GB2009495A - Reduction of depth of field in an electron probe device - Google Patents
Reduction of depth of field in an electron probe deviceInfo
- Publication number
- GB2009495A GB2009495A GB7846611A GB7846611A GB2009495A GB 2009495 A GB2009495 A GB 2009495A GB 7846611 A GB7846611 A GB 7846611A GB 7846611 A GB7846611 A GB 7846611A GB 2009495 A GB2009495 A GB 2009495A
- Authority
- GB
- United Kingdom
- Prior art keywords
- scan coils
- angle
- axial direction
- scan
- field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
- H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/1478—Beam tilting means, i.e. for stereoscopy or for beam channelling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
In a scanning electron microscope having a reduced depth of field the narrow focussed electron beam is caused to diverge from, and for example rotate around, its normal axial direction, then to converge to cross the axial direction at a fixed point and at an angle which is greater than the half angle of the focussed beam e.g. at least 10 times, typically 100 times, the half angle. A major application of the device is in the measurement of difference in height between two areas of an object. Fig. 1 includes raster scan coils 22 and conical scan coils 24. In Fig. 2 (not shown) the scan coils are downstream of objective lens 16, and variations are discussed including one set only of scan coils by superimposition of exciting signals. The conical scan may be elliptical, square or irregular rather than circular. Operational variations are described including scanning at position 180 DEG apart at the same tilt angle or at the same rotational position but different tilt. Electron beam microfabricators and x-ray microanalysers are instanced. <IMAGE>
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB7846611A GB2009495A (en) | 1977-12-01 | 1978-11-30 | Reduction of depth of field in an electron probe device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB5005477 | 1977-12-01 | ||
GB7846611A GB2009495A (en) | 1977-12-01 | 1978-11-30 | Reduction of depth of field in an electron probe device |
Publications (1)
Publication Number | Publication Date |
---|---|
GB2009495A true GB2009495A (en) | 1979-06-13 |
Family
ID=26266609
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB7846611A Withdrawn GB2009495A (en) | 1977-12-01 | 1978-11-30 | Reduction of depth of field in an electron probe device |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB2009495A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2198284A (en) * | 1986-10-27 | 1988-06-08 | Atomika Tech Physik Gmbh | Secondary ion masss spectroscopy to determin the composition of a solid body |
WO2024112557A3 (en) * | 2022-11-23 | 2024-06-27 | Fei Company | Frame-based precession mapping in electron microscopy |
-
1978
- 1978-11-30 GB GB7846611A patent/GB2009495A/en not_active Withdrawn
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2198284A (en) * | 1986-10-27 | 1988-06-08 | Atomika Tech Physik Gmbh | Secondary ion masss spectroscopy to determin the composition of a solid body |
GB2198284B (en) * | 1986-10-27 | 1991-03-20 | Atomika Tech Physik Gmbh | Determining the composition of a solid body |
WO2024112557A3 (en) * | 2022-11-23 | 2024-06-27 | Fei Company | Frame-based precession mapping in electron microscopy |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |