GB201912500D0 - Deposition system - Google Patents
Deposition systemInfo
- Publication number
- GB201912500D0 GB201912500D0 GBGB1912500.4A GB201912500A GB201912500D0 GB 201912500 D0 GB201912500 D0 GB 201912500D0 GB 201912500 A GB201912500 A GB 201912500A GB 201912500 D0 GB201912500 D0 GB 201912500D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- deposition system
- deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1912500.4A GB2586636A (en) | 2019-08-30 | 2019-08-30 | Deposition system |
PCT/GB2020/052020 WO2021038207A1 (en) | 2019-08-30 | 2020-08-21 | Deposition system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1912500.4A GB2586636A (en) | 2019-08-30 | 2019-08-30 | Deposition system |
Publications (2)
Publication Number | Publication Date |
---|---|
GB201912500D0 true GB201912500D0 (en) | 2019-10-16 |
GB2586636A GB2586636A (en) | 2021-03-03 |
Family
ID=68207157
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1912500.4A Pending GB2586636A (en) | 2019-08-30 | 2019-08-30 | Deposition system |
Country Status (2)
Country | Link |
---|---|
GB (1) | GB2586636A (en) |
WO (1) | WO2021038207A1 (en) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3799792A (en) * | 1971-12-14 | 1974-03-26 | Texas Instruments Inc | Vapor deposition method |
JPS61143577A (en) * | 1984-12-14 | 1986-07-01 | Konishiroku Photo Ind Co Ltd | Thin film forming device |
JP4336869B2 (en) * | 2001-11-27 | 2009-09-30 | 日本電気株式会社 | Vacuum film forming apparatus, vacuum film forming method, and battery electrode manufacturing method |
KR20090101738A (en) * | 2008-03-24 | 2009-09-29 | 삼성전기주식회사 | Apparatus for vacuum deposition and control method for the same |
KR20180060323A (en) * | 2016-11-28 | 2018-06-07 | 엘지디스플레이 주식회사 | Roll to roll fabricating system haivng turing roll |
-
2019
- 2019-08-30 GB GB1912500.4A patent/GB2586636A/en active Pending
-
2020
- 2020-08-21 WO PCT/GB2020/052020 patent/WO2021038207A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
GB2586636A (en) | 2021-03-03 |
WO2021038207A1 (en) | 2021-03-04 |
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