GB1174727A - A Method of Fabricating a Memory Device - Google Patents
A Method of Fabricating a Memory DeviceInfo
- Publication number
- GB1174727A GB1174727A GB3410668A GB3410668A GB1174727A GB 1174727 A GB1174727 A GB 1174727A GB 3410668 A GB3410668 A GB 3410668A GB 3410668 A GB3410668 A GB 3410668A GB 1174727 A GB1174727 A GB 1174727A
- Authority
- GB
- United Kingdom
- Prior art keywords
- lines
- photoresist
- over
- metal
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C17/00—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards
Landscapes
- Semiconductor Memories (AREA)
Abstract
1,174,727. Read-only stores. INTERNATIONAL BUSINESS MACHINES CORP. 17 July, 1968 [17 Aug., 1967], No. 34106/68. Heading G4A. [Also in Division H1] A method of making a memory device comprises the steps of depositing a first plurality of substantially parallel metallic lines on a substrate, applying an insulating coating over the lines, removing portions of the coating at selected points over selected ones of the lines so as to define a pattern of stored information, and applying a second plurality of substantially parallel metallic lines over the coating, the second plurality of lines crossing the first and being connected to them at the points where the coating was removed. A matrix read-only data store having conductive connections between selected row and column lines is made by the following steps: (1) a one-micron metal layer (e.g. aluminium) is evaporated on to a quartz, silicon or ceramic substrate, then covered with a half-micron layer of (positive or negative) photoresist (insulator) using spinning to distribute the photoresist, (2) the photoresist is exposed photographically through a mask or using an electron beam instead of light, then developed, (3) etching using NaOH solution leaves parallel metallic column lines on the substrate, (4) a layer of positive photoresist is coated over the side of the substrate bearing the column lines including over the column lines, exposed at selected points over the column lines using light or an electron beam, developed and etched to have holes at the exposed points, (5) another metal layer is evaporated all over the last layer of photoresist, inter alia filling the holes left by the etching of that layer, (6) another coating of photoresist is applied, exposed through a mask, and etched to leave parallel metallic row lines perpendicular to the column lines and connected to them by metal at selected rowcolumn cross-overs. The connections between row and column lines may be of a different higher-resistivity metal (e.g. chromium) than the lines themselves. In this case, step (5) uses the higherresistivity metal and is followed by etching to remove all this metal except that in the holes, then another layer of the first metal is deposited, followed by step (6).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US66142567A | 1967-08-17 | 1967-08-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1174727A true GB1174727A (en) | 1969-12-17 |
Family
ID=24653540
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB3410668A Expired GB1174727A (en) | 1967-08-17 | 1968-07-17 | A Method of Fabricating a Memory Device |
Country Status (2)
Country | Link |
---|---|
FR (1) | FR1575366A (en) |
GB (1) | GB1174727A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2207815A (en) * | 1987-07-16 | 1989-02-08 | Crystalate Electronics | Process for producing a programmed matrix |
WO2010042965A1 (en) | 2008-10-17 | 2010-04-22 | At & S Austria Technologie & Systemtechnik Aktiengesellschaft | Marker for marking or coding an object and method for producing such a marker and use |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2167621B (en) * | 1984-11-27 | 1988-03-02 | Crystalate Electronics | Programmed matrix device |
DE3810486A1 (en) * | 1988-03-28 | 1989-10-19 | Kaleto Ag | METHOD FOR PRODUCING CUSTOMIZED ELECTRICAL CIRCUITS, IN PARTICULAR PRINTED CIRCUITS |
-
1968
- 1968-07-17 GB GB3410668A patent/GB1174727A/en not_active Expired
- 1968-07-29 FR FR1575366D patent/FR1575366A/fr not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2207815A (en) * | 1987-07-16 | 1989-02-08 | Crystalate Electronics | Process for producing a programmed matrix |
WO2010042965A1 (en) | 2008-10-17 | 2010-04-22 | At & S Austria Technologie & Systemtechnik Aktiengesellschaft | Marker for marking or coding an object and method for producing such a marker and use |
DE202009018996U1 (en) | 2008-10-17 | 2015-04-01 | At & S Austria Technologie & Systemtechnik Aktiengesellschaft | Mark for marking or coding an object |
Also Published As
Publication number | Publication date |
---|---|
FR1575366A (en) | 1969-07-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PLNP | Patent lapsed through nonpayment of renewal fees |