GB201000952D0 - A sub miniature low energy scanned beam microscope - Google Patents
A sub miniature low energy scanned beam microscopeInfo
- Publication number
- GB201000952D0 GB201000952D0 GBGB1000952.0A GB201000952A GB201000952D0 GB 201000952 D0 GB201000952 D0 GB 201000952D0 GB 201000952 A GB201000952 A GB 201000952A GB 201000952 D0 GB201000952 D0 GB 201000952D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- low energy
- scanned beam
- beam microscope
- miniature low
- sub miniature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB1000952.0A GB201000952D0 (en) | 2010-01-21 | 2010-01-21 | A sub miniature low energy scanned beam microscope |
PCT/GB2011/050103 WO2011089439A2 (en) | 2010-01-21 | 2011-01-21 | A miniature low- energy electron beam generator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB1000952.0A GB201000952D0 (en) | 2010-01-21 | 2010-01-21 | A sub miniature low energy scanned beam microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
GB201000952D0 true GB201000952D0 (en) | 2010-03-10 |
Family
ID=42045847
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GBGB1000952.0A Ceased GB201000952D0 (en) | 2010-01-21 | 2010-01-21 | A sub miniature low energy scanned beam microscope |
Country Status (2)
Country | Link |
---|---|
GB (1) | GB201000952D0 (en) |
WO (1) | WO2011089439A2 (en) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL7203264A (en) * | 1972-03-10 | 1973-09-12 | ||
WO2001075950A1 (en) * | 2000-04-04 | 2001-10-11 | Advantest Corporation | Multibeam exposure apparatus comprising multiaxis electron lens, method for manufacturing multiaxis electron lens, and method for manufacturing semiconductor device |
JP4392346B2 (en) * | 2002-06-15 | 2009-12-24 | エヌエフエイビー・リミテッド | Particle beam generator |
US7372195B2 (en) * | 2005-09-10 | 2008-05-13 | Applied Materials, Inc. | Electron beam source having an extraction electrode provided with a magnetic disk element |
US20100187433A1 (en) | 2007-01-25 | 2010-07-29 | Nfab Limited | Improved particle beam generator |
GB0809331D0 (en) | 2008-05-22 | 2008-07-02 | Nfab Ltd | Improved electron beam generator |
-
2010
- 2010-01-21 GB GBGB1000952.0A patent/GB201000952D0/en not_active Ceased
-
2011
- 2011-01-21 WO PCT/GB2011/050103 patent/WO2011089439A2/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2011089439A3 (en) | 2011-11-17 |
WO2011089439A2 (en) | 2011-07-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AT | Applications terminated before publication under section 16(1) |