GB1105989A - Improvements in and relating to the evaporation of substances in vacuo - Google Patents
Improvements in and relating to the evaporation of substances in vacuoInfo
- Publication number
- GB1105989A GB1105989A GB53526/66A GB5352666A GB1105989A GB 1105989 A GB1105989 A GB 1105989A GB 53526/66 A GB53526/66 A GB 53526/66A GB 5352666 A GB5352666 A GB 5352666A GB 1105989 A GB1105989 A GB 1105989A
- Authority
- GB
- United Kingdom
- Prior art keywords
- support
- substances
- vacuo
- evaporation
- surrounding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000126 substance Substances 0.000 title abstract 3
- 238000001704 evaporation Methods 0.000 title abstract 2
- 230000008020 evaporation Effects 0.000 title abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 2
- 238000005192 partition Methods 0.000 abstract 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 1
- 238000001816 cooling Methods 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 239000011888 foil Substances 0.000 abstract 1
- 229910002804 graphite Inorganic materials 0.000 abstract 1
- 239000010439 graphite Substances 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 229910052573 porcelain Inorganic materials 0.000 abstract 1
- 238000012216 screening Methods 0.000 abstract 1
- 239000006200 vaporizer Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Toxicology (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
<PICT:1105989/C6-C7/1> A device for the evaporation of substances in vacuo comprises a vaporizer support or trough 11 constructed as part of a partition wall electrically screening a region A, wherein means e.g. glow cathode 6 are arranged for heating the support by electron bonbardment, from a region B on the side of the support remote from the heating means and carrying the substances 12 to be vaporized. The partition wall may be formed of a cylindrical metal shell 5, surrounding an electrically insulating e.g. porcelain member 4, together with a refractory sheet 10 such as of W or Mo or graphite, carbide or oxide; alternatively (Fig. 2) the shell may be double-walled for internal cooling (20) surrounding an auxiliary Cu electrode (26), for focussing the electron beam emerging from the cathode (24). The support may be an exchangeable piece of foil, or movable by being made as a circular groove (40) Fig. 4, in a rotary disc (41) fed by a hopper (44).
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH1750165A CH452313A (en) | 1965-12-18 | 1965-12-18 | Device for the evaporation of substances in a vacuum |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1105989A true GB1105989A (en) | 1968-03-13 |
Family
ID=4425902
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB53526/66A Expired GB1105989A (en) | 1965-12-18 | 1966-11-30 | Improvements in and relating to the evaporation of substances in vacuo |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3544763A (en) |
| CH (1) | CH452313A (en) |
| DE (1) | DE1521175B2 (en) |
| FR (1) | FR1505169A (en) |
| GB (1) | GB1105989A (en) |
| NL (1) | NL6600952A (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BG20711A1 (en) * | 1974-06-14 | 1975-12-20 | ||
| US4094269A (en) * | 1974-06-14 | 1978-06-13 | Zlafop Pri Ban | Vapor deposition apparatus for coating continuously moving substrates with layers of volatizable solid substances |
| US3996469A (en) * | 1975-01-06 | 1976-12-07 | Jersey Nuclear-Avco Isotopes, Inc. | Floating convection barrier for evaporation source |
| US4048462A (en) * | 1975-01-17 | 1977-09-13 | Airco, Inc. | Compact rotary evaporation source |
| DE2628765C3 (en) * | 1976-06-26 | 1979-01-11 | Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln | Apparatus for vapor deposition, in particular sublimable substances, in a vacuum by means of an electron beam source |
| FR2623819A1 (en) * | 1987-11-26 | 1989-06-02 | Thomson Csf | Electron bombardment oven for vacuum evaporation |
| DE4016225C2 (en) * | 1990-05-19 | 1997-08-14 | Leybold Ag | Series evaporator for vacuum deposition systems |
| DE4100541C1 (en) * | 1991-01-10 | 1992-01-16 | Plasco Dr. Ehrich Plasma-Coating Gmbh, 6501 Heidesheim, De |
-
1965
- 1965-12-18 CH CH1750165A patent/CH452313A/en unknown
-
1966
- 1966-01-25 NL NL6600952A patent/NL6600952A/xx unknown
- 1966-11-16 DE DE19661521175 patent/DE1521175B2/en active Pending
- 1966-11-30 GB GB53526/66A patent/GB1105989A/en not_active Expired
- 1966-12-16 US US602399A patent/US3544763A/en not_active Expired - Lifetime
- 1966-12-19 FR FR87908A patent/FR1505169A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| US3544763A (en) | 1970-12-01 |
| FR1505169A (en) | 1967-12-08 |
| NL6600952A (en) | 1967-06-19 |
| DE1521175B2 (en) | 1973-04-26 |
| DE1521175A1 (en) | 1969-07-31 |
| CH452313A (en) | 1968-05-31 |
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