GB1103426A - Improvements in or relating to corpuscular beam microscopes - Google Patents

Improvements in or relating to corpuscular beam microscopes

Info

Publication number
GB1103426A
GB1103426A GB2132665A GB2132665A GB1103426A GB 1103426 A GB1103426 A GB 1103426A GB 2132665 A GB2132665 A GB 2132665A GB 2132665 A GB2132665 A GB 2132665A GB 1103426 A GB1103426 A GB 1103426A
Authority
GB
United Kingdom
Prior art keywords
fluorescent screen
tube
pick
microscope
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2132665A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of GB1103426A publication Critical patent/GB1103426A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/22Optical or photographic arrangements associated with the tube
    • H01J37/224Luminescent screens or photographic plates for imaging ; Apparatus specially adapted therefor, e.g. cameras, TV-cameras, photographic equipment, exposure control; Optical subsystems specially adapted therefor, e.g. microscopes for observing image on luminescent screen

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

1,103,426. Electron beam apparatus. SIEMENS A.G. 20 May, 1965-[21 May, 1964; 17 Aug., 1964], No. 21326/65. Heading H1D. [Also in Division H4] The image produced on the fluorescent screen of a corpuscular (e.g. electrons or ions) beam microscope is focused on the target electrode of a television pick-up tube by means of an optical system comprising the tandem arrangement of two objective lenses or lens systems, each focused at infinity, with the fluorescent screen in the focal plane of one and the target electrode in that of the other lens or lens system. In one embodiment (Fig. 1), one objective 3 is mounted inside the vacuum space of the microscope behind the glass observation plate 4 the other being mounted externally by a fitting including elements 11, 13 forming a support for the pick-up tube 5. In this arrangement the pivot mounted fluorescent screen 8 is adjustable by means of a lever 7 outside the vacuum space. Fig. 2 shows a second embodiment in which the optical system 27 is secured to the pick-up tube 26 and the complete assembly supported from the microscope casing for rack-and-pinion focusing (see also Figs. 3 and 4, not shown) with respect to the fluorescent screen 24.
GB2132665A 1964-05-21 1965-05-20 Improvements in or relating to corpuscular beam microscopes Expired GB1103426A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DES0091158 1964-05-21
DES0092675 1964-08-17

Publications (1)

Publication Number Publication Date
GB1103426A true GB1103426A (en) 1968-02-14

Family

ID=25997666

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2132665A Expired GB1103426A (en) 1964-05-21 1965-05-20 Improvements in or relating to corpuscular beam microscopes

Country Status (1)

Country Link
GB (1) GB1103426A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10184235B2 (en) 2013-05-28 2019-01-22 Falcon Waterfree Technologies, Llc Directional fluid inlet
US10182688B2 (en) 2013-05-28 2019-01-22 Falcon Waterfree Technologies, Llc Splash-reducing and velocity-increasing cartridge exit
US10197430B2 (en) 2014-01-20 2019-02-05 Falcon Waterfree Technologies, Llc Visual indicator
US10273675B2 (en) 2013-04-26 2019-04-30 Falcon Waterfree Technologies, Llc Hybrid trap with water injection

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10273675B2 (en) 2013-04-26 2019-04-30 Falcon Waterfree Technologies, Llc Hybrid trap with water injection
US10975560B2 (en) 2013-04-26 2021-04-13 Falcon Water Technologies, LLC Hybrid trap with water injection
US10184235B2 (en) 2013-05-28 2019-01-22 Falcon Waterfree Technologies, Llc Directional fluid inlet
US10182688B2 (en) 2013-05-28 2019-01-22 Falcon Waterfree Technologies, Llc Splash-reducing and velocity-increasing cartridge exit
US10197430B2 (en) 2014-01-20 2019-02-05 Falcon Waterfree Technologies, Llc Visual indicator

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