GB2009495A - Reduction of depth of field in an electron probe device - Google Patents

Reduction of depth of field in an electron probe device

Info

Publication number
GB2009495A
GB2009495A GB7846611A GB7846611A GB2009495A GB 2009495 A GB2009495 A GB 2009495A GB 7846611 A GB7846611 A GB 7846611A GB 7846611 A GB7846611 A GB 7846611A GB 2009495 A GB2009495 A GB 2009495A
Authority
GB
United Kingdom
Prior art keywords
scan coils
angle
axial direction
scan
field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB7846611A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Research Development Corp UK
National Research Development Corp of India
Original Assignee
National Research Development Corp UK
National Research Development Corp of India
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Research Development Corp UK, National Research Development Corp of India filed Critical National Research Development Corp UK
Priority to GB7846611A priority Critical patent/GB2009495A/en
Publication of GB2009495A publication Critical patent/GB2009495A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1478—Beam tilting means, i.e. for stereoscopy or for beam channelling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

In a scanning electron microscope having a reduced depth of field the narrow focussed electron beam is caused to diverge from, and for example rotate around, its normal axial direction, then to converge to cross the axial direction at a fixed point and at an angle which is greater than the half angle of the focussed beam e.g. at least 10 times, typically 100 times, the half angle. A major application of the device is in the measurement of difference in height between two areas of an object. Fig. 1 includes raster scan coils 22 and conical scan coils 24. In Fig. 2 (not shown) the scan coils are downstream of objective lens 16, and variations are discussed including one set only of scan coils by superimposition of exciting signals. The conical scan may be elliptical, square or irregular rather than circular. Operational variations are described including scanning at position 180 DEG apart at the same tilt angle or at the same rotational position but different tilt. Electron beam microfabricators and x-ray microanalysers are instanced. <IMAGE>
GB7846611A 1977-12-01 1978-11-30 Reduction of depth of field in an electron probe device Withdrawn GB2009495A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB7846611A GB2009495A (en) 1977-12-01 1978-11-30 Reduction of depth of field in an electron probe device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB5005477 1977-12-01
GB7846611A GB2009495A (en) 1977-12-01 1978-11-30 Reduction of depth of field in an electron probe device

Publications (1)

Publication Number Publication Date
GB2009495A true GB2009495A (en) 1979-06-13

Family

ID=26266609

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7846611A Withdrawn GB2009495A (en) 1977-12-01 1978-11-30 Reduction of depth of field in an electron probe device

Country Status (1)

Country Link
GB (1) GB2009495A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2198284A (en) * 1986-10-27 1988-06-08 Atomika Tech Physik Gmbh Secondary ion masss spectroscopy to determin the composition of a solid body
WO2024112557A3 (en) * 2022-11-23 2024-06-27 Fei Company Frame-based precession mapping in electron microscopy

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2198284A (en) * 1986-10-27 1988-06-08 Atomika Tech Physik Gmbh Secondary ion masss spectroscopy to determin the composition of a solid body
GB2198284B (en) * 1986-10-27 1991-03-20 Atomika Tech Physik Gmbh Determining the composition of a solid body
WO2024112557A3 (en) * 2022-11-23 2024-06-27 Fei Company Frame-based precession mapping in electron microscopy

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)