GB1066583A - Improvements relating to electronic bombardment apparatus - Google Patents

Improvements relating to electronic bombardment apparatus

Info

Publication number
GB1066583A
GB1066583A GB1723163A GB1723163A GB1066583A GB 1066583 A GB1066583 A GB 1066583A GB 1723163 A GB1723163 A GB 1723163A GB 1723163 A GB1723163 A GB 1723163A GB 1066583 A GB1066583 A GB 1066583A
Authority
GB
United Kingdom
Prior art keywords
specimen
shield
grid
analysed
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1723163A
Inventor
Thomas Mulvey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Associated Electrical Industries Ltd
Original Assignee
Associated Electrical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Associated Electrical Industries Ltd filed Critical Associated Electrical Industries Ltd
Priority to GB1723163A priority Critical patent/GB1066583A/en
Publication of GB1066583A publication Critical patent/GB1066583A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

1,066,583. Electron beam apparatus. ASSOCIATED ELECTRICAL INDUSTRIES Ltd. April 21, 1964 [May 1, 1963], No. 17231/63. Heading H1D. In apparatus wherein a specimen is bombarded with an electron beam and the result analysed, secondary electrons scattered from the specimen S are trapped by a shield comprising thin plates extending from positions near the point of impact of the main beam on the specimen, in directions which are at a small angle with the trajectories of the secondary electrons. As shown, the shield may comprise concentric sheet metal cones or pyramids, or a spiral conical metal sheet, and is closed at its rear end by which it is insulatingly secured to beam focusing lens L2. The shield may be coated with beryllium or carbon to ensure low secondary emission. A grid G, similarly coated, and suitably biased, may be provided between the specimen and shield to remove low energy electrons. The specimen may be analysed by means of an X-ray detector, or by measuring the fraction of incident current accepted by the specimen. The specimen is mounted for rotary and transverse movement, and if its surface is inclined to the beam axis, the grid and shield may be asymmetric, Fig. 6 (not shown).
GB1723163A 1963-05-01 1963-05-01 Improvements relating to electronic bombardment apparatus Expired GB1066583A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1723163A GB1066583A (en) 1963-05-01 1963-05-01 Improvements relating to electronic bombardment apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1723163A GB1066583A (en) 1963-05-01 1963-05-01 Improvements relating to electronic bombardment apparatus

Publications (1)

Publication Number Publication Date
GB1066583A true GB1066583A (en) 1967-04-26

Family

ID=10091547

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1723163A Expired GB1066583A (en) 1963-05-01 1963-05-01 Improvements relating to electronic bombardment apparatus

Country Status (1)

Country Link
GB (1) GB1066583A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2309972A1 (en) * 1975-05-02 1976-11-26 Leybold Heraeus Gmbh & Co Kg ELECTRON CANNON WITH DEVIATION SYSTEM, INTENDED TO BE USED FOR HEATING, MELTING AND EVAPORATION PURPOSES
FR2499313A1 (en) * 1981-01-30 1982-08-06 Philips Nv ELECTRONIC MICROSCOPE HAVING AN X-RAY DETECTOR
FR2520553A1 (en) * 1982-01-22 1983-07-29 Cameca ELECTRONIC OPTICAL APPARATUS COMPRISING PYROLYTIC GRAPHITE ELEMENTS

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2309972A1 (en) * 1975-05-02 1976-11-26 Leybold Heraeus Gmbh & Co Kg ELECTRON CANNON WITH DEVIATION SYSTEM, INTENDED TO BE USED FOR HEATING, MELTING AND EVAPORATION PURPOSES
FR2499313A1 (en) * 1981-01-30 1982-08-06 Philips Nv ELECTRONIC MICROSCOPE HAVING AN X-RAY DETECTOR
FR2520553A1 (en) * 1982-01-22 1983-07-29 Cameca ELECTRONIC OPTICAL APPARATUS COMPRISING PYROLYTIC GRAPHITE ELEMENTS
EP0086120A1 (en) * 1982-01-22 1983-08-17 Cameca Electron-optical apparatus comprising pyrolytic graphite elements
US4508967A (en) * 1982-01-22 1985-04-02 Cameca Electronic optical apparatus comprising pyrolytic graphite elements

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