GB1459932A - Corpuscular beam apparatus - Google Patents
Corpuscular beam apparatusInfo
- Publication number
- GB1459932A GB1459932A GB642174A GB642174A GB1459932A GB 1459932 A GB1459932 A GB 1459932A GB 642174 A GB642174 A GB 642174A GB 642174 A GB642174 A GB 642174A GB 1459932 A GB1459932 A GB 1459932A
- Authority
- GB
- United Kingdom
- Prior art keywords
- beam apparatus
- bores
- feb
- balls
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Particle Accelerators (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Beam Exposure (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
1459932 Electron or ion beam apparatus SIEMENS AG 12 Feb 1974 [27 Feb 1973] 06421/74 Heading H1D An adjustable mounting for an object or a diaphragm in an electron or ion beam apparatus, such as a microscope, comprises an object table 3 adjustable in a plane transverse to the beam direction by sliding over body 2 and external adjusting means 12 acting on an intermediate member 10 which rolls in a direction transverse to the beam direction on at least two balls 8 in bores 9 in the object table 3, the balls being slightly smaller by several microns than the bores so that there is a lost motion between member 10 and the table 3. Member 10 and table 3 are pushed downwards by springs 11, 7.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2310355A DE2310355C3 (en) | 1973-02-27 | 1973-02-27 | Adjustment device for particle beam devices, in particular electron microscopes |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1459932A true GB1459932A (en) | 1976-12-31 |
Family
ID=5873563
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB642174A Expired GB1459932A (en) | 1973-02-27 | 1974-02-12 | Corpuscular beam apparatus |
Country Status (5)
Country | Link |
---|---|
US (1) | US3909611A (en) |
JP (1) | JPS502458A (en) |
DE (1) | DE2310355C3 (en) |
GB (1) | GB1459932A (en) |
NL (1) | NL7315331A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4774903A (en) * | 1986-02-12 | 1988-10-04 | The Marconi Company Limited | Mooring tether |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55165628A (en) * | 1979-06-12 | 1980-12-24 | Fujitsu Ltd | Apparatus for electron-beam irradiation |
DE3128814A1 (en) * | 1981-07-21 | 1983-02-10 | Siemens AG, 1000 Berlin und 8000 München | ELECTRICALLY CONDUCTIVE SAMPLE HOLDER FOR THE ANALYSIS TECHNOLOGY OF SECONDARY ION MASS SPECTROMETRY |
US4996433A (en) * | 1989-11-06 | 1991-02-26 | Gatan, Inc. | Specimen heating holder for electron microscopes |
DE69128104T2 (en) * | 1990-05-18 | 1998-04-09 | Hitachi Ltd | Electron microscope, sample actuator for an electron microscope and method for observing microscopic images |
JPH10502210A (en) * | 1994-06-28 | 1998-02-24 | ライカ リトグラフィー システムズ リミテッド | Electron beam lithograph machine |
JP4429783B2 (en) * | 2004-04-13 | 2010-03-10 | 日本電子株式会社 | Aperture plate support mechanism and charged particle beam apparatus including the same |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1052542A (en) * | 1964-01-21 | |||
US3628013A (en) * | 1969-08-29 | 1971-12-14 | Max Planck Gesellschaft | Adjusting device for corpuscular-beam apparatus |
-
1973
- 1973-02-27 DE DE2310355A patent/DE2310355C3/en not_active Expired
- 1973-11-08 NL NL7315331A patent/NL7315331A/xx not_active Application Discontinuation
-
1974
- 1974-02-12 GB GB642174A patent/GB1459932A/en not_active Expired
- 1974-02-20 US US443946A patent/US3909611A/en not_active Expired - Lifetime
- 1974-02-25 JP JP49022240A patent/JPS502458A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4774903A (en) * | 1986-02-12 | 1988-10-04 | The Marconi Company Limited | Mooring tether |
Also Published As
Publication number | Publication date |
---|---|
DE2310355C3 (en) | 1975-11-13 |
DE2310355B2 (en) | 1975-04-03 |
US3909611A (en) | 1975-09-30 |
NL7315331A (en) | 1974-08-29 |
DE2310355A1 (en) | 1974-09-05 |
JPS502458A (en) | 1975-01-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PCNP | Patent ceased through non-payment of renewal fee |