GB1335311A - Variable aperture photoexposure device - Google Patents

Variable aperture photoexposure device

Info

Publication number
GB1335311A
GB1335311A GB2750871A GB2750871A GB1335311A GB 1335311 A GB1335311 A GB 1335311A GB 2750871 A GB2750871 A GB 2750871A GB 2750871 A GB2750871 A GB 2750871A GB 1335311 A GB1335311 A GB 1335311A
Authority
GB
United Kingdom
Prior art keywords
spot
directions
size
light spot
aperture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2750871A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GERBER SCIENT INDSTRUMENT CO
Original Assignee
GERBER SCIENT INDSTRUMENT CO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GERBER SCIENT INDSTRUMENT CO filed Critical GERBER SCIENT INDSTRUMENT CO
Publication of GB1335311A publication Critical patent/GB1335311A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B9/00—Exposure-making shutters; Diaphragms
    • G03B9/08—Shutters

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Control For Cameras (AREA)

Abstract

1335311 Photographic apparatus GERBER SCIENTIFIC INSTRUMENT CO 11 June 1971 [15 Sept 1970] 27508/71 Headings G2A and G3N A photo-exposure device 18 comprises an aperture mechanism for directing a rectangular spot of light on to a photo-sensitive surface 16, means for effecting relative movement between the surface 16 and the light spot, and means for varying the size of the light spot in accordance with the speed of relative movement. As shown, the device 18 is movable preferably stepwise, in two perpendicular directions X, Y over the surface 16, and the aperture size is variable in two directions U, V parallel to the directions X, Y, by altering the positions of movable blades 52, 50 respectively. The device 18 includes a light source (30) Fig. 2, (not shown), condensers (34) and shutter (44). A controller 11 drives the device 18 and also controls the line width (42) exposed by the light spot (40). To vary the size of the spot (40) in the direction parallel to its direction of movement (movement taking place along the X axis or along the Y axis but not along both simultaneously) tachometers (104, 106) are provided which produce output signals directly related to the speed of the light spot in the X, Y directions respectively. These signals are summed, and a switch (98) transmits the signal to whichever blade motor 74, 80 has not received line width control signals. Thus for spot movement, its size increases during an acceleration and decreases during a deceleration. In another embodiment Figs. 5-10, (not shown) a C.R.T. (128) and two movable blades (130), are used to provide the spot and control the size thereof in one direction. Fixed masks (136) define a rectangular aperture (132) with the blades (130). During acceleration and deceleration, the scan (144) of the C.R.T. beam illuminates a small portion of the aperture (132), increase to and decrease from the fully illuminated position being gradual. A Dove prism may be provided to rotate the projected light spot so as to draw lines in other directions.
GB2750871A 1970-09-15 1971-06-11 Variable aperture photoexposure device Expired GB1335311A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US7235970A 1970-09-15 1970-09-15

Publications (1)

Publication Number Publication Date
GB1335311A true GB1335311A (en) 1973-10-24

Family

ID=22107076

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2750871A Expired GB1335311A (en) 1970-09-15 1971-06-11 Variable aperture photoexposure device

Country Status (4)

Country Link
US (1) US3695154A (en)
JP (1) JPS519617B1 (en)
FR (1) FR2098005A5 (en)
GB (1) GB1335311A (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3836916A (en) * 1973-02-26 1974-09-17 Ibm Apparatus for exposing lines on a photosensitive surface
US3950763A (en) * 1974-10-29 1976-04-13 California Computer Products, Inc. Cathode ray tube lighthead
US4176926A (en) * 1976-09-28 1979-12-04 Quest Automation Limited Optical projection apparatus
US4231659A (en) * 1979-04-11 1980-11-04 The Gerber Scientific Instrument Company Method of making an overlay mask and a printing plate therefrom
US4249808A (en) * 1979-08-10 1981-02-10 The Gerber Scientific Instrument Company Photoplotting in color with exposure budgeting
US4363539A (en) * 1981-07-20 1982-12-14 Gerber Scientific, Inc. Photohead with flashing beam
US4500182A (en) * 1982-12-27 1985-02-19 Nicolet Instrument Corporation Photoplotter
US4573779A (en) * 1983-12-30 1986-03-04 International Business Machines Corporation Variable size circular aperture camera
US4566015A (en) * 1984-06-07 1986-01-21 Polaroid Corporation Image recording apparatus with adjustable mask
US4675702A (en) * 1986-03-14 1987-06-23 Gerber Scientific Inc. Photoplotter using a light valve device and process for exposing graphics
DE3620017A1 (en) * 1986-06-13 1987-12-17 Mivatec Gmbh PHOTOPLOT PROCESS AND PHOTOPLOTTER FOR EXPOSURE A FILM
DE3811762A1 (en) * 1988-04-08 1989-10-19 Winter Hans Joachim Drawing machine with drawing pen
DE102008018763A1 (en) * 2008-04-14 2009-11-05 Kristin Bartsch Lithography exposure device

Also Published As

Publication number Publication date
DE2136504A1 (en) 1972-03-16
DE2136504B2 (en) 1975-08-21
JPS519617B1 (en) 1976-03-29
FR2098005A5 (en) 1972-03-03
US3695154A (en) 1972-10-03

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee