GB2046955B - Interferometrically controlled stage with precisely orthogonal axes of motion - Google Patents
Interferometrically controlled stage with precisely orthogonal axes of motionInfo
- Publication number
- GB2046955B GB2046955B GB8005832A GB8005832A GB2046955B GB 2046955 B GB2046955 B GB 2046955B GB 8005832 A GB8005832 A GB 8005832A GB 8005832 A GB8005832 A GB 8005832A GB 2046955 B GB2046955 B GB 2046955B
- Authority
- GB
- United Kingdom
- Prior art keywords
- motion
- orthogonal axes
- controlled stage
- precisely orthogonal
- interferometrically controlled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US1571379A | 1979-02-27 | 1979-02-27 | |
US06/038,667 US4330752A (en) | 1979-05-14 | 1979-05-14 | Position control circuit |
Publications (2)
Publication Number | Publication Date |
---|---|
GB2046955A GB2046955A (en) | 1980-11-19 |
GB2046955B true GB2046955B (en) | 1983-03-16 |
Family
ID=26687714
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB8005832A Expired GB2046955B (en) | 1979-02-27 | 1980-02-21 | Interferometrically controlled stage with precisely orthogonal axes of motion |
GB8122073A Expired GB2081048B (en) | 1979-02-27 | 1980-02-21 | Position control circuit |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB8122073A Expired GB2081048B (en) | 1979-02-27 | 1980-02-21 | Position control circuit |
Country Status (3)
Country | Link |
---|---|
DE (1) | DE3006395A1 (en) |
FR (2) | FR2451064B1 (en) |
GB (2) | GB2046955B (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001308003A (en) | 2000-02-15 | 2001-11-02 | Nikon Corp | Exposure method and system, and method of device manufacturing |
CN111363673B (en) * | 2018-12-26 | 2021-09-28 | 深圳市真迈生物科技有限公司 | Positioning method, positioning device and sequencing system |
-
1980
- 1980-02-21 DE DE19803006395 patent/DE3006395A1/en not_active Withdrawn
- 1980-02-21 GB GB8005832A patent/GB2046955B/en not_active Expired
- 1980-02-21 GB GB8122073A patent/GB2081048B/en not_active Expired
- 1980-02-25 FR FR8004055A patent/FR2451064B1/en not_active Expired
- 1980-06-17 FR FR8013437A patent/FR2451065B1/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR2451064B1 (en) | 1985-08-23 |
FR2451065B1 (en) | 1986-03-07 |
GB2081048B (en) | 1983-05-11 |
FR2451064A1 (en) | 1980-10-03 |
DE3006395A1 (en) | 1980-09-11 |
GB2081048A (en) | 1982-02-10 |
GB2046955A (en) | 1980-11-19 |
FR2451065A1 (en) | 1980-10-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
732 | Registration of transactions, instruments or events in the register (sect. 32/1977) | ||
PCNP | Patent ceased through non-payment of renewal fee |