GB1325540A - Electron beam apparatus - Google Patents

Electron beam apparatus

Info

Publication number
GB1325540A
GB1325540A GB4991969A GB1325540DA GB1325540A GB 1325540 A GB1325540 A GB 1325540A GB 4991969 A GB4991969 A GB 4991969A GB 1325540D A GB1325540D A GB 1325540DA GB 1325540 A GB1325540 A GB 1325540A
Authority
GB
United Kingdom
Prior art keywords
deflection
inputs
circuits
astigmatism
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4991969A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Ltd
Original Assignee
Texas Instruments Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Ltd filed Critical Texas Instruments Ltd
Publication of GB1325540A publication Critical patent/GB1325540A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
    • H03F3/34—Dc amplifiers in which all stages are dc-coupled
    • H03F3/343—Dc amplifiers in which all stages are dc-coupled with semiconductor devices only
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06G—ANALOGUE COMPUTERS
    • G06G7/00—Devices in which the computing operation is performed by varying electric or magnetic quantities
    • G06G7/12—Arrangements for performing computing operations, e.g. operational amplifiers
    • G06G7/16—Arrangements for performing computing operations, e.g. operational amplifiers for multiplication or division
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06G—ANALOGUE COMPUTERS
    • G06G7/00—Devices in which the computing operation is performed by varying electric or magnetic quantities
    • G06G7/12—Arrangements for performing computing operations, e.g. operational amplifiers
    • G06G7/25—Arrangements for performing computing operations, e.g. operational amplifiers for discontinuous functions, e.g. backlash, dead zone, limiting absolute value or peak value
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control
    • H01J37/3023—Programme control
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
    • H03F3/45—Differential amplifiers
    • H03F3/45071—Differential amplifiers with semiconductor devices only
    • H03F3/45076—Differential amplifiers with semiconductor devices only characterised by the way of implementation of the active amplifying circuit in the differential amplifier
    • H03F3/4508—Differential amplifiers with semiconductor devices only characterised by the way of implementation of the active amplifying circuit in the differential amplifier using bipolar transistors as the active amplifying circuit
    • H03F3/45098—PI types
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K19/00—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits
    • H03K19/20—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits characterised by logic function, e.g. AND, OR, NOR, NOT circuits
    • H03K19/21—EXCLUSIVE-OR circuits, i.e. giving output if input signal exists at only one input; COINCIDENCE circuits, i.e. giving output only if all input signals are identical
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F2203/00—Indexing scheme relating to amplifiers with only discharge tubes or only semiconductor devices as amplifying elements covered by H03F3/00
    • H03F2203/45—Indexing scheme relating to differential amplifiers
    • H03F2203/45494—Indexing scheme relating to differential amplifiers the CSC comprising one or more potentiometers

Abstract

1325540 Function generators TEXAS INSTRUMENTS Ltd 2 Oct 1970 [10 Dot 1969] 49919/69 Heading G4G [Also in Division H1] In an electron beam apparatus, especially for exposing a sensitive resist in the manufacture of integrated circuits, wherein the beam is deflected by about 10,000 times the spot diameter over a plane surface, the deflection causes astigmatism and de-focusing due to the focal surface being spherical; these defects are corrected by applying signals proportional to the square of the deflection to the electron lens and signals proportional to the cube of the deflection to an astigmatism correction means. It is shown that the two waveforms to be supplied to the two sets of 4 astigmatism correctors are Πa 2(X<SP>2</SP> + Y<SP>2</SP>) X (the smaller of | X | and | Y | and a ( | Y | - | X | ) (X<SP>2</SP> + Y<SP>2</SP>) where X and Y are the deflection signals and a is a multiplying factor. If the astigmatism corrector lies partly within the field of a magnetic objective lens which rotates the deflection, the quantities X and Y above should be related to axes which are rotated relative to the deflection axes X<SP>1</SP> and Y<SP>1</SP>. Waveform generating circuit. Fig. 7.- The signals X<SP>1</SP> and Y<SP>1</SP> from the deflection circuits are fed to the rotation circuit 62 which produces outputs X and Y related to rotate axes and includes X and Y preset controls for compensating for any offset in the symmetry along the axes. Circuits 68 and 69 derive | X | and | Y | and provide inputs to a comparator 72, which determines which of its inputs is smaller, and to an exclusive OR gate 77 which determines whether the signs of X and Y are the same or opposite. Multipliers 73 and 74 derive X<SP>2</SP> and Y<SP>2</SP> and combining circuits 78 and 79 combine the inputs to produce the two required outputs mentioned above. The switch 82 allows the two signals to be fed either way to the two astigmatism correctors via amplifiers 80 and 81 which are voltage or current amplifiers according to whether the correctors are electrostatic or magnetic. Axis rotation circuit. Fig. 8.-Four integrated circuit differential operational amplifiers 90-93 are connected as summing circuits with respective feedback resistors 94-97. Each amplifier has a main input resistor such as 98 (to which the Y<SP>1</SP> input is connected) and a pair of subsidiary input resistors such as 102 and 103 which are bridged by a potentiometer such as 110. The rotation control 63 adjusts the wipers of 111 and 112 in one direction and those of 110 and 113 in the opposite direction. The preset controls 64 and 65 shift the zero values of the X and Y waveforms to compensate for lack of symmetry of the objective lens in the two co-ordinate directions. The values of the input resistors of amplifiers 90 and 91 are twice those of the feedback resistors 94 and 95. Amplifying circuit. Fig. 14.-The current through a long-tailed pair 186 and 187 is controlled by the output of a summing amplifier 182, the inputs of which are X<SP>2</SP> and Y<SP>2</SP>. Inputs | Y | and | X | are supplied to the bases of transistors 186 and 187 the outputs of which are fed to a differential amplifier 190 which provides the required output (X<SP>2</SP> + Y<SP>2</SP>) ( | Y | - | X |). The same circuit with the base of transistor 187 earthed is used to derive X<SP>2</SP> from X which is supplied as an input to the amplifier 182 and to the transistor 186 (Fig. 12, not shown).
GB4991969A 1969-10-10 1969-10-10 Electron beam apparatus Expired GB1325540A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4991969 1969-10-10

