GB1556375A - Etching of semiconductive material - Google Patents

Etching of semiconductive material

Info

Publication number
GB1556375A
GB1556375A GB4877675A GB4877675A GB1556375A GB 1556375 A GB1556375 A GB 1556375A GB 4877675 A GB4877675 A GB 4877675A GB 4877675 A GB4877675 A GB 4877675A GB 1556375 A GB1556375 A GB 1556375A
Authority
GB
United Kingdom
Prior art keywords
etching
semiconductive material
semiconductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4877675A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STC PLC
Original Assignee
Standard Telephone and Cables PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Standard Telephone and Cables PLC filed Critical Standard Telephone and Cables PLC
Priority to GB4877675A priority Critical patent/GB1556375A/en
Priority to DE19762653148 priority patent/DE2653148A1/en
Priority to FR7635752A priority patent/FR2353956A1/en
Priority to NL7613262A priority patent/NL7613262A/en
Publication of GB1556375A publication Critical patent/GB1556375A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/12—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching
    • C25F3/12—Etching of semiconducting materials
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/3063—Electrolytic etching
    • H01L21/30635—Electrolytic etching of AIIIBV compounds

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Weting (AREA)
GB4877675A 1975-11-27 1975-11-27 Etching of semiconductive material Expired GB1556375A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB4877675A GB1556375A (en) 1975-11-27 1975-11-27 Etching of semiconductive material
DE19762653148 DE2653148A1 (en) 1975-11-27 1976-11-23 METHOD FOR MANUFACTURING SEMICONDUCTOR COMPONENTS
FR7635752A FR2353956A1 (en) 1975-11-27 1976-11-26 ELECTROCHEMICAL ATTACK PROCESS OF A SEMICONDUCTOR MATERIAL
NL7613262A NL7613262A (en) 1975-11-27 1976-11-29 PROCEDURE FOR ETCHING SEMICONDUCTOR MATERIAL AND FITTINGS FOR THIS.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4877675A GB1556375A (en) 1975-11-27 1975-11-27 Etching of semiconductive material

Publications (1)

Publication Number Publication Date
GB1556375A true GB1556375A (en) 1979-11-21

Family

ID=10449869

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4877675A Expired GB1556375A (en) 1975-11-27 1975-11-27 Etching of semiconductive material

Country Status (4)

Country Link
DE (1) DE2653148A1 (en)
FR (1) FR2353956A1 (en)
GB (1) GB1556375A (en)
NL (1) NL7613262A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2158577A (en) * 1984-05-08 1985-11-13 Nat Res Dev Assessing powder coatings

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2158577A (en) * 1984-05-08 1985-11-13 Nat Res Dev Assessing powder coatings
US4704297A (en) * 1984-05-08 1987-11-03 National Research Development Corporation Assessing powder coatings

Also Published As

Publication number Publication date
NL7613262A (en) 1977-06-01
FR2353956A1 (en) 1977-12-30
DE2653148A1 (en) 1977-06-08

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Legal Events

Date Code Title Description
PS Patent sealed
746 Register noted 'licences of right' (sect. 46/1977)
PCNP Patent ceased through non-payment of renewal fee