GB1173978A - Vacuum Deposition Apparatus - Google Patents
Vacuum Deposition ApparatusInfo
- Publication number
- GB1173978A GB1173978A GB51692/67A GB5169267A GB1173978A GB 1173978 A GB1173978 A GB 1173978A GB 51692/67 A GB51692/67 A GB 51692/67A GB 5169267 A GB5169267 A GB 5169267A GB 1173978 A GB1173978 A GB 1173978A
- Authority
- GB
- United Kingdom
- Prior art keywords
- chamber
- deposition apparatus
- vacuum deposition
- vapour deposition
- heading
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Treatment Of Fiber Materials (AREA)
Abstract
1,173,978. Vapour deposition apparatus. EDWARDS HIGH VACUUM INTERNATIONAL Ltd. Oct.28, 1968 [Nov. 14, 1967], No.51692/67. Heading C7F. A vapour deposition apparatus comprises an inner chamber 10 having a roll of material and an outer chamber 1 with e.g. two sources of aluminium for coating both sides of the material which may be e.g. polyester sheet or fabric, and may carry separate articles to be coated. Each source may have a movable shutter 17, and the opening in the chamber 10 may be lined with e.g. p.t.f.e. to act as a seal. The chamber 10 and the intermediate rollers may be mounted on an end door of the chamber 1.
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB51692/67A GB1173978A (en) | 1967-11-14 | 1967-11-14 | Vacuum Deposition Apparatus |
US775054A US3505974A (en) | 1967-11-14 | 1968-11-12 | Vacuum deposition apparatus |
NL6816163A NL6816163A (en) | 1967-11-14 | 1968-11-13 | |
DE19681808898 DE1808898A1 (en) | 1967-11-14 | 1968-11-14 | Appts for vacuum coating of strip material which has |
FR1591813D FR1591813A (en) | 1967-11-14 | 1968-11-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB51692/67A GB1173978A (en) | 1967-11-14 | 1967-11-14 | Vacuum Deposition Apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1173978A true GB1173978A (en) | 1969-12-10 |
Family
ID=10461014
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB51692/67A Expired GB1173978A (en) | 1967-11-14 | 1967-11-14 | Vacuum Deposition Apparatus |
Country Status (5)
Country | Link |
---|---|
US (1) | US3505974A (en) |
DE (1) | DE1808898A1 (en) |
FR (1) | FR1591813A (en) |
GB (1) | GB1173978A (en) |
NL (1) | NL6816163A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2207928A (en) * | 1987-08-06 | 1989-02-15 | Leybold Ag | Apparatus for coating continuous webs |
GB2219008A (en) * | 1988-05-24 | 1989-11-29 | Leybold Ag | Device for vaporising metals |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5002010A (en) * | 1989-10-18 | 1991-03-26 | Varian Associates, Inc. | Vacuum vessel |
US9103033B2 (en) * | 2006-10-13 | 2015-08-11 | Solopower Systems, Inc. | Reel-to-reel reaction of precursor film to form solar cell absorber |
CN102395700A (en) * | 2009-04-14 | 2012-03-28 | 有限公司美国迅力光能公司 | Sealed magnetic roller for vacuum coating applications |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1551850A (en) * | 1924-08-29 | 1925-09-01 | Georg E Schmidmer | Device for metallizing textile fabrics and the like by means of disintegration of cathodes |
US1819109A (en) * | 1927-10-04 | 1931-08-18 | Warren S D Co | Apparatus for treating flexible materials |
US2384500A (en) * | 1942-07-08 | 1945-09-11 | Crown Cork & Seal Co | Apparatus and method of coating |
US2622041A (en) * | 1948-08-03 | 1952-12-16 | Nat Res Corp | Deposition of metal on a nonmetallic support |
US2657457A (en) * | 1949-09-10 | 1953-11-03 | Ohio Commw Eng Co | Continuous metal production and continuous gas plating |
FR1051247A (en) * | 1950-09-06 | 1954-01-14 | Pollopas Patents Ltd | Improvements to methods and devices for coating a support made of a non-magnetic material with a magnetizable metallic layer |
NL111901C (en) * | 1950-09-12 | 1900-01-01 | ||
US2971862A (en) * | 1957-04-26 | 1961-02-14 | Nat Res Corp | Vapor deposition method and apparatus |
US3043728A (en) * | 1958-03-17 | 1962-07-10 | Nat Res Corp | Apparatus and process for metallic vapor coating |
US3158507A (en) * | 1960-01-11 | 1964-11-24 | Continental Can Co | Floating roller seal |
US3030912A (en) * | 1960-04-15 | 1962-04-24 | Western Electric Co | Drive system for advancing a web of plastic material in a metallizing apparatus |
US3220378A (en) * | 1962-06-15 | 1965-11-30 | Norman A Lefevre | Means to monitor operation of a coating and drying apparatus |
US3397672A (en) * | 1965-11-10 | 1968-08-20 | United States Steel Corp | Control system for vapor-deposition coating apparatus |
-
1967
- 1967-11-14 GB GB51692/67A patent/GB1173978A/en not_active Expired
-
1968
- 1968-11-12 US US775054A patent/US3505974A/en not_active Expired - Lifetime
- 1968-11-13 NL NL6816163A patent/NL6816163A/xx unknown
- 1968-11-14 DE DE19681808898 patent/DE1808898A1/en active Pending
- 1968-11-14 FR FR1591813D patent/FR1591813A/fr not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2207928A (en) * | 1987-08-06 | 1989-02-15 | Leybold Ag | Apparatus for coating continuous webs |
GB2207928B (en) * | 1987-08-06 | 1991-07-10 | Leybold Ag | Apparatus for coating continuous webs |
GB2219008A (en) * | 1988-05-24 | 1989-11-29 | Leybold Ag | Device for vaporising metals |
GB2219008B (en) * | 1988-05-24 | 1992-07-29 | Leybold Ag | Device for vapourising metals |
Also Published As
Publication number | Publication date |
---|---|
NL6816163A (en) | 1969-05-19 |
US3505974A (en) | 1970-04-14 |
FR1591813A (en) | 1970-05-04 |
DE1808898A1 (en) | 1969-07-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PLNP | Patent lapsed through nonpayment of renewal fees |