Publications (1)

Publication Number Publication Date
GB1325540A true GB1325540A (en) 1973-08-01

Family

ID=10454000

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4991969A Expired GB1325540A (en) 1969-10-10 1969-10-10 Electron beam apparatus

Country Status (2)

Country Link
US (1) US3753034A (en)
GB (1) GB1325540A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2846894A1 (en) * 1977-10-31 1979-05-10 Texas Instruments Inc MAGNETIC FIELD GENERATOR

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1441824A (en) * 1973-04-19 1976-07-07 Cambridge Scientific Instr Ltd Scanning electronbeam instrument
US3914637A (en) * 1974-04-29 1975-10-21 Us Air Force Method and apparatus for focusing an electron beam
US3961223A (en) * 1975-03-04 1976-06-01 United Technologies Corporation Astigmatic focus correction circuit
US4101813A (en) * 1977-04-14 1978-07-18 The United States Of America As Represented By The United States Department Of Energy Double deflection system for an electron beam device
US4180738A (en) * 1977-07-30 1979-12-25 National Research Development Corporation Astigmatism in electron beam probe instruments
JPS5492050A (en) * 1977-12-29 1979-07-20 Jeol Ltd Method and apparatus for astigmatic correction of scanning electronic microscope and others
FR2413776A1 (en) * 1978-01-03 1979-07-27 Thomson Csf ELECTRONIC OPTICS LENS
JPS5613649A (en) * 1979-07-12 1981-02-10 Akashi Seisakusho Co Ltd Correcting method and device for astigmatism in scanning type electron microscope and the like
US4303864A (en) * 1979-10-25 1981-12-01 The United States Of America As Represented By The United States Department Of Energy Sextupole system for the correction of spherical aberration
JPS5693318A (en) * 1979-12-10 1981-07-28 Fujitsu Ltd Electron beam exposure device
US4389571A (en) * 1981-04-01 1983-06-21 The United States Of America As Represented By The United States Department Of Energy Multiple sextupole system for the correction of third and higher order aberration
JPS60105149A (en) * 1983-11-11 1985-06-10 Jeol Ltd Electron-ray device
US4560905A (en) * 1984-04-16 1985-12-24 The United States Of America As Represented By The United States Department Of Energy Electrostatic quadrupole focused particle accelerating assembly with laminar flow beam
US4899091A (en) * 1984-05-29 1990-02-06 Tektronix, Inc. Cathode-ray-tube astigmatism correction apparatus
DE8634545U1 (en) * 1986-12-23 1987-05-21 Siemens Ag, 1000 Berlin Und 8000 Muenchen, De
JP2706471B2 (en) * 1987-09-30 1998-01-28 日本真空技術株式会社 Parallel sweep device for electrostatic sweep type ion implanter
DE3916787C2 (en) * 1989-05-23 1994-01-20 Balzers Hochvakuum Method and arrangement for controlling the focusing of a beam of monopolar charged particles and application
US4962309A (en) * 1989-08-21 1990-10-09 Rockwell International Corporation Magnetic optics adaptive technique
EP1489641B1 (en) * 2003-06-18 2019-08-14 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle deflecting system
GB2418061B (en) * 2004-09-03 2006-10-18 Zeiss Carl Smt Ltd Scanning particle beam instrument
JP2007012516A (en) * 2005-07-01 2007-01-18 Jeol Ltd Charged particle beam apparatus and test piece information detection method using the same

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB661266A (en) * 1947-02-04 1951-11-21 Emi Ltd Improvements in or relating to circuit arrangements embodying cathode ray tubes
US2926254A (en) * 1955-08-11 1960-02-23 Vickers Electrical Co Ltd Electron lenses
US2890379A (en) * 1956-09-18 1959-06-09 Chromatic Television Lab Inc Distortion correction in cathode-ray tubes
US3084276A (en) * 1960-01-18 1963-04-02 Texas Instruments Inc Transistorized dynamic focus circuit
US3150258A (en) * 1962-07-05 1964-09-22 Philips Electronic Pharma Electromagnetic stigmators for correcting electron-optical deficiencies in the lenses of electron beam instruments
DE1216455B (en) * 1964-03-25 1966-05-12 Siemens Ag Method for aligning the field axis of an electron-optical lens, in particular in a stigmator assigned to an electron microscope, and arrangement for carrying out the method
US3504211A (en) * 1965-05-12 1970-03-31 Hitachi Ltd Electron beam control device for use with a cathode ray tube for dynamic correction of electron beam astigmatism and defocusing
DE1514706C2 (en) * 1966-03-15 1975-11-06 Siemens Ag, 1000 Berlin Und 8000 Muenchen Deflection system for corpuscular beam devices
US3491236A (en) * 1967-09-28 1970-01-20 Gen Electric Electron beam fabrication of microelectronic circuit patterns
US3422305A (en) * 1967-10-12 1969-01-14 Tektronix Inc Geometry and focus correcting circuit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2846894A1 (en) * 1977-10-31 1979-05-10 Texas Instruments Inc MAGNETIC FIELD GENERATOR
US4538127A (en) * 1977-10-31 1985-08-27 Texas Instruments Incorporated Magnetic quadripole

Also Published As

Publication number Publication date
US3753034A (en) 1973-08-14

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee