GB0714025D0 - Plasma reactor - Google Patents

Plasma reactor

Info

Publication number: GB0714025D0
Authority: GB; United Kingdom
Prior art keywords: plasma reactor; reactor; plasma
Prior art date: 2007-07-19
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Ceased

Application number

GBGB0714025.4A

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Edwards Ltd

Original Assignee

Edwards Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2007-07-19

Filing date

2007-07-19

Publication date

2007-08-29

2007-07-19 Application filed by Edwards Ltd filed Critical Edwards Ltd

2007-07-19 Priority to GBGB0714025.4A priority Critical patent/GB0714025D0/en

2007-08-29 Publication of GB0714025D0 publication Critical patent/GB0714025D0/en

2008-07-14 Priority to DE112008001790T priority patent/DE112008001790T5/en

2008-07-14 Priority to CN201210392266.6A priority patent/CN103021779B/en

2008-07-14 Priority to KR1020107001116A priority patent/KR101490540B1/en

2008-07-14 Priority to PCT/GB2008/050569 priority patent/WO2009010792A2/en

2008-07-14 Priority to CN200880025328.1A priority patent/CN101755322B/en

2008-07-18 Priority to TW097127521A priority patent/TWI433718B/en

Status Ceased legal-status Critical Current

Links

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32816—Pressure
- H01J37/32834—Exhausting
- H01J37/32844—Treating effluent gases
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2245/00—Applications of plasma devices
- H05H2245/10—Treatment of gases
- H05H2245/17—Exhaust gases
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

GBGB0714025.4A 2007-07-19 2007-07-19 Plasma reactor Ceased GB0714025D0 (en)

Priority Applications (7)

Application Number	Priority Date	Filing Date	Title
GBGB0714025.4A GB0714025D0 (en)	2007-07-19	2007-07-19	Plasma reactor
DE112008001790T DE112008001790T5 (en)	2007-07-19	2008-07-14	plasma reactor
CN201210392266.6A CN103021779B (en)	2007-07-19	2008-07-14	Plasma reactor
KR1020107001116A KR101490540B1 (en)	2007-07-19	2008-07-14	Plasma reactor
PCT/GB2008/050569 WO2009010792A2 (en)	2007-07-19	2008-07-14	Plasma reactor
CN200880025328.1A CN101755322B (en)	2007-07-19	2008-07-14	Plasma reactor
TW097127521A TWI433718B (en)	2007-07-19	2008-07-18	Plasma reactor

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
GBGB0714025.4A GB0714025D0 (en)	2007-07-19	2007-07-19	Plasma reactor

Publications (1)

Publication Number	Publication Date
GB0714025D0 true GB0714025D0 (en)	2007-08-29

Family

ID=38476563

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
GBGB0714025.4A Ceased GB0714025D0 (en)	2007-07-19	2007-07-19	Plasma reactor

Country Status (6)

Country	Link
KR (1)	KR101490540B1 (en)
CN (2)	CN101755322B (en)
DE (1)	DE112008001790T5 (en)
GB (1)	GB0714025D0 (en)
TW (1)	TWI433718B (en)
WO (1)	WO2009010792A2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN102125818B (en) *	2010-12-31	2013-12-11	武汉凯迪工程技术研究总院有限公司	Method and device for preparing high-temperature active particle-rich water vapor by plasma
GB2493752A (en)	2011-08-17	2013-02-20	Edwards Ltd	Apparatus for treating a gas stream
US9240308B2 (en) *	2014-03-06	2016-01-19	Applied Materials, Inc.	Hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system
GB2534890A (en) *	2015-02-03	2016-08-10	Edwards Ltd	Thermal plasma torch
GB2536905B (en) *	2015-03-30	2020-01-08	Edwards Ltd	Radiant burner
CN113371679A (en) *	2021-05-27	2021-09-10	中国矿业大学	Carbon dioxide-methane plasma high-temperature reforming device and high-temperature reforming method

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
TW442842B (en) *	1996-12-31	2001-06-23	Atmi Ecosys Corp	Effluent gas stream treatment system for oxidation treatment of semiconductor manufacturing effluent gases
US5846275A (en) *	1996-12-31	1998-12-08	Atmi Ecosys Corporation	Clog-resistant entry structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system
US6617538B1 (en) *	2000-03-31	2003-09-09	Imad Mahawili	Rotating arc plasma jet and method of use for chemical synthesis and chemical by-products abatements
JP2005205330A (en) *	2004-01-23	2005-08-04	Kanken Techno Co Ltd	Plasma decomposition method of perfluoro compound exhaust gas, plasma decomposition apparatus using the method, and exhaust gas treating system mounted with the apparatus
GB0416385D0 (en) *	2004-07-22	2004-08-25	Boc Group Plc	Gas abatement
GB0502495D0 (en) *	2005-02-07	2005-03-16	Boc Group Plc	Ejector pump

2007
- 2007-07-19 GB GBGB0714025.4A patent/GB0714025D0/en not_active Ceased
2008
- 2008-07-14 KR KR1020107001116A patent/KR101490540B1/en active IP Right Grant
- 2008-07-14 CN CN200880025328.1A patent/CN101755322B/en not_active Expired - Fee Related
- 2008-07-14 WO PCT/GB2008/050569 patent/WO2009010792A2/en active Application Filing
- 2008-07-14 CN CN201210392266.6A patent/CN103021779B/en not_active Expired - Fee Related
- 2008-07-14 DE DE112008001790T patent/DE112008001790T5/en not_active Ceased
- 2008-07-18 TW TW097127521A patent/TWI433718B/en not_active IP Right Cessation

Also Published As

Publication number	Publication date
DE112008001790T5 (en)	2010-04-29
CN103021779A (en)	2013-04-03
CN101755322B (en)	2014-02-19
KR101490540B1 (en)	2015-02-05
KR20100037609A (en)	2010-04-09
WO2009010792A3 (en)	2009-03-12
CN101755322A (en)	2010-06-23
WO2009010792A2 (en)	2009-01-22
CN103021779B (en)	2016-08-10
TW200914124A (en)	2009-04-01
TWI433718B (en)	2014-04-11

Legal Events

Date	Code	Title	Description
2009-03-18	AT	Applications terminated before publication under section 16(1)

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