GB201307118D0 - Pulse control of deposition and surface treatment processes - Google Patents

Pulse control of deposition and surface treatment processes

Info

Publication number
GB201307118D0
GB201307118D0 GB201307118A GB201307118A GB201307118D0 GB 201307118 D0 GB201307118 D0 GB 201307118D0 GB 201307118 A GB201307118 A GB 201307118A GB 201307118 A GB201307118 A GB 201307118A GB 201307118 D0 GB201307118 D0 GB 201307118D0
Authority
GB
United Kingdom
Prior art keywords
deposition
surface treatment
pulse control
treatment processes
processes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB201307118A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gencoa Ltd
Original Assignee
Gencoa Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gencoa Ltd filed Critical Gencoa Ltd
Priority to GB201307118A priority Critical patent/GB201307118D0/en
Publication of GB201307118D0 publication Critical patent/GB201307118D0/en
Priority to PCT/GB2014/051238 priority patent/WO2014170696A1/en
Ceased legal-status Critical Current

Links

GB201307118A 2013-04-19 2013-04-19 Pulse control of deposition and surface treatment processes Ceased GB201307118D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB201307118A GB201307118D0 (en) 2013-04-19 2013-04-19 Pulse control of deposition and surface treatment processes
PCT/GB2014/051238 WO2014170696A1 (en) 2013-04-19 2014-04-22 Pulse control of deposition and surface treatment processes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB201307118A GB201307118D0 (en) 2013-04-19 2013-04-19 Pulse control of deposition and surface treatment processes

Publications (1)

Publication Number Publication Date
GB201307118D0 true GB201307118D0 (en) 2013-05-29

Family

ID=48537507

Family Applications (1)

Application Number Title Priority Date Filing Date
GB201307118A Ceased GB201307118D0 (en) 2013-04-19 2013-04-19 Pulse control of deposition and surface treatment processes

Country Status (2)

Country Link
GB (1) GB201307118D0 (en)
WO (1) WO2014170696A1 (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08977B2 (en) * 1991-08-22 1996-01-10 日新電機株式会社 Plasma CVD method and apparatus
US7842355B2 (en) * 2005-11-01 2010-11-30 Applied Materials, Inc. System and method for modulation of power and power related functions of PECVD discharge sources to achieve new film properties
US9362089B2 (en) * 2010-08-29 2016-06-07 Advanced Energy Industries, Inc. Method of controlling the switched mode ion energy distribution system

Also Published As

Publication number Publication date
WO2014170696A1 (en) 2014-10-23

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)