GB1544222A - Method of and apparatus for non-thermal electron beam processing of workpieces - Google Patents
Method of and apparatus for non-thermal electron beam processing of workpiecesInfo
- Publication number
- GB1544222A GB1544222A GB2766076A GB2766076A GB1544222A GB 1544222 A GB1544222 A GB 1544222A GB 2766076 A GB2766076 A GB 2766076A GB 2766076 A GB2766076 A GB 2766076A GB 1544222 A GB1544222 A GB 1544222A
- Authority
- GB
- United Kingdom
- Prior art keywords
- workpieces
- electron beam
- beam processing
- thermal electron
- thermal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/302—Controlling tubes by external information, e.g. programme control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
- H01J37/3007—Electron or ion-optical systems
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB2766076A GB1544222A (en) | 1976-07-02 | 1976-07-02 | Method of and apparatus for non-thermal electron beam processing of workpieces |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB2766076A GB1544222A (en) | 1976-07-02 | 1976-07-02 | Method of and apparatus for non-thermal electron beam processing of workpieces |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1544222A true GB1544222A (en) | 1979-04-19 |
Family
ID=10263195
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB2766076A Expired GB1544222A (en) | 1976-07-02 | 1976-07-02 | Method of and apparatus for non-thermal electron beam processing of workpieces |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB1544222A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2513425A1 (en) * | 1981-09-22 | 1983-03-25 | Thomson Csf | DEVICE FOR ANGULAR LIMITATION IN A CHARGED PARTICLE BEAM SYSTEM |
US4445041A (en) * | 1981-06-02 | 1984-04-24 | Hewlett-Packard Company | Electron beam blanker |
-
1976
- 1976-07-02 GB GB2766076A patent/GB1544222A/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4445041A (en) * | 1981-06-02 | 1984-04-24 | Hewlett-Packard Company | Electron beam blanker |
FR2513425A1 (en) * | 1981-09-22 | 1983-03-25 | Thomson Csf | DEVICE FOR ANGULAR LIMITATION IN A CHARGED PARTICLE BEAM SYSTEM |
EP0075504A1 (en) * | 1981-09-22 | 1983-03-30 | Thomson-Csf | Angle limitation device in a charged-particles beam system |
US4492870A (en) * | 1981-09-22 | 1985-01-08 | Thomson-Csf | Angular limitation device in a charged particle beam system |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PCNP | Patent ceased through non-payment of renewal fee |