GB1517952A - Glow-discharge electron-gun apparatus - Google Patents

Glow-discharge electron-gun apparatus

Info

Publication number
GB1517952A
GB1517952A GB2117975A GB2117975A GB1517952A GB 1517952 A GB1517952 A GB 1517952A GB 2117975 A GB2117975 A GB 2117975A GB 2117975 A GB2117975 A GB 2117975A GB 1517952 A GB1517952 A GB 1517952A
Authority
GB
United Kingdom
Prior art keywords
gun
electrode
measured
cathode
gas supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2117975A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1517952A publication Critical patent/GB1517952A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/10—Non-vacuum electron beam-welding or cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241—High voltage power supply or regulation circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Positioning Apparatuses (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Measuring Fluid Pressure (AREA)
GB2117975A 1974-05-30 1975-05-19 Glow-discharge electron-gun apparatus Expired GB1517952A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7407253A NL7407253A (nl) 1974-05-30 1974-05-30 Gasontladingselektronenkanon voor het opwekken van een elektronenbundel met behulp van een glimontlading.

Publications (1)

Publication Number Publication Date
GB1517952A true GB1517952A (en) 1978-07-19

Family

ID=19821457

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2117975A Expired GB1517952A (en) 1974-05-30 1975-05-19 Glow-discharge electron-gun apparatus

Country Status (9)

Country Link
JP (1) JPS513571A (nl)
AT (1) AT335579B (nl)
CA (1) CA1032633A (nl)
CH (1) CH581389A5 (nl)
DE (1) DE2522072A1 (nl)
FR (1) FR2275874A1 (nl)
GB (1) GB1517952A (nl)
NL (1) NL7407253A (nl)
SE (1) SE401425B (nl)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2492586A1 (fr) * 1980-10-20 1982-04-23 V Elektrotekhnichesky Procede de commande d'un canon electronique a decharge gazeuse
US4647818A (en) * 1984-04-16 1987-03-03 Sfe Technologies Nonthermionic hollow anode gas discharge electron beam source
DE4003623A1 (de) * 1990-02-07 1991-08-08 Kloeckner Ionon Verfahren zur steuerung einer anlage zur plasmabehandlung von werkstuecken
US20200260712A1 (en) 2019-02-15 2020-08-20 Novelty Manufacturing Co. Insect trap

Also Published As

Publication number Publication date
CH581389A5 (nl) 1976-10-29
JPS5510096B2 (nl) 1980-03-13
AT335579B (de) 1977-03-25
SE401425B (sv) 1978-05-02
DE2522072A1 (de) 1975-12-11
CA1032633A (en) 1978-06-06
FR2275874A1 (fr) 1976-01-16
ATA407575A (de) 1976-07-15
FR2275874B1 (nl) 1979-06-15
JPS513571A (en) 1976-01-13
NL7407253A (nl) 1975-12-02

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee