GB1051402A - - Google Patents
Info
- Publication number
- GB1051402A GB1051402A GB1051402DA GB1051402A GB 1051402 A GB1051402 A GB 1051402A GB 1051402D A GB1051402D A GB 1051402DA GB 1051402 A GB1051402 A GB 1051402A
- Authority
- GB
- United Kingdom
- Prior art keywords
- gauges
- amplifier
- pair
- attenuator
- sources
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
- H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/548—Controlling the composition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physical Vapour Deposition (AREA)
Abstract
1,051,402. Automatic vaporization control. COMPAGNIE GENERALE D'ELECTRICITE. May 8, 1964 [May 8, 1963], No.19204/64. Heading G3R. [Also in Division C7] In the vapour deposition of two materials e. g. Al and B on a substrate of e. g. Si from two separate sources, the heating of the sources is controlled by ionisation gauges. Part of the flow of vapour from each source passes through a slot in a rotating shutter to a screened gauge comprising a pair of gauges having a common filament. The signals from each pair of gauges are fed in turn to an amplifier, subtracting amplifier, amplifier, rectifier, recorder, and a regulating system comprising an attenuator followed by a feed back loop. The attenuator is adjustable during operation either manually or automatically to a fixed programme.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR934112A FR1364093A (en) | 1963-05-08 | 1963-05-08 | Device for obtaining thin mixed layers by vacuum evaporation |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1051402A true GB1051402A (en) |
Family
ID=8803369
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1051402D Active GB1051402A (en) | 1963-05-08 |
Country Status (5)
Country | Link |
---|---|
BE (1) | BE646776A (en) |
DE (1) | DE1282410B (en) |
FR (1) | FR1364093A (en) |
GB (1) | GB1051402A (en) |
NL (1) | NL6405174A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3570449A (en) * | 1969-03-13 | 1971-03-16 | United Aircraft Corp | Sensor system for a vacuum deposition apparatus |
US3636916A (en) * | 1966-03-14 | 1972-01-25 | Optical Coating Laboratory Inc | Coating apparatus and system |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2412729C3 (en) * | 1974-03-16 | 1982-04-29 | Leybold-Heraeus GmbH, 5000 Köln | Method and arrangement for regulating the evaporation rate and the layer structure in the production of optically effective thin layers |
US4837044A (en) * | 1987-01-23 | 1989-06-06 | Itt Research Institute | Rugate optical filter systems |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1301197A (en) * | 1960-10-04 | 1962-08-10 | Rca Corp | Evaporation chamber with hole |
-
0
- GB GB1051402D patent/GB1051402A/en active Active
-
1963
- 1963-05-08 FR FR934112A patent/FR1364093A/en not_active Expired
-
1964
- 1964-04-20 BE BE646776A patent/BE646776A/xx unknown
- 1964-05-06 DE DE1964C0032818 patent/DE1282410B/en active Pending
- 1964-05-08 NL NL6405174A patent/NL6405174A/xx unknown
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3636916A (en) * | 1966-03-14 | 1972-01-25 | Optical Coating Laboratory Inc | Coating apparatus and system |
US3570449A (en) * | 1969-03-13 | 1971-03-16 | United Aircraft Corp | Sensor system for a vacuum deposition apparatus |
Also Published As
Publication number | Publication date |
---|---|
FR1364093A (en) | 1964-06-19 |
NL6405174A (en) | 1964-11-09 |
DE1282410B (en) | 1968-11-07 |
BE646776A (en) | 1964-10-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB777803A (en) | Improvements in or relating to television receivers | |
GB1034160A (en) | Angle adjusting mechanism for optical elements | |
GB1051402A (en) | ||
GB998712A (en) | Improvements in or relating to phototypesetting apparatus | |
GB1128937A (en) | Electronic schedule generator tracking circuit and rate limiter | |
GB1055748A (en) | Improvements in or relating to synchronising apparatus for television cameras | |
GB1283023A (en) | Frequency sensitive apparatus | |
GB1062489A (en) | Temperature control system for an electrically heated body | |
GB1148354A (en) | Improvements in or relating to control apparatus for use in aircraft | |
GB955189A (en) | Improvements in and relating to process control systems | |
ES214480A1 (en) | Pilot pulse dual channel gain control | |
GB706494A (en) | Improvements in or relating to gyro-verticals | |
GB943040A (en) | Apparatus for maintaining a predetermined temperature in a plurality of heaters | |
GB1380913A (en) | Pneumatic amplifiers | |
JPS5619510A (en) | Automatic gain adjusting system in magnetic tape unit | |
JPS5348713A (en) | Automatic setting system for gain | |
GB1074874A (en) | Apparatus for the automatic control of the heating programme in thermobalances in the case of applying the method of gradual isothermic heating | |
GB816134A (en) | Improvements in or relating to telecommunication systems employing automatic gain regulators | |
GB933752A (en) | Variable-gain amplifier | |
GB975042A (en) | Improvements relating to textile ring spinning and twisting machines | |
GB986293A (en) | A method of zone-by-zone melting a semi-conductor rod | |
Matsuda | Studies on the Construction of Fabric and its Manufacuring Process (1) Diameter and thickness of yarn | |
GR13683B (en) | CONTROL SYSTEM. | |
GB833324A (en) | Improvements relating to weighing machines | |
GB1143461A (en) | Automatic gain control system |