GB1080029A - Improvements in and relating to piezoelectric devices - Google Patents
Improvements in and relating to piezoelectric devicesInfo
- Publication number
- GB1080029A GB1080029A GB44105/64A GB4410564A GB1080029A GB 1080029 A GB1080029 A GB 1080029A GB 44105/64 A GB44105/64 A GB 44105/64A GB 4410564 A GB4410564 A GB 4410564A GB 1080029 A GB1080029 A GB 1080029A
- Authority
- GB
- United Kingdom
- Prior art keywords
- substrate
- layer
- silver
- copper
- gold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 abstract 7
- 238000001704 evaporation Methods 0.000 abstract 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 4
- 229910052802 copper Inorganic materials 0.000 abstract 4
- 239000010949 copper Substances 0.000 abstract 4
- 230000008020 evaporation Effects 0.000 abstract 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 4
- 229910052737 gold Inorganic materials 0.000 abstract 4
- 239000010931 gold Substances 0.000 abstract 4
- 239000000463 material Substances 0.000 abstract 4
- 229910052709 silver Inorganic materials 0.000 abstract 4
- 239000004332 silver Substances 0.000 abstract 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 abstract 2
- 229910052980 cadmium sulfide Inorganic materials 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 239000000126 substance Substances 0.000 abstract 2
- 239000005083 Zinc sulfide Substances 0.000 abstract 1
- 230000001154 acute effect Effects 0.000 abstract 1
- 239000004411 aluminium Substances 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- CJOBVZJTOIVNNF-UHFFFAOYSA-N cadmium sulfide Chemical compound [Cd]=S CJOBVZJTOIVNNF-UHFFFAOYSA-N 0.000 abstract 1
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 abstract 1
- 239000004020 conductor Substances 0.000 abstract 1
- 239000013078 crystal Substances 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 abstract 1
- 239000010453 quartz Substances 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- ZTBJFXYWWZPTFM-UHFFFAOYSA-N tellanylidenemagnesium Chemical compound [Te]=[Mg] ZTBJFXYWWZPTFM-UHFFFAOYSA-N 0.000 abstract 1
- 239000011787 zinc oxide Substances 0.000 abstract 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/133—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials for electromechanical delay lines or filters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
- H10N30/076—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by vapour phase deposition
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Light Receiving Elements (AREA)
Abstract
A Piezo-electric transducer is made by evaporating a Piezo-electric semi-conductive substance on to a substrate and controlling the resistivity of the material during or after evaporation. The method may be applied to cubic or hexagonal group II - VI compounds such as cadmium sulphide, zinc oxide, cadmium selenide, magnesium telluride or zinc sulphide. The evaporation is carried out using known apparatus at a pressure of between 2 and 6 x 10-6 torr the substrate being held at a temperature such that a structure consisting of aligned crystals is built up (200-230 DEG C. is suitable for CdS). Thereafter, the temperature is raised to about 450 DEG C. to cause diffusion of compensating materials e.g. gold, silver, copper, from the substrate and/or an outer electrode whereby the resistivity of the layer is raised to at least 106O /cm. Alternatively, compensating material may be deposited along with the semi-conductive material. Other methods of compensation are also referred to. The orientation of the Piezo-electric axis of the layer depends upon the substrate material. For longitudinal-mode operation, the axis must be approximately normal to the layer. This orientation is achieved by slow evaporation in a direction normal to a hot gold substrate. For shear-mode operation an alignment parallel to the faces of the layer is produced by a relatively rapid evaporation at an acute angle on to a relatively cool substrate of silver. A copper substrate may be used to obtain a mixture of both modes. Copper, silver or gold may be deposited on a base of glass, quartz or aluminium and a nickel chromium alloy layer may be first deposited as a key. The copper, silver or gold may also be deposited as an outer layer on the semi-conductive substance.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US32037963A | 1963-10-31 | 1963-10-31 | |
| US387837A US3388002A (en) | 1964-08-06 | 1964-08-06 | Method of forming a piezoelectric ultrasonic transducer |
| US66932767A | 1967-07-24 | 1967-07-24 | |
| US77168568A | 1968-10-24 | 1968-10-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1080029A true GB1080029A (en) | 1967-08-23 |
Family
ID=27502195
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB44105/64A Expired GB1080029A (en) | 1963-10-31 | 1964-10-29 | Improvements in and relating to piezoelectric devices |
Country Status (2)
| Country | Link |
|---|---|
| GB (1) | GB1080029A (en) |
| NL (1) | NL6412589A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2434541A1 (en) * | 1978-07-26 | 1980-03-21 | Nasa | PHASE INSENSITIVE ULTRASONIC TRANSDUCER |
-
1964
- 1964-10-29 NL NL6412589A patent/NL6412589A/xx unknown
- 1964-10-29 GB GB44105/64A patent/GB1080029A/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2434541A1 (en) * | 1978-07-26 | 1980-03-21 | Nasa | PHASE INSENSITIVE ULTRASONIC TRANSDUCER |
Also Published As
| Publication number | Publication date |
|---|---|
| NL6412589A (en) | 1965-05-03 |
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