GB1063199A - A source of positively-charged particles - Google Patents
A source of positively-charged particlesInfo
- Publication number
- GB1063199A GB1063199A GB42034/65A GB4203465A GB1063199A GB 1063199 A GB1063199 A GB 1063199A GB 42034/65 A GB42034/65 A GB 42034/65A GB 4203465 A GB4203465 A GB 4203465A GB 1063199 A GB1063199 A GB 1063199A
- Authority
- GB
- United Kingdom
- Prior art keywords
- accelerator
- electrode
- positively
- source
- charged particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002245 particle Substances 0.000 title 1
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 238000010884 ion-beam technique Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/022—Details
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Particle Accelerators (AREA)
- Plasma Technology (AREA)
- Electrostatic Spraying Apparatus (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Catalysts (AREA)
Abstract
1,063,199. lon sources. COMMISSARIAT A L'ENERGIE ATOMIQUE. Oct. 4, 1965 [Oct. 14, 1964], No. 42034/65. Heading H1D. A positive ion source comprises an accelerator 1 for producing a plasma jet 2 and a pair of electrodes 6, 7 energized to trap and extract electrons at electrode 6 while passing on a positive ion beam through electrode 5. The trapping of electrons is aided by an axial magnetic decreasing in strength between accelerator 1 and electrode 6. The magnetic field is set up by coil 3. The accelerator 1 may be an electromagnetic accelerator.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR991423A FR1476514A (en) | 1964-10-14 | 1964-10-14 | Ion source |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1063199A true GB1063199A (en) | 1967-03-30 |
Family
ID=8840338
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB42034/65A Expired GB1063199A (en) | 1964-10-14 | 1965-10-04 | A source of positively-charged particles |
Country Status (10)
Country | Link |
---|---|
US (1) | US3376469A (en) |
BE (1) | BE670351A (en) |
CH (1) | CH444829A (en) |
DE (1) | DE1489777B1 (en) |
ES (1) | ES318459A1 (en) |
FR (1) | FR1476514A (en) |
GB (1) | GB1063199A (en) |
IL (1) | IL24399A (en) |
LU (1) | LU49581A1 (en) |
NL (1) | NL6512861A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4563610A (en) * | 1982-12-20 | 1986-01-07 | Nissin-High Voltage Co., Ltd. | Device for generating negative-ion beams by alkaline metal ion sputtering |
GB2344931A (en) * | 1998-12-15 | 2000-06-21 | Hitachi Ltd | Ion beam processing apparatus and method of operating ion source therefor |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2950330C2 (en) * | 1979-12-14 | 1983-06-01 | Leybold-Heraeus GmbH, 5000 Köln | Device for chemical analysis of samples |
US4453086A (en) * | 1981-12-31 | 1984-06-05 | International Business Machines Corporation | Electron beam system with reduced charge buildup |
US4471224A (en) * | 1982-03-08 | 1984-09-11 | International Business Machines Corporation | Apparatus and method for generating high current negative ions |
US4472174A (en) * | 1983-04-25 | 1984-09-18 | Raymond L. Chuan | Method and apparatus for providing and using RF generated plasma for particle charging in electrostatic precipitation |
US6441382B1 (en) | 1999-05-21 | 2002-08-27 | Axcelis Technologies, Inc. | Deceleration electrode configuration for ultra-low energy ion implanter |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3082326A (en) * | 1954-03-08 | 1963-03-19 | Schlumberger Well Surv Corp | Neutron generating apparatus |
FR1140034A (en) * | 1955-01-07 | 1957-07-09 | Licentia Gmbh | Ion source |
DE1021963B (en) * | 1955-04-01 | 1958-01-02 | Messen Jaschin G A | Device for the electrical charging of matter suspended in an air stream by means of radioactive preparations |
US2934665A (en) * | 1956-09-12 | 1960-04-26 | Siemens Ag | Ion source |
US3279176A (en) * | 1959-07-31 | 1966-10-18 | North American Aviation Inc | Ion rocket engine |
US3287582A (en) * | 1963-01-04 | 1966-11-22 | Lionel V Baldwin | Apparatus for increasing ion engine beam density |
-
1964
- 1964-10-14 FR FR991423A patent/FR1476514A/en not_active Expired
-
1965
- 1965-09-30 BE BE670351D patent/BE670351A/xx unknown
- 1965-09-30 US US491699A patent/US3376469A/en not_active Expired - Lifetime
- 1965-10-01 DE DE19651489777 patent/DE1489777B1/en not_active Withdrawn
- 1965-10-03 IL IL24399A patent/IL24399A/en unknown
- 1965-10-04 CH CH1366065A patent/CH444829A/en unknown
- 1965-10-04 GB GB42034/65A patent/GB1063199A/en not_active Expired
- 1965-10-04 NL NL6512861A patent/NL6512861A/xx unknown
- 1965-10-05 LU LU49581A patent/LU49581A1/xx unknown
- 1965-10-14 ES ES0318459A patent/ES318459A1/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4563610A (en) * | 1982-12-20 | 1986-01-07 | Nissin-High Voltage Co., Ltd. | Device for generating negative-ion beams by alkaline metal ion sputtering |
GB2344931A (en) * | 1998-12-15 | 2000-06-21 | Hitachi Ltd | Ion beam processing apparatus and method of operating ion source therefor |
US6515426B1 (en) | 1998-12-15 | 2003-02-04 | Hitachi, Ltd. | Ion beam processing apparatus and method of operating ion source therefor |
US6635998B2 (en) | 1998-12-15 | 2003-10-21 | Hitachi, Ltd. | Ion beam processing apparatus and method of operating ion source therefor |
Also Published As
Publication number | Publication date |
---|---|
DE1489777B1 (en) | 1970-01-15 |
US3376469A (en) | 1968-04-02 |
FR1476514A (en) | 1967-04-14 |
BE670351A (en) | 1966-01-17 |
IL24399A (en) | 1969-05-28 |
CH444829A (en) | 1967-10-15 |
LU49581A1 (en) | 1965-12-06 |
NL6512861A (en) | 1966-04-15 |
ES318459A1 (en) | 1967-05-16 |
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