GB1185323A - Improvements in or relating to Electron Emission Control. - Google Patents
Improvements in or relating to Electron Emission Control.Info
- Publication number
- GB1185323A GB1185323A GB26161/66A GB2616166A GB1185323A GB 1185323 A GB1185323 A GB 1185323A GB 26161/66 A GB26161/66 A GB 26161/66A GB 2616166 A GB2616166 A GB 2616166A GB 1185323 A GB1185323 A GB 1185323A
- Authority
- GB
- United Kingdom
- Prior art keywords
- electron
- electrons
- filter
- magnetic field
- transmitted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/84—Traps for removing or diverting unwanted particles, e.g. negative ions, fringing electrons; Arrangements for velocity or mass selection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/029—Schematic arrangements for beam forming
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
- H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
1,185,323. Electron beam systems. HILGER & WATTS Ltd. 13 June, 1967 [13 June, 1966], No. 26161/66. Heading H1D [Also in Division G3] An electron beam having a restricted range of electron energy levels is produced by directing a beam of electrons from source 2, for example through magnetic field 8, to a first electron filter 12 where electrons having energy below a first predetermined level are reflected back through magnetic field 8 to be deflected to a second electron filter 16 which transmits electrons having energies above a second predetermined level, lower than the first, the transmitted beam thus having electron energies restricted to the range between the two predetermined energy levels. Preferably the magnetic field 8 deflects the electrons through exactly 90 degrees so that the transmitted beam path from filter 16 is coaxial with that of the beam originally emitted from source 2. To ensure that this is so, the path of the higher energy electrons transmitted through the first filter 12, e.g. an electron mixer, may be measured automatically by two spaced collector plates 22 connected to a balance unit 24 which serves to adjust appropriately the current in the coils 26 generating the magnetic field 8 or to adjust the potential of source 2. Alternatively the position of the transmitted beam from mirror 12 may be displayed on a fluorescent screen 20. In apparatus described, Figs. 2 and 3 (not shown), for producing the monochromatic electron beam in which a beam target is placed in a specimen chamber for impact of the electron beam, the two electron mirrors are mounted in conductive holders in an insulating block between an electron gun and the specimen chamber. An extension in the beam direction of the holder for the second mirror may be used to focus the emergent beam. The magnetic deflecting field is provided by two adjustable permanent magnets joined by a yoke, and the leading-in arrangements to, for example, the mirrors and collector plates, are also described.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB26161/66A GB1185323A (en) | 1966-06-13 | 1966-06-13 | Improvements in or relating to Electron Emission Control. |
US644712A US3448327A (en) | 1966-06-13 | 1967-06-08 | Electron emission control |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB26161/66A GB1185323A (en) | 1966-06-13 | 1966-06-13 | Improvements in or relating to Electron Emission Control. |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1185323A true GB1185323A (en) | 1970-03-25 |
Family
ID=10239322
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB26161/66A Expired GB1185323A (en) | 1966-06-13 | 1966-06-13 | Improvements in or relating to Electron Emission Control. |
Country Status (2)
Country | Link |
---|---|
US (1) | US3448327A (en) |
GB (1) | GB1185323A (en) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3126477A (en) * | 1964-03-24 | Multiple dispersion mass spectrometer | ||
US2429558A (en) * | 1945-08-24 | 1947-10-21 | Research Corp | Electron beam monochromator |
US2901627A (en) * | 1953-02-19 | 1959-08-25 | Leitz Ernst Gmbh | Method of and apparatus for the electronic magnification of objects |
DE1006983B (en) * | 1955-02-01 | 1957-04-25 | Leitz Ernst Gmbh | Method and device for super-microscopic imaging by means of an ion microscope |
-
1966
- 1966-06-13 GB GB26161/66A patent/GB1185323A/en not_active Expired
-
1967
- 1967-06-08 US US644712A patent/US3448327A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US3448327A (en) | 1969-06-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PLNP | Patent lapsed through nonpayment of renewal fees |