GB1325552A - Combined magnetic and electrostatic lens - Google Patents

Combined magnetic and electrostatic lens

Info

Publication number
GB1325552A
GB1325552A GB1298670A GB1298670A GB1325552A GB 1325552 A GB1325552 A GB 1325552A GB 1298670 A GB1298670 A GB 1298670A GB 1298670 A GB1298670 A GB 1298670A GB 1325552 A GB1325552 A GB 1325552A
Authority
GB
United Kingdom
Prior art keywords
electrostatic lens
combined magnetic
july
plasmaphysik
gmbh
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1298670A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institut fuer Plasmaphysik GmbH
Original Assignee
Institut fuer Plasmaphysik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE1937482A external-priority patent/DE1937482C3/en
Application filed by Institut fuer Plasmaphysik GmbH filed Critical Institut fuer Plasmaphysik GmbH
Publication of GB1325552A publication Critical patent/GB1325552A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Lenses (AREA)

Abstract

1325552 Discharge apparatus INSTITUT FUR PLASMAPHYSIK GmbH 7 July 1970 [23 July 1969] 12986/73 Divided out of 1325551 Heading H1D The description is the same as that of Specification 1,325,551 but the claims relate to the lens adapted to focus both electrons and ions.
GB1298670A 1969-07-23 1970-07-07 Combined magnetic and electrostatic lens Expired GB1325552A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE1937482A DE1937482C3 (en) 1969-07-23 1969-07-23 Microbeam probe
GB3298770A GB1325551A (en) 1969-07-23 1970-07-07 Ion beam microprobes

Publications (1)

Publication Number Publication Date
GB1325552A true GB1325552A (en) 1973-08-01

Family

ID=25757690

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1298670A Expired GB1325552A (en) 1969-07-23 1970-07-07 Combined magnetic and electrostatic lens

Country Status (1)

Country Link
GB (1) GB1325552A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0066409B1 (en) * 1981-05-22 1988-03-02 Hitachi, Ltd. Charged particle source

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0066409B1 (en) * 1981-05-22 1988-03-02 Hitachi, Ltd. Charged particle source

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee