GB1422519A - Sputtering method and apparatus - Google Patents

Sputtering method and apparatus

Info

Publication number
GB1422519A
GB1422519A GB1013475A GB1013475A GB1422519A GB 1422519 A GB1422519 A GB 1422519A GB 1013475 A GB1013475 A GB 1013475A GB 1013475 A GB1013475 A GB 1013475A GB 1422519 A GB1422519 A GB 1422519A
Authority
GB
United Kingdom
Prior art keywords
maintained
sputtering method
sputtering
telic
gauss
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1013475A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Telic Corp
Original Assignee
Telic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Telic Corp filed Critical Telic Corp
Priority to GB1013475A priority Critical patent/GB1422519A/en
Publication of GB1422519A publication Critical patent/GB1422519A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1422519 Sputtering apparatus TELIC CORP 21 March 1975 10134/75 Addition to 1420061 Heading C7F [Also in Division H1] The Specification reports the subject matter of the parent Specification with the additional disclosure that the working gas environment is maintained at a pressure of 10<SP>-2</SP> torr and below, and the magnetic field is maintained at 300 gauss and below in the described method and apparatus for sputtering material on to a target.
GB1013475A 1975-03-21 1975-03-21 Sputtering method and apparatus Expired GB1422519A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1013475A GB1422519A (en) 1975-03-21 1975-03-21 Sputtering method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1013475A GB1422519A (en) 1975-03-21 1975-03-21 Sputtering method and apparatus

Publications (1)

Publication Number Publication Date
GB1422519A true GB1422519A (en) 1976-01-28

Family

ID=9962144

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1013475A Expired GB1422519A (en) 1975-03-21 1975-03-21 Sputtering method and apparatus

Country Status (1)

Country Link
GB (1) GB1422519A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2192196A (en) * 1986-06-13 1988-01-06 Balzers Hochvakuum Process for the thermochemical surface treatment of materials in a reactive gas plasma
GB2211861B (en) * 1987-10-30 1992-01-29 Pioneer Electronic Corp Photomagnetic memory medium having a non-columnar structure

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2192196A (en) * 1986-06-13 1988-01-06 Balzers Hochvakuum Process for the thermochemical surface treatment of materials in a reactive gas plasma
GB2192196B (en) * 1986-06-13 1991-01-02 Balzers Hochvakuum Process for the thermochemical surface treatment of materials in a reactive gas plasma
GB2211861B (en) * 1987-10-30 1992-01-29 Pioneer Electronic Corp Photomagnetic memory medium having a non-columnar structure
US5135819A (en) * 1987-10-30 1992-08-04 Pioneer Electronic Corporation Photomagnetic memory medium having a non-columnar structure

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Legal Events

Date Code Title Description
PS Patent sealed
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee