which absorbs short-wave radiation, the germanium detector being in the shape of a plano-convex lens.It is possible to filter out the long-wave radiation by means of an oblique surface at the end of one germanium detector.
The multiple photon detector works on the conventional principle: each preceding detector absorbs the short-wave portion of the radiation and transmit the remaining radiation.
The device of the invention has high sensitivity and is therefore particularly suitable for measuring infrared radiation of low intensity, such as emanates, for example, from bodies at a low temperature. The preceding detectors focus the transmitted part of the infrared radiation and thereby substantially increase the efficiency of the measuring device. The sensitivity is further increased by the fact that a specific particularly advantageous material can be employed for each detector. Moreover, the anti-reflection coatings and beam-splitting coatings further improve the sensitivity. The beam-splitting coating reflects the short-wave part but transmits the long-wave part virtually unimpeded.
The germanium detectors transmit the longwave part of the radiation well. These detectors can be kept sufficiently thick so that mechanically stable lenses can be ground. The separate arrangement of the detectors assists the replacement of defective detectors.
In order that the invention may be more readily understood, reference is made to the accompanying drawings which illustrate diagrammatically and by way of example an embodiment thereof, and in which:~ Figure 1 shows a detector arrangement according to the invention, with two detectors, and Figure 2 shows an overall representation of the device according to the invention.
The detector arrangement consists of a small gold-doped germanium rod 1 having a substantially rectangular surface of about 4 mm2 and a length of about 3 mm. At a temperature of 770K the germanium detector has its maximum sensitivity in the wavelength range of 3... 7 Hm.
Its beam exit surface 2 has a convex shape, so that the radiation not absorbed by the germanium detector is focused onto the substantially smaller CdHgTe detector 10. The layer 4 reduces the reflection of the incident radiation up to A=l 2 um. The layer 3 reflects radiation of A < 7,um and transmits radiation of A > 7 #m. The detector is attached by means of a conductive adhesive 5 to a holder 6, which at the same time constitutes an electrical contact. The cooling finger 14 is at a temperature T=770K. The other electrical contact 8 is fastened to the detector 1 by means of solder 7.
The second detector 10, which consists of CdHgTe, and has an active surface of (0.1 x0.1) mm2, is glued onto a carrier 9. The cooling finger 14 cools the carrier 9 to T=770K. Contacts 12 are soldered onto the detector 10 by means of indium solder 11. A layer 13 reduces the reflection of the incident infrared radiation. The detector 10 has its maximum sensitivity in the wavelength range ...... 12 Mm, and because of the complete focusing of the radiation leaving the germanium detector this sensitivity is about 400 times as great as when such focusing does not take place.
Figure 2 shows the detector arrangement, with two detectors, assembled in a Dewar vessel. The cooling finger 14 contains liquid nitrogen. The external jacket 1 5 protects the cooling finger from excessive temperature rise and maintains the vacuum 16.
The infrared radiation reaches the detector arrangement through the window 17.

Claims (5)

Claims
1. An infrared-sensitive multiple photon detector, of which the detectors are in a vacuum and are cooled, wherein at least two detectors are arranged one behind the other, without touching, in the beam path, and at least one of the preceding detectors is of lens-shaped construction.
2. A detector according to Claim 1, wherein the surfaces of the detectors which face the entering beam, and the last detector layer, are coated with an anti-reflection coating and the intermediate detector surfaces are coated with a beamsplitting coating.
3. A detector according to Claim 1, wherein a CdHgTe detector which absorbs long-wave radiation is preceded by a rod-shaped doped germanium detector which absorbs short-wave radiation.
4. A detector according to Claim 3, wherein the germanium detector is in the shape of a planoconvex lens.
5. An infrared-sensitive multiple photon detector, substantially as herein described with reference to and as shown in the accompanying drawings.
GB8025091A 1980-07-31 1980-07-31 Infrared-sensitive Multiple Photon Detector Withdrawn GB2082763A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB8025091A GB2082763A (en) 1980-07-31 1980-07-31 Infrared-sensitive Multiple Photon Detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8025091A GB2082763A (en) 1980-07-31 1980-07-31 Infrared-sensitive Multiple Photon Detector

Publications (1)

Publication Number Publication Date
GB2082763A true GB2082763A (en) 1982-03-10

Family

ID=10515176

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8025091A Withdrawn GB2082763A (en) 1980-07-31 1980-07-31 Infrared-sensitive Multiple Photon Detector

Country Status (1)

Country Link
GB (1) GB2082763A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2183028A (en) * 1985-11-14 1987-05-28 United Technologies Corp Photodetector module for a dual spectra optical pyrometer
US4833898A (en) * 1987-01-07 1989-05-30 Ford Aerospace & Communications Corporation Multi-detector dewar
US4918929A (en) * 1987-07-01 1990-04-24 Ford Aerospace Corporation Multi-detector dewar
GB2228824A (en) * 1989-03-01 1990-09-05 Gen Electric Co Plc Radiation detectors

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2183028A (en) * 1985-11-14 1987-05-28 United Technologies Corp Photodetector module for a dual spectra optical pyrometer
GB2183028B (en) * 1985-11-14 1989-11-29 United Technologies Corp A dual spectra optical pyrometer having a serial array of photodetectors
US4833898A (en) * 1987-01-07 1989-05-30 Ford Aerospace & Communications Corporation Multi-detector dewar
US4918929A (en) * 1987-07-01 1990-04-24 Ford Aerospace Corporation Multi-detector dewar
GB2228824A (en) * 1989-03-01 1990-09-05 Gen Electric Co Plc Radiation detectors

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