GB1209380A - Image plane plate - Google Patents

Image plane plate

Info

Publication number
GB1209380A
GB1209380A GB4591268A GB4591268A GB1209380A GB 1209380 A GB1209380 A GB 1209380A GB 4591268 A GB4591268 A GB 4591268A GB 4591268 A GB4591268 A GB 4591268A GB 1209380 A GB1209380 A GB 1209380A
Authority
GB
United Kingdom
Prior art keywords
plate
scribed
coating
light
opaque
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4591268A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PPG Industries Inc
Original Assignee
PPG Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PPG Industries Inc filed Critical PPG Industries Inc
Publication of GB1209380A publication Critical patent/GB1209380A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54Absorbers, e.g. of opaque materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

1,209,380. Image plane plates. PPG INDUSTRIES Inc. 27 Sept., 1968 [29 Sept., 1967], No 45912/68. Heading C1M. [Also in Division G2] A pattern in an ultra-violet-light-responsive substrate is produced by: (i) producing a plate of glass having selected portions of one surface thereof stained by migration into the glass of metal ions so as to be opaque to U.V. light in said portions, (ii) applying the plate to a substrate whereon said pattern is to be produced in a photoresist material developable by exposure to U.V. light and subsequent subjection to a solvent, and passing U.V. light through the plate on to the photoresist and treating with the solvent. The stained glass plate is preferably made by first staining all one side of the plate, by either simply coating one side, or masking one side and dipping in the stain material, or by dipping the plate unmasked and removing the coating on one surface of the plate. The metal ion is preferably silver, applied by using a staining material comprising silver chromate and titania in an appropriate vehicle, which material is applied and fire at, e.g. 1150‹ F. for 7 minutes, resulting in a stain of depth about 0.001 inch in the plate. This gives 8-10% transmission of visible light with substantially zero transmission of U.V. The optical density of the surface may be improved by treating with, e.g. forming gas, SO 2 or H 2 S. The stained plate is then coated with an etch-resistant coating, and the desired pattern scribed in said coating. The plate is then etched in the scribed zones, so as to remove selected portions of the opaque zone, and the etch resistant coating then removed. Such a plate has the desired pattern scribed in it, necessitating the use of a negative resist material on the substrate. In an alternative method, the plate is first coated and scribed, and the scribed areas rendered U.V.-opaque as above. The coating is then removed, leaving a plate in which the opaque regions give the desired pattern, allowing the use of a positive resist on the substrate.
GB4591268A 1967-09-29 1968-09-27 Image plane plate Expired GB1209380A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US67183067A 1967-09-29 1967-09-29

Publications (1)

Publication Number Publication Date
GB1209380A true GB1209380A (en) 1970-10-21

Family

ID=24696032

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4591268A Expired GB1209380A (en) 1967-09-29 1968-09-27 Image plane plate

Country Status (6)

Country Link
JP (1) JPS534227B1 (en)
BE (1) BE721587A (en)
DE (1) DE1797445A1 (en)
FR (1) FR1585520A (en)
GB (1) GB1209380A (en)
SE (1) SE349222B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5773428A (en) * 1980-10-21 1982-05-08 Tektronix Inc Power source circuit

Also Published As

Publication number Publication date
FR1585520A (en) 1970-01-23
DE1797445A1 (en) 1971-09-09
JPS534227B1 (en) 1978-02-15
SE349222B (en) 1972-09-18
BE721587A (en) 1969-03-27

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee