GB201000952D0 - A sub miniature low energy scanned beam microscope - Google Patents

A sub miniature low energy scanned beam microscope

Info

Publication number
GB201000952D0
GB201000952D0 GBGB1000952.0A GB201000952A GB201000952D0 GB 201000952 D0 GB201000952 D0 GB 201000952D0 GB 201000952 A GB201000952 A GB 201000952A GB 201000952 D0 GB201000952 D0 GB 201000952D0
Authority
GB
United Kingdom
Prior art keywords
low energy
scanned beam
beam microscope
miniature low
sub miniature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB1000952.0A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nfab Ltd
Original Assignee
Nfab Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nfab Ltd filed Critical Nfab Ltd
Priority to GBGB1000952.0A priority Critical patent/GB201000952D0/en
Publication of GB201000952D0 publication Critical patent/GB201000952D0/en
Priority to PCT/GB2011/050103 priority patent/WO2011089439A2/en
Ceased legal-status Critical Current

Links

GBGB1000952.0A 2010-01-21 2010-01-21 A sub miniature low energy scanned beam microscope Ceased GB201000952D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GBGB1000952.0A GB201000952D0 (en) 2010-01-21 2010-01-21 A sub miniature low energy scanned beam microscope
PCT/GB2011/050103 WO2011089439A2 (en) 2010-01-21 2011-01-21 A miniature low- energy electron beam generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB1000952.0A GB201000952D0 (en) 2010-01-21 2010-01-21 A sub miniature low energy scanned beam microscope

Publications (1)

Publication Number Publication Date
GB201000952D0 true GB201000952D0 (en) 2010-03-10

Family

ID=42045847

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB1000952.0A Ceased GB201000952D0 (en) 2010-01-21 2010-01-21 A sub miniature low energy scanned beam microscope

Country Status (2)

Country Link
GB (1) GB201000952D0 (en)
WO (1) WO2011089439A2 (en)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7203264A (en) * 1972-03-10 1973-09-12
WO2001075950A1 (en) * 2000-04-04 2001-10-11 Advantest Corporation Multibeam exposure apparatus comprising multiaxis electron lens, method for manufacturing multiaxis electron lens, and method for manufacturing semiconductor device
JP4392346B2 (en) * 2002-06-15 2009-12-24 エヌエフエイビー・リミテッド Particle beam generator
US7372195B2 (en) * 2005-09-10 2008-05-13 Applied Materials, Inc. Electron beam source having an extraction electrode provided with a magnetic disk element
US20100187433A1 (en) 2007-01-25 2010-07-29 Nfab Limited Improved particle beam generator
GB0809331D0 (en) 2008-05-22 2008-07-02 Nfab Ltd Improved electron beam generator

Also Published As

Publication number Publication date
WO2011089439A3 (en) 2011-11-17
WO2011089439A2 (en) 2011-07-28

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)