GB1085450A - Chlorine plasmas - Google Patents
Chlorine plasmasInfo
- Publication number
- GB1085450A GB1085450A GB39567/65A GB3956765A GB1085450A GB 1085450 A GB1085450 A GB 1085450A GB 39567/65 A GB39567/65 A GB 39567/65A GB 3956765 A GB3956765 A GB 3956765A GB 1085450 A GB1085450 A GB 1085450A
- Authority
- GB
- United Kingdom
- Prior art keywords
- chlorine
- oxidizing gas
- metal chloride
- produced
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/14—Methods for preparing oxides or hydroxides in general
- C01B13/20—Methods for preparing oxides or hydroxides in general by oxidation of elements in the gaseous state; by oxidation or hydrolysis of compounds in the gaseous state
- C01B13/22—Methods for preparing oxides or hydroxides in general by oxidation of elements in the gaseous state; by oxidation or hydrolysis of compounds in the gaseous state of halides or oxyhalides
- C01B13/28—Methods for preparing oxides or hydroxides in general by oxidation of elements in the gaseous state; by oxidation or hydrolysis of compounds in the gaseous state of halides or oxyhalides using a plasma or an electric discharge
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/113—Silicon oxides; Hydrates thereof
- C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
- C01B33/18—Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof
- C01B33/181—Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof by a dry process
- C01B33/183—Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof by a dry process by oxidation or hydrolysis in the vapour phase of silicon compounds such as halides, trichlorosilane, monosilane
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G23/00—Compounds of titanium
- C01G23/04—Oxides; Hydroxides
- C01G23/047—Titanium dioxide
- C01G23/07—Producing by vapour phase processes, e.g. halide oxidation
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
Abstract
Solid, finely divided metal oxide is produced by the vapour phase oxidation of the corresponding metal chloride, by passing chlorine into a reaction zone wherein the metal chloride is reacted with a free-oxygen containing oxidizing gas, the chlorine being heated in the reaction zone or prior to entering by passage through an electrically produced hot plasma. The oxidizing gas or oxidizing gas and metal chloride may also be passed through the plasma, which may be produced by an arc between electrodes, by induction means or by capacitative means. The chlorine used to form the plasma remains unchanged and may be recycled.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB39567/65A GB1085450A (en) | 1965-09-16 | 1965-09-16 | Chlorine plasmas |
FR76507A FR1499438A (en) | 1965-09-16 | 1966-09-15 | Process for manufacturing finely divided solid metal oxides |
DE19661542026 DE1542026A1 (en) | 1965-09-16 | 1966-09-15 | Process for the production of solid, finely divided metal oxides |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB39567/65A GB1085450A (en) | 1965-09-16 | 1965-09-16 | Chlorine plasmas |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1085450A true GB1085450A (en) | 1967-10-04 |
Family
ID=10410244
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB39567/65A Expired GB1085450A (en) | 1965-09-16 | 1965-09-16 | Chlorine plasmas |
Country Status (3)
Country | Link |
---|---|
DE (1) | DE1542026A1 (en) |
FR (1) | FR1499438A (en) |
GB (1) | GB1085450A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6994837B2 (en) | 2001-04-24 | 2006-02-07 | Tekna Plasma Systems, Inc. | Plasma synthesis of metal oxide nanopowder and apparatus therefor |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2533205A1 (en) * | 1982-09-17 | 1984-03-23 | Westinghouse Electric Corp | Foamed silica prodn. from silicon tetra:chloride and oxygen |
-
1965
- 1965-09-16 GB GB39567/65A patent/GB1085450A/en not_active Expired
-
1966
- 1966-09-15 FR FR76507A patent/FR1499438A/en not_active Expired
- 1966-09-15 DE DE19661542026 patent/DE1542026A1/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6994837B2 (en) | 2001-04-24 | 2006-02-07 | Tekna Plasma Systems, Inc. | Plasma synthesis of metal oxide nanopowder and apparatus therefor |
US7501599B2 (en) | 2001-04-24 | 2009-03-10 | Tekna Plasma Systems, Inc. | Apparatus for plasma synthesis of metal oxide nanopowder |
Also Published As
Publication number | Publication date |
---|---|
DE1542026A1 (en) | 1970-03-19 |
FR1499438A (en) | 1967-10-27 |
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