GB1352619A - Thin film resistor - Google Patents
Thin film resistorInfo
- Publication number
- GB1352619A GB1352619A GB3260971A GB3260971A GB1352619A GB 1352619 A GB1352619 A GB 1352619A GB 3260971 A GB3260971 A GB 3260971A GB 3260971 A GB3260971 A GB 3260971A GB 1352619 A GB1352619 A GB 1352619A
- Authority
- GB
- United Kingdom
- Prior art keywords
- inert gas
- thin film
- heated
- substrate
- gas mixture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/20—Resistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
- H01C17/14—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by chemical deposition
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Non-Adjustable Resistors (AREA)
Abstract
1352619 Thin film Al resistors MOTOROLA Inc 12 July 1971 [21 Aug 1970] 32609/71 Heading C7F [Also in Division H1] A thin film resistor of volume resistivity 10<SP>-2</SP> to 10<SP>+6</SP> ohm-cm is formed on a substrate by forming a first gas mixture of inert gas and Et 3 Al and a second gas mixture of inert gas and an oxidising component, e.g. O 2 , mixing these mixtures and passing the resulting mixture over a substrate heated to 250-500‹C to form a coating. The first gas mixture is made by bubbling inert gas, e.g. Ar, N 2 , He or Kr, through Et 3 Al heated to less than 140‹C; the final gas mixture may contain 0À001-25À0 mole % oxidant (based on Et 3 Al); the substrate is heated by conduction, RF induction or radiation and may be SiO 2 -coated Si, Al 2 O 3 -coated Si, Al 2 O 3 , BeO or other ceramic, an organic polymer, Si or Al. The film formed is normally 1,000-10,000 Š, but may be 100-200 A or 50,000 A, and resistor patterns are formed therein by standard photoresist techniques. In a modification, the process is carried out at reduced pressure with or without inert gas.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US6606170A | 1970-08-21 | 1970-08-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1352619A true GB1352619A (en) | 1974-05-08 |
Family
ID=22067008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB3260971A Expired GB1352619A (en) | 1970-08-21 | 1971-07-12 | Thin film resistor |
Country Status (5)
| Country | Link |
|---|---|
| BE (1) | BE771607A (en) |
| DE (1) | DE2141630A1 (en) |
| FR (1) | FR2104558A5 (en) |
| GB (1) | GB1352619A (en) |
| NL (1) | NL7111455A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4433012A (en) * | 1980-07-10 | 1984-02-21 | Itt Industries, Inc. | Process for the pyrolytic deposition of aluminum from TIBA |
| US4460618A (en) * | 1978-05-25 | 1984-07-17 | Itt Industries, Inc. | Aluminum deposition on semiconductor bodies |
-
1971
- 1971-07-12 GB GB3260971A patent/GB1352619A/en not_active Expired
- 1971-08-19 FR FR7130303A patent/FR2104558A5/fr not_active Expired
- 1971-08-19 NL NL7111455A patent/NL7111455A/xx unknown
- 1971-08-19 DE DE19712141630 patent/DE2141630A1/en active Pending
- 1971-08-20 BE BE771607A patent/BE771607A/en unknown
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4460618A (en) * | 1978-05-25 | 1984-07-17 | Itt Industries, Inc. | Aluminum deposition on semiconductor bodies |
| US4433012A (en) * | 1980-07-10 | 1984-02-21 | Itt Industries, Inc. | Process for the pyrolytic deposition of aluminum from TIBA |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2104558A5 (en) | 1972-04-14 |
| BE771607A (en) | 1972-02-21 |
| NL7111455A (en) | 1972-02-23 |
| DE2141630A1 (en) | 1972-03-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| CSNS | Application of which complete specification have been accepted and published, but patent is not sealed |