GB201604457D0 - A piezoelectric thin film element - Google Patents

A piezoelectric thin film element

Info

Publication number
GB201604457D0
GB201604457D0 GBGB1604457.0A GB201604457A GB201604457D0 GB 201604457 D0 GB201604457 D0 GB 201604457D0 GB 201604457 A GB201604457 A GB 201604457A GB 201604457 D0 GB201604457 D0 GB 201604457D0
Authority
GB
United Kingdom
Prior art keywords
thin film
piezoelectric thin
film element
piezoelectric
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB1604457.0A
Other versions
GB2548377A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xaar Technology Ltd
Original Assignee
Xaar Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xaar Technology Ltd filed Critical Xaar Technology Ltd
Priority to GB1604457.0A priority Critical patent/GB2548377A/en
Publication of GB201604457D0 publication Critical patent/GB201604457D0/en
Priority to CN201780016688.4A priority patent/CN108780839A/en
Priority to MX2018011197A priority patent/MX2018011197A/en
Priority to BR112018068168-7A priority patent/BR112018068168A2/en
Priority to PCT/GB2017/050696 priority patent/WO2017158345A1/en
Priority to SG11201807434QA priority patent/SG11201807434QA/en
Priority to JP2018548361A priority patent/JP6967008B2/en
Priority to US16/085,378 priority patent/US10541360B2/en
Publication of GB2548377A publication Critical patent/GB2548377A/en
Priority to IL261463A priority patent/IL261463A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides
    • H10N30/8554—Lead-zirconium titanate [PZT] based
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H10N30/077—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition
    • H10N30/078—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition by sol-gel deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Dispersion Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Semiconductor Memories (AREA)
GB1604457.0A 2016-03-16 2016-03-16 A piezoelectric thin film element Withdrawn GB2548377A (en)

Priority Applications (9)

Application Number Priority Date Filing Date Title
GB1604457.0A GB2548377A (en) 2016-03-16 2016-03-16 A piezoelectric thin film element
US16/085,378 US10541360B2 (en) 2016-03-16 2017-03-14 Piezoelectric thin film element
PCT/GB2017/050696 WO2017158345A1 (en) 2016-03-16 2017-03-14 A piezoelectric thin film element
MX2018011197A MX2018011197A (en) 2016-03-16 2017-03-14 A piezoelectric thin film element.
BR112018068168-7A BR112018068168A2 (en) 2016-03-16 2017-03-14 ? piezoelectric thin film element and method for manufacturing said element?
CN201780016688.4A CN108780839A (en) 2016-03-16 2017-03-14 Piezoelectric film-type element
SG11201807434QA SG11201807434QA (en) 2016-03-16 2017-03-14 A piezoelectric thin film element
JP2018548361A JP6967008B2 (en) 2016-03-16 2017-03-14 Piezoelectric thin film element
IL261463A IL261463A (en) 2016-03-16 2018-08-29 A piezoelectric thin film element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1604457.0A GB2548377A (en) 2016-03-16 2016-03-16 A piezoelectric thin film element

Publications (2)

Publication Number Publication Date
GB201604457D0 true GB201604457D0 (en) 2016-04-27
GB2548377A GB2548377A (en) 2017-09-20

Family

ID=55952388

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1604457.0A Withdrawn GB2548377A (en) 2016-03-16 2016-03-16 A piezoelectric thin film element

Country Status (1)

Country Link
GB (1) GB2548377A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2573534A (en) * 2018-05-08 2019-11-13 Xaar Technology Ltd An electrical element comprising a multilayer thin film ceramic member, an electrical component comprising the same, and uses thereof
EP4278389A1 (en) * 2021-01-18 2023-11-22 Applied Materials, Inc. Deposition of piezoelectric films

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4192794B2 (en) * 2004-01-26 2008-12-10 セイコーエプソン株式会社 Piezoelectric element, piezoelectric actuator, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator, and electronic device
JP4605349B2 (en) * 2004-07-15 2011-01-05 セイコーエプソン株式会社 Piezoelectric element, piezoelectric actuator, piezoelectric pump, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator, and electronic device
EP2306539A4 (en) * 2008-06-27 2013-06-12 Panasonic Corp Piezoelectric element and method for manufacturing the same
JP5510663B2 (en) * 2009-09-30 2014-06-04 セイコーエプソン株式会社 Droplet ejecting head, droplet ejecting apparatus and piezoelectric element

Also Published As

Publication number Publication date
GB2548377A (en) 2017-09-20

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)