GB1057684A - Improvements in or relating to electron microscopes - Google Patents
Improvements in or relating to electron microscopesInfo
- Publication number
- GB1057684A GB1057684A GB26757/63D GB2675763D GB1057684A GB 1057684 A GB1057684 A GB 1057684A GB 26757/63 D GB26757/63 D GB 26757/63D GB 2675763 D GB2675763 D GB 2675763D GB 1057684 A GB1057684 A GB 1057684A
- Authority
- GB
- United Kingdom
- Prior art keywords
- electron
- july
- electron microscopes
- passage
- relating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Abstract
1,057,684. Electron microscopes. PHILIPS ELECTRONICS AND PHARMACEUTICAL INDUSTRIES CORPORATION. July 5, 1963 [July 5, 1962], No. 26757/63. Heading H1D. An electron microscope object-diaphragm comprises two parallel electrically conductive limbs carrying a resistive, electrically heated, diaphragm in the form of a flat plate with a central aperture for the passage'of the electron beam, the passage being conical in section and expanding along the beam so that electrons of the beam do not strike the walls of the aperture.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US207681A US3150257A (en) | 1962-07-05 | 1962-07-05 | Electron beam aperture plate |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1057684A true GB1057684A (en) | 1967-02-08 |
Family
ID=22771562
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB26757/63D Expired GB1057684A (en) | 1962-07-05 | 1963-07-05 | Improvements in or relating to electron microscopes |
Country Status (8)
Country | Link |
---|---|
US (1) | US3150257A (en) |
JP (1) | JPS4933209B1 (en) |
BE (1) | BE634510A (en) |
CH (1) | CH413147A (en) |
DE (1) | DE1248182B (en) |
FR (1) | FR1362285A (en) |
GB (1) | GB1057684A (en) |
NL (1) | NL294850A (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1299498B (en) * | 1964-07-24 | 1969-07-17 | Steigerwald Strahltech | Device for monitoring the beam impact area in corpuscular beam processing devices |
DE2326279A1 (en) * | 1973-05-23 | 1974-12-19 | Siemens Ag | ION BEAM HIGH-SPEED CIRCUIT TO ACHIEVE DEFINED SOLID DOCUMENTS THROUGH ION IMPLANTATION |
FR2321976A1 (en) * | 1975-08-26 | 1977-03-25 | Commissariat Energie Atomique | ISOLATION VALVE FOR ELECTRONIC BOMBING WELDING MACHINES AND MACHINES EQUIPPED WITH SUCH A VALVE |
US4445041A (en) * | 1981-06-02 | 1984-04-24 | Hewlett-Packard Company | Electron beam blanker |
JP6500009B2 (en) * | 2013-03-15 | 2019-04-10 | グレン レイン ファミリー リミテッド ライアビリティ リミテッド パートナーシップ | Adjustable mass spectrometry aperture |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2877353A (en) * | 1954-07-14 | 1959-03-10 | Gen Electric | X-ray microscope |
US3038993A (en) * | 1958-05-21 | 1962-06-12 | Masuda Tatsunosuke | Aperture system for electron optical instrument |
DE1850497U (en) * | 1958-05-21 | 1962-04-26 | Akashi Seisakusho | DEVICE FOR CLEANING THE SCREEN OF ELECTRON MICROSCOPES OR ELECTRON DIFFUSION DEVICES. |
-
0
- NL NL294850D patent/NL294850A/xx unknown
- BE BE634510D patent/BE634510A/xx unknown
-
1962
- 1962-07-05 US US207681A patent/US3150257A/en not_active Expired - Lifetime
-
1963
- 1963-07-03 CH CH823063A patent/CH413147A/en unknown
- 1963-07-04 DE DEP32134A patent/DE1248182B/en not_active Withdrawn
- 1963-07-05 JP JP38035088A patent/JPS4933209B1/ja active Pending
- 1963-07-05 GB GB26757/63D patent/GB1057684A/en not_active Expired
- 1963-07-05 FR FR940485A patent/FR1362285A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
NL294850A (en) | |
US3150257A (en) | 1964-09-22 |
CH413147A (en) | 1966-05-15 |
FR1362285A (en) | 1964-05-29 |
JPS4933209B1 (en) | 1974-09-05 |
BE634510A (en) | |
DE1248182B (en) | 1967-08-24 |
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