GB1283689A - Improvements in or relating to thin film circuit elements - Google Patents

Improvements in or relating to thin film circuit elements

Info

Publication number
GB1283689A
GB1283689A GB51681/70A GB5168170A GB1283689A GB 1283689 A GB1283689 A GB 1283689A GB 51681/70 A GB51681/70 A GB 51681/70A GB 5168170 A GB5168170 A GB 5168170A GB 1283689 A GB1283689 A GB 1283689A
Authority
GB
United Kingdom
Prior art keywords
thin film
tantalum
film circuit
layer
relating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB51681/70A
Inventor
Hans Dieter Langer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HERMSDORF KERAMIK VEB
Keramische Werke Hermsdorf VEB
Original Assignee
HERMSDORF KERAMIK VEB
Keramische Werke Hermsdorf VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HERMSDORF KERAMIK VEB, Keramische Werke Hermsdorf VEB filed Critical HERMSDORF KERAMIK VEB
Priority to GB51681/70A priority Critical patent/GB1283689A/en
Publication of GB1283689A publication Critical patent/GB1283689A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C13/00Resistors not provided for elsewhere
    • H01C13/02Structural combinations of resistors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00Electric solid-state thin-film or thick-film devices, not otherwise provided for

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)

Abstract

1283689 Circuit element KOMBINAT KERAMISCHE WERKE HERMSDORF VEB 30 Oct 1970 51681/70 Headings HIM HlR and HIS A thin film circuit element, e.g. capacitor (Fig. 1, not shown) resistor, or conductive paths comprises a conductive or resistive layer of an alloy of tantalum with rhenium (niobium, zirconium, hafnium, titanium, vanadium and molybdenum being used instead or in addition to tantalum). The element may also comprise a layer of tantalum &c. which is alloyed with tungsten and/or rhenium at regions bordering on another layer. A corrosion protective layer of beryllium oxide may be applied.
GB51681/70A 1970-10-30 1970-10-30 Improvements in or relating to thin film circuit elements Expired GB1283689A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB51681/70A GB1283689A (en) 1970-10-30 1970-10-30 Improvements in or relating to thin film circuit elements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB51681/70A GB1283689A (en) 1970-10-30 1970-10-30 Improvements in or relating to thin film circuit elements

Publications (1)

Publication Number Publication Date
GB1283689A true GB1283689A (en) 1972-08-02

Family

ID=10460983

Family Applications (1)

Application Number Title Priority Date Filing Date
GB51681/70A Expired GB1283689A (en) 1970-10-30 1970-10-30 Improvements in or relating to thin film circuit elements

Country Status (1)

Country Link
GB (1) GB1283689A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2221839B2 (en) 2000-08-10 2017-05-24 Showa Denko K.K. Niobium powder, sintered body and capacitor using the body

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2221839B2 (en) 2000-08-10 2017-05-24 Showa Denko K.K. Niobium powder, sintered body and capacitor using the body

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees