GB0126265D0 - Vacuum gauge - Google Patents

Vacuum gauge

Info

Publication number
GB0126265D0
GB0126265D0 GB0126265A GB0126265A GB0126265D0 GB 0126265 D0 GB0126265 D0 GB 0126265D0 GB 0126265 A GB0126265 A GB 0126265A GB 0126265 A GB0126265 A GB 0126265A GB 0126265 D0 GB0126265 D0 GB 0126265D0
Authority
GB
United Kingdom
Prior art keywords
vacuum gauge
gauge
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB0126265A
Other versions
GB2381652A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Priority to GB0126265A priority Critical patent/GB2381652A/en
Publication of GB0126265D0 publication Critical patent/GB0126265D0/en
Publication of GB2381652A publication Critical patent/GB2381652A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
GB0126265A 2001-11-01 2001-11-01 Cold cathode ionisation vacuum gauge Withdrawn GB2381652A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0126265A GB2381652A (en) 2001-11-01 2001-11-01 Cold cathode ionisation vacuum gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0126265A GB2381652A (en) 2001-11-01 2001-11-01 Cold cathode ionisation vacuum gauge

Publications (2)

Publication Number Publication Date
GB0126265D0 true GB0126265D0 (en) 2002-01-02
GB2381652A GB2381652A (en) 2003-05-07

Family

ID=9924973

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0126265A Withdrawn GB2381652A (en) 2001-11-01 2001-11-01 Cold cathode ionisation vacuum gauge

Country Status (1)

Country Link
GB (1) GB2381652A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7768267B2 (en) 2007-07-11 2010-08-03 Brooks Automation, Inc. Ionization gauge with a cold electron source
US8686733B2 (en) 2007-12-19 2014-04-01 Brooks Automation, Inc. Ionization gauge having electron multiplier cold emission source
EP2252869B1 (en) * 2008-02-21 2018-12-12 MKS Instruments, Inc. Ionization gauge with operational parameters and geometry designed for high pressure operation

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB722788A (en) * 1952-06-05 1955-01-26 Siemens Ag Improvements in or relating to a method of measuring low pressures with an ionisation gauge comprising a cold cathode
US3872377A (en) * 1972-10-11 1975-03-18 Tokyo Shibaura Electric Co Cold cathode ionization gauge
GB1380094A (en) * 1972-10-30 1975-01-08 Tokyo Shibaura Electric Co Vacuum gauge with cold cathode
US4000457A (en) * 1975-10-06 1976-12-28 Varian Associates Cold cathode ionization gauge control for vacuum measurement
US4967157A (en) * 1988-08-29 1990-10-30 Mks Instruments, Inc. Method and circuit for extending the range of a cold cathode discharge vacuum gauge

Also Published As

Publication number Publication date
GB2381652A (en) 2003-05-07

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)