FR852026A - Electrical feedthrough for vacuum reaction apparatus - Google Patents

Electrical feedthrough for vacuum reaction apparatus

Info

Publication number
FR852026A
FR852026A FR852026DA FR852026A FR 852026 A FR852026 A FR 852026A FR 852026D A FR852026D A FR 852026DA FR 852026 A FR852026 A FR 852026A
Authority
FR
France
Prior art keywords
reaction apparatus
vacuum reaction
electrical feedthrough
feedthrough
electrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Inventor
Bernhard Berghaus
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR852026A publication Critical patent/FR852026A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32577—Electrical connecting means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B17/00—Insulators or insulating bodies characterised by their form
    • H01B17/26—Lead-in insulators; Lead-through insulators
    • H01B17/28—Capacitor type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B17/00—Insulators or insulating bodies characterised by their form
    • H01B17/26—Lead-in insulators; Lead-through insulators
    • H01B17/30—Sealing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B17/00—Insulators or insulating bodies characterised by their form
    • H01B17/26—Lead-in insulators; Lead-through insulators
    • H01B17/30—Sealing
    • H01B17/303—Sealing of leads to lead-through insulators
    • H01B17/308—Sealing of leads to lead-through insulators by compressing packing material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/02—Details
    • H01J17/04—Electrodes; Screens
FR852026D 1938-03-24 1939-03-23 Electrical feedthrough for vacuum reaction apparatus Expired FR852026A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE852026X 1938-03-24

Publications (1)

Publication Number Publication Date
FR852026A true FR852026A (en) 1940-01-22

Family

ID=6783098

Family Applications (1)

Application Number Title Priority Date Filing Date
FR852026D Expired FR852026A (en) 1938-03-24 1939-03-23 Electrical feedthrough for vacuum reaction apparatus

Country Status (1)

Country Link
FR (1) FR852026A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2616946A (en) * 1949-06-28 1952-11-04 Foote Mineral Co Gasket type sealing structure having deformable metal rings
EP0152307A2 (en) * 1984-02-15 1985-08-21 The Electricity Council Leadthrough arrangement
EP0372179A1 (en) * 1988-11-07 1990-06-13 Balzers Aktiengesellschaft Method of procuring high-frequency energy, and its use
WO2001078105A1 (en) * 2000-04-12 2001-10-18 Aixtron Ag Reaction chamber with at least one hf feedthrough

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2616946A (en) * 1949-06-28 1952-11-04 Foote Mineral Co Gasket type sealing structure having deformable metal rings
EP0152307A2 (en) * 1984-02-15 1985-08-21 The Electricity Council Leadthrough arrangement
EP0152307A3 (en) * 1984-02-15 1988-08-24 The Electricity Council Leadthrough arrangement
EP0372179A1 (en) * 1988-11-07 1990-06-13 Balzers Aktiengesellschaft Method of procuring high-frequency energy, and its use
US5064522A (en) * 1988-11-07 1991-11-12 Balzers Aktiengesellschaft Feed through for application of hf energy
WO2001078105A1 (en) * 2000-04-12 2001-10-18 Aixtron Ag Reaction chamber with at least one hf feedthrough
US7056388B2 (en) * 2000-04-12 2006-06-06 Aixtron Ag Reaction chamber with at least one HF feedthrough

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