GB1185323A - Improvements in or relating to Electron Emission Control. - Google Patents

Improvements in or relating to Electron Emission Control.

Info

Publication number
GB1185323A
GB1185323A GB26161/66A GB2616166A GB1185323A GB 1185323 A GB1185323 A GB 1185323A GB 26161/66 A GB26161/66 A GB 26161/66A GB 2616166 A GB2616166 A GB 2616166A GB 1185323 A GB1185323 A GB 1185323A
Authority
GB
United Kingdom
Prior art keywords
electron
electrons
filter
magnetic field
transmitted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB26161/66A
Inventor
William Charles Nixon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hilger and Watts Ltd
Original Assignee
Hilger and Watts Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hilger and Watts Ltd filed Critical Hilger and Watts Ltd
Priority to GB26161/66A priority Critical patent/GB1185323A/en
Priority to US644712A priority patent/US3448327A/en
Publication of GB1185323A publication Critical patent/GB1185323A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/84—Traps for removing or diverting unwanted particles, e.g. negative ions, fringing electrons; Arrangements for velocity or mass selection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/029—Schematic arrangements for beam forming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

1,185,323. Electron beam systems. HILGER & WATTS Ltd. 13 June, 1967 [13 June, 1966], No. 26161/66. Heading H1D [Also in Division G3] An electron beam having a restricted range of electron energy levels is produced by directing a beam of electrons from source 2, for example through magnetic field 8, to a first electron filter 12 where electrons having energy below a first predetermined level are reflected back through magnetic field 8 to be deflected to a second electron filter 16 which transmits electrons having energies above a second predetermined level, lower than the first, the transmitted beam thus having electron energies restricted to the range between the two predetermined energy levels. Preferably the magnetic field 8 deflects the electrons through exactly 90 degrees so that the transmitted beam path from filter 16 is coaxial with that of the beam originally emitted from source 2. To ensure that this is so, the path of the higher energy electrons transmitted through the first filter 12, e.g. an electron mixer, may be measured automatically by two spaced collector plates 22 connected to a balance unit 24 which serves to adjust appropriately the current in the coils 26 generating the magnetic field 8 or to adjust the potential of source 2. Alternatively the position of the transmitted beam from mirror 12 may be displayed on a fluorescent screen 20. In apparatus described, Figs. 2 and 3 (not shown), for producing the monochromatic electron beam in which a beam target is placed in a specimen chamber for impact of the electron beam, the two electron mirrors are mounted in conductive holders in an insulating block between an electron gun and the specimen chamber. An extension in the beam direction of the holder for the second mirror may be used to focus the emergent beam. The magnetic deflecting field is provided by two adjustable permanent magnets joined by a yoke, and the leading-in arrangements to, for example, the mirrors and collector plates, are also described.
GB26161/66A 1966-06-13 1966-06-13 Improvements in or relating to Electron Emission Control. Expired GB1185323A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB26161/66A GB1185323A (en) 1966-06-13 1966-06-13 Improvements in or relating to Electron Emission Control.
US644712A US3448327A (en) 1966-06-13 1967-06-08 Electron emission control

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB26161/66A GB1185323A (en) 1966-06-13 1966-06-13 Improvements in or relating to Electron Emission Control.

Publications (1)

Publication Number Publication Date
GB1185323A true GB1185323A (en) 1970-03-25

Family

ID=10239322

Family Applications (1)

Application Number Title Priority Date Filing Date
GB26161/66A Expired GB1185323A (en) 1966-06-13 1966-06-13 Improvements in or relating to Electron Emission Control.

Country Status (2)

Country Link
US (1) US3448327A (en)
GB (1) GB1185323A (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3126477A (en) * 1964-03-24 Multiple dispersion mass spectrometer
US2429558A (en) * 1945-08-24 1947-10-21 Research Corp Electron beam monochromator
US2901627A (en) * 1953-02-19 1959-08-25 Leitz Ernst Gmbh Method of and apparatus for the electronic magnification of objects
DE1006983B (en) * 1955-02-01 1957-04-25 Leitz Ernst Gmbh Method and device for super-microscopic imaging by means of an ion microscope

Also Published As

Publication number Publication date
US3448327A (en) 1969-06-03

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees