GB1063199A - A source of positively-charged particles - Google Patents

A source of positively-charged particles

Info

Publication number
GB1063199A
GB1063199A GB42034/65A GB4203465A GB1063199A GB 1063199 A GB1063199 A GB 1063199A GB 42034/65 A GB42034/65 A GB 42034/65A GB 4203465 A GB4203465 A GB 4203465A GB 1063199 A GB1063199 A GB 1063199A
Authority
GB
United Kingdom
Prior art keywords
accelerator
electrode
positively
source
charged particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB42034/65A
Inventor
Terenzio Consoli
Richard Geller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of GB1063199A publication Critical patent/GB1063199A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00Ion beam tubes
    • H01J27/02Ion sources; Ion guns
    • H01J27/022Details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Particle Accelerators (AREA)
  • Plasma Technology (AREA)
  • Electrostatic Spraying Apparatus (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Catalysts (AREA)

Abstract

1,063,199. lon sources. COMMISSARIAT A L'ENERGIE ATOMIQUE. Oct. 4, 1965 [Oct. 14, 1964], No. 42034/65. Heading H1D. A positive ion source comprises an accelerator 1 for producing a plasma jet 2 and a pair of electrodes 6, 7 energized to trap and extract electrons at electrode 6 while passing on a positive ion beam through electrode 5. The trapping of electrons is aided by an axial magnetic decreasing in strength between accelerator 1 and electrode 6. The magnetic field is set up by coil 3. The accelerator 1 may be an electromagnetic accelerator.
GB42034/65A 1964-10-14 1965-10-04 A source of positively-charged particles Expired GB1063199A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR991423A FR1476514A (en) 1964-10-14 1964-10-14 Ion source

Publications (1)

Publication Number Publication Date
GB1063199A true GB1063199A (en) 1967-03-30

Family

ID=8840338

Family Applications (1)

Application Number Title Priority Date Filing Date
GB42034/65A Expired GB1063199A (en) 1964-10-14 1965-10-04 A source of positively-charged particles

Country Status (10)

Country Link
US (1) US3376469A (en)
BE (1) BE670351A (en)
CH (1) CH444829A (en)
DE (1) DE1489777B1 (en)
ES (1) ES318459A1 (en)
FR (1) FR1476514A (en)
GB (1) GB1063199A (en)
IL (1) IL24399A (en)
LU (1) LU49581A1 (en)
NL (1) NL6512861A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4563610A (en) * 1982-12-20 1986-01-07 Nissin-High Voltage Co., Ltd. Device for generating negative-ion beams by alkaline metal ion sputtering
GB2344931A (en) * 1998-12-15 2000-06-21 Hitachi Ltd Ion beam processing apparatus and method of operating ion source therefor

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2950330C2 (en) * 1979-12-14 1983-06-01 Leybold-Heraeus GmbH, 5000 Köln Device for chemical analysis of samples
US4453086A (en) * 1981-12-31 1984-06-05 International Business Machines Corporation Electron beam system with reduced charge buildup
US4471224A (en) * 1982-03-08 1984-09-11 International Business Machines Corporation Apparatus and method for generating high current negative ions
US4472174A (en) * 1983-04-25 1984-09-18 Raymond L. Chuan Method and apparatus for providing and using RF generated plasma for particle charging in electrostatic precipitation
US6441382B1 (en) 1999-05-21 2002-08-27 Axcelis Technologies, Inc. Deceleration electrode configuration for ultra-low energy ion implanter

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3082326A (en) * 1954-03-08 1963-03-19 Schlumberger Well Surv Corp Neutron generating apparatus
FR1140034A (en) * 1955-01-07 1957-07-09 Licentia Gmbh Ion source
DE1021963B (en) * 1955-04-01 1958-01-02 Messen Jaschin G A Device for the electrical charging of matter suspended in an air stream by means of radioactive preparations
US2934665A (en) * 1956-09-12 1960-04-26 Siemens Ag Ion source
US3279176A (en) * 1959-07-31 1966-10-18 North American Aviation Inc Ion rocket engine
US3287582A (en) * 1963-01-04 1966-11-22 Lionel V Baldwin Apparatus for increasing ion engine beam density

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4563610A (en) * 1982-12-20 1986-01-07 Nissin-High Voltage Co., Ltd. Device for generating negative-ion beams by alkaline metal ion sputtering
GB2344931A (en) * 1998-12-15 2000-06-21 Hitachi Ltd Ion beam processing apparatus and method of operating ion source therefor
US6515426B1 (en) 1998-12-15 2003-02-04 Hitachi, Ltd. Ion beam processing apparatus and method of operating ion source therefor
US6635998B2 (en) 1998-12-15 2003-10-21 Hitachi, Ltd. Ion beam processing apparatus and method of operating ion source therefor

Also Published As

Publication number Publication date
DE1489777B1 (en) 1970-01-15
US3376469A (en) 1968-04-02
FR1476514A (en) 1967-04-14
BE670351A (en) 1966-01-17
IL24399A (en) 1969-05-28
CH444829A (en) 1967-10-15
LU49581A1 (en) 1965-12-06
NL6512861A (en) 1966-04-15
ES318459A1 (en) 1967-05-16

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