GB1140337A - Improvements in or relating to scanning electron microscopes - Google Patents

Improvements in or relating to scanning electron microscopes

Info

Publication number
GB1140337A
GB1140337A GB4422367A GB4422367A GB1140337A GB 1140337 A GB1140337 A GB 1140337A GB 4422367 A GB4422367 A GB 4422367A GB 4422367 A GB4422367 A GB 4422367A GB 1140337 A GB1140337 A GB 1140337A
Authority
GB
United Kingdom
Prior art keywords
specimen
scintillator
mesh
potential
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4422367A
Inventor
Michael Charles Driver
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STC PLC
Original Assignee
Standard Telephone and Cables PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Standard Telephone and Cables PLC filed Critical Standard Telephone and Cables PLC
Priority to GB4422367A priority Critical patent/GB1140337A/en
Publication of GB1140337A publication Critical patent/GB1140337A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)

Abstract

1,140,337. Electron microscopes. STANDARD TELEPHONES & CABLES Ltd. 28 Sept., 1967, No. 44223/67. Heading H1D. In a scanning electron microscope having means 2 for holding a specimen 1 in the path of the electron beam 3, the specimen is confined within an electrically conducting enclosure at least a part of which is in the form of a mesh screen 5 provided with an aperture for the incident beam to pass through, and a scintillator 7 is arranged within line of sight of the specimen and is capable of being moved to two positions subtending respectively a maximum and a minimum solid angle at the specimen, a photomultiplier 9 being arranged to receive radiation from the scintillator when it is in either position. The scintillator 7 may comprise a mesh with the interstices filled with a green phosphor, and when it is in the position 7<SP>1</SP> shown in dotted lines it responds to back scattered electrons. In the other position it is given a positive potential and responds to secondary electrons emitted from the target, the faster back scattered electron being insufficiently deflected to reach it. In this mode of operation the screen 5 may be given a negative potential to cut off the slower secondary electrons, and this potential may be modulated with an alternating voltage. To prevent space change effects a second mesh 6 may be arranged within the first and maintained at a small positive potential. The meshes 5 and 6 are preferably hemispherical, as shown, and may be of nickel having an optical transmission factor of about 80%.
GB4422367A 1967-09-28 1967-09-28 Improvements in or relating to scanning electron microscopes Expired GB1140337A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB4422367A GB1140337A (en) 1967-09-28 1967-09-28 Improvements in or relating to scanning electron microscopes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4422367A GB1140337A (en) 1967-09-28 1967-09-28 Improvements in or relating to scanning electron microscopes

Publications (1)

Publication Number Publication Date
GB1140337A true GB1140337A (en) 1969-01-15

Family

ID=10432339

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4422367A Expired GB1140337A (en) 1967-09-28 1967-09-28 Improvements in or relating to scanning electron microscopes

Country Status (1)

Country Link
GB (1) GB1140337A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2409342A1 (en) * 1977-11-16 1979-06-15 Bosch Siemens Hausgeraete CONTROL CIRCUIT FOR THE PROGRAMMED SWITCHING MECHANISM OF A LAUNDRY DRYER
GB2215907A (en) * 1987-07-14 1989-09-27 Jeol Ltd Charged particle apparatus
GB2229854A (en) * 1989-03-28 1990-10-03 Robinson Vivian N E Electron detector

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2409342A1 (en) * 1977-11-16 1979-06-15 Bosch Siemens Hausgeraete CONTROL CIRCUIT FOR THE PROGRAMMED SWITCHING MECHANISM OF A LAUNDRY DRYER
GB2215907A (en) * 1987-07-14 1989-09-27 Jeol Ltd Charged particle apparatus
GB2215907B (en) * 1987-07-14 1992-04-15 Jeol Ltd Apparatus using a charged-particle beam
GB2229854A (en) * 1989-03-28 1990-10-03 Robinson Vivian N E Electron detector
US5043583A (en) * 1989-03-28 1991-08-27 Robinson Vivian N E Electron detector
GB2229854B (en) * 1989-03-28 1993-10-27 Robinson Vivian N E Backscattered electron detector

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