GB1544612A - Apparatus for ion plasma coating of articles - Google Patents

Apparatus for ion plasma coating of articles

Info

Publication number
GB1544612A
GB1544612A GB16878A GB16878A GB1544612A GB 1544612 A GB1544612 A GB 1544612A GB 16878 A GB16878 A GB 16878A GB 16878 A GB16878 A GB 16878A GB 1544612 A GB1544612 A GB 1544612A
Authority
GB
United Kingdom
Prior art keywords
articles
plasma coating
ion plasma
ion
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB16878A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KOVALSKY G
MAISHEV J
Original Assignee
KOVALSKY G
MAISHEV J
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KOVALSKY G, MAISHEV J filed Critical KOVALSKY G
Priority to GB16878A priority Critical patent/GB1544612A/en
Publication of GB1544612A publication Critical patent/GB1544612A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/46—Sputtering by ion beam produced by an external ion source
GB16878A 1978-01-04 1978-01-04 Apparatus for ion plasma coating of articles Expired GB1544612A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB16878A GB1544612A (en) 1978-01-04 1978-01-04 Apparatus for ion plasma coating of articles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB16878A GB1544612A (en) 1978-01-04 1978-01-04 Apparatus for ion plasma coating of articles

Publications (1)

Publication Number Publication Date
GB1544612A true GB1544612A (en) 1979-04-25

Family

ID=9699611

Family Applications (1)

Application Number Title Priority Date Filing Date
GB16878A Expired GB1544612A (en) 1978-01-04 1978-01-04 Apparatus for ion plasma coating of articles

Country Status (1)

Country Link
GB (1) GB1544612A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4369205A (en) * 1979-10-13 1983-01-18 Messerschmitt-Bolkow-Blohm Gesellschaft Mit Beschrankter Haftung Method for manufacturing semiconductor elements from amorphous silicon
GB2138449A (en) * 1983-04-22 1984-10-24 White Eng Co Method for pure ion plating using magnetic fields
EP0308680A1 (en) * 1987-09-21 1989-03-29 THELEN, Alfred, Dr. Cathode sputtering apparatus
US4885070A (en) * 1988-02-12 1989-12-05 Leybold Aktiengesellschaft Method and apparatus for the application of materials
GB2211861B (en) * 1987-10-30 1992-01-29 Pioneer Electronic Corp Photomagnetic memory medium having a non-columnar structure

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4369205A (en) * 1979-10-13 1983-01-18 Messerschmitt-Bolkow-Blohm Gesellschaft Mit Beschrankter Haftung Method for manufacturing semiconductor elements from amorphous silicon
GB2138449A (en) * 1983-04-22 1984-10-24 White Eng Co Method for pure ion plating using magnetic fields
EP0308680A1 (en) * 1987-09-21 1989-03-29 THELEN, Alfred, Dr. Cathode sputtering apparatus
AU605631B2 (en) * 1987-09-21 1991-01-17 Alfred Dr. Thelen Apparatus for the application of materials
GB2211861B (en) * 1987-10-30 1992-01-29 Pioneer Electronic Corp Photomagnetic memory medium having a non-columnar structure
US5135819A (en) * 1987-10-30 1992-08-04 Pioneer Electronic Corporation Photomagnetic memory medium having a non-columnar structure
US4885070A (en) * 1988-02-12 1989-12-05 Leybold Aktiengesellschaft Method and apparatus for the application of materials

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee