GB0705524D0 - Plasma etching of diamond surfaces - Google Patents

Plasma etching of diamond surfaces

Info

Publication number
GB0705524D0
GB0705524D0 GB0705524A GB0705524A GB0705524D0 GB 0705524 D0 GB0705524 D0 GB 0705524D0 GB 0705524 A GB0705524 A GB 0705524A GB 0705524 A GB0705524 A GB 0705524A GB 0705524 D0 GB0705524 D0 GB 0705524D0
Authority
GB
United Kingdom
Prior art keywords
plasma etching
diamond surfaces
diamond
etching
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0705524A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Element Six Ltd
Original Assignee
Element Six Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Element Six Ltd filed Critical Element Six Ltd
Priority to GB0705524A priority Critical patent/GB0705524D0/en
Publication of GB0705524D0 publication Critical patent/GB0705524D0/en
Priority to PCT/IB2008/050218 priority patent/WO2008090513A2/en
Priority to US12/523,963 priority patent/US20100078652A1/en
Priority to EP13174114.2A priority patent/EP2719794B1/en
Priority to PCT/IB2008/050216 priority patent/WO2008090512A1/en
Priority to US12/523,956 priority patent/US9034200B2/en
Priority to PCT/IB2008/050215 priority patent/WO2008090511A1/en
Priority to US12/523,968 priority patent/US20100038653A1/en
Priority to EP08702486.5A priority patent/EP2108195B1/en
Priority to JP2009546060A priority patent/JP2010517261A/en
Priority to JP2009546062A priority patent/JP2010517263A/en
Priority to JP2009546059A priority patent/JP5341774B2/en
Priority to EP08702484A priority patent/EP2118335A1/en
Priority to EP08702487A priority patent/EP2108062A2/en
Priority to JP2009546058A priority patent/JP5373629B2/en
Priority to EP08702485.7A priority patent/EP2108054B1/en
Priority to EP08702488A priority patent/EP2108063A2/en
Priority to US12/523,949 priority patent/US8277622B2/en
Priority to PCT/IB2008/050219 priority patent/WO2008090514A2/en
Priority to JP2009546061A priority patent/JP5725713B2/en
Priority to PCT/IB2008/050214 priority patent/WO2008090510A1/en
Priority to US12/523,960 priority patent/US8193538B2/en
Priority to US13/466,730 priority patent/US8362492B2/en
Priority to US13/722,857 priority patent/US8648354B2/en
Priority to JP2013095241A priority patent/JP5714052B2/en
Priority to US14/685,553 priority patent/US10011491B2/en
Ceased legal-status Critical Current

Links

GB0705524A 2007-01-22 2007-03-22 Plasma etching of diamond surfaces Ceased GB0705524D0 (en)

Priority Applications (26)

Application Number Priority Date Filing Date Title
GB0705524A GB0705524D0 (en) 2007-03-22 2007-03-22 Plasma etching of diamond surfaces
US12/523,960 US8193538B2 (en) 2007-01-22 2008-01-22 Electronic field effect devices
EP08702484A EP2118335A1 (en) 2007-01-22 2008-01-22 High uniformity boron doped diamond material
JP2009546058A JP5373629B2 (en) 2007-01-22 2008-01-22 Highly uniform boron doped single crystal diamond material
EP13174114.2A EP2719794B1 (en) 2007-01-22 2008-01-22 Plasma etching of diamond surfaces
PCT/IB2008/050216 WO2008090512A1 (en) 2007-01-22 2008-01-22 Electronic field effect devices and methods for their manufacture
US12/523,956 US9034200B2 (en) 2007-01-22 2008-01-22 Plasma etching of diamond surfaces
PCT/IB2008/050215 WO2008090511A1 (en) 2007-01-22 2008-01-22 Plasma etching of diamond surfaces
US12/523,968 US20100038653A1 (en) 2007-01-22 2008-01-22 Diamond electronic devices and methods for their manufacture
EP08702486.5A EP2108195B1 (en) 2007-01-22 2008-01-22 Electronic field effect devices and methods for their manufacture
JP2009546060A JP2010517261A (en) 2007-01-22 2008-01-22 ELECTRONIC FIELD EFFECT DEVICE AND METHOD FOR MANUFACTURING THE SAME
JP2009546062A JP2010517263A (en) 2007-01-22 2008-01-22 Diamond electronic devices and methods of manufacturing the same
JP2009546059A JP5341774B2 (en) 2007-01-22 2008-01-22 Plasma etching of diamond surface
PCT/IB2008/050218 WO2008090513A2 (en) 2007-01-22 2008-01-22 Diamond electronic devices including a surface and methods for their manufacture
EP08702487A EP2108062A2 (en) 2007-01-22 2008-01-22 Diamond electronic devices including a surface and methods for their manufacture
US12/523,963 US20100078652A1 (en) 2007-01-22 2008-01-22 Diamond electronic devices including a surface and methods for their manufacture
EP08702485.7A EP2108054B1 (en) 2007-01-22 2008-01-22 Plasma etching of diamond surfaces
EP08702488A EP2108063A2 (en) 2007-01-22 2008-01-22 Diamond electronic devices and methods for their manufacture
US12/523,949 US8277622B2 (en) 2007-01-22 2008-01-22 High uniformity boron doped diamond material
PCT/IB2008/050219 WO2008090514A2 (en) 2007-01-22 2008-01-22 Diamond electronic devices and methods for their manufacture
JP2009546061A JP5725713B2 (en) 2007-01-22 2008-01-22 Diamond electronic devices including surfaces and methods of manufacturing the same
PCT/IB2008/050214 WO2008090510A1 (en) 2007-01-22 2008-01-22 High uniformity boron doped diamond material
US13/466,730 US8362492B2 (en) 2007-01-22 2012-05-08 Electronic field effect devices and methods for their manufacture
US13/722,857 US8648354B2 (en) 2007-01-22 2012-12-20 Electronic field effect devices and methods for their manufacture
JP2013095241A JP5714052B2 (en) 2007-01-22 2013-04-30 Plasma etching of diamond surface
US14/685,553 US10011491B2 (en) 2007-01-22 2015-04-13 Plasma etching of diamond surfaces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0705524A GB0705524D0 (en) 2007-03-22 2007-03-22 Plasma etching of diamond surfaces

Publications (1)

Publication Number Publication Date
GB0705524D0 true GB0705524D0 (en) 2007-05-02

Family

ID=38024651

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0705524A Ceased GB0705524D0 (en) 2007-01-22 2007-03-22 Plasma etching of diamond surfaces

Country Status (1)

Country Link
GB (1) GB0705524D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)