FR3119888B1 - PYROELECTRIC DEVICE COMPRISING A SUBSTRATE WITH PYROELECTRIC SURFACE LAYER AND METHOD FOR PRODUCING IT - Google Patents
PYROELECTRIC DEVICE COMPRISING A SUBSTRATE WITH PYROELECTRIC SURFACE LAYER AND METHOD FOR PRODUCING IT Download PDFInfo
- Publication number
- FR3119888B1 FR3119888B1 FR2101603A FR2101603A FR3119888B1 FR 3119888 B1 FR3119888 B1 FR 3119888B1 FR 2101603 A FR2101603 A FR 2101603A FR 2101603 A FR2101603 A FR 2101603A FR 3119888 B1 FR3119888 B1 FR 3119888B1
- Authority
- FR
- France
- Prior art keywords
- pyroelectric
- producing
- substrate
- surface layer
- cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 5
- 239000000758 substrate Substances 0.000 title abstract 2
- 239000002344 surface layer Substances 0.000 title 1
- 239000000463 material Substances 0.000 abstract 3
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
- G01J5/35—Electrical features thereof
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
Procédé de réalisation d’un détecteur pyroélectrique (100), comportant : - réalisation d’une première électrode (116) sur une première partie (118) d’une face avant (112) d’une couche de matériau pyroélectrique (108) d’un substrat (102) comportant en outre une couche support (104) sur laquelle est disposée la couche de matériau pyroélectrique ; - réalisation d’une cavité (132) traversant la couche support telle qu’une paroi de fond de la cavité soit formée par une partie d’une face arrière (114) de la couche de matériau pyroélectrique, et telle qu’une partie de la paroi de fond de la cavité soit disposée à l’aplomb de la première électrode ; - réalisation d’une deuxième électrode (142) sur la partie de la paroi de fond de la cavité. Figure pour l’abrégé : Figure 10.Method for producing a pyroelectric detector (100), comprising: - production of a first electrode (116) on a first part (118) of a front face (112) of a layer of pyroelectric material (108) d a substrate (102) further comprising a support layer (104) on which the layer of pyroelectric material is disposed; - production of a cavity (132) passing through the support layer such that a bottom wall of the cavity is formed by a part of a rear face (114) of the layer of pyroelectric material, and such that a part of the bottom wall of the cavity is placed directly above the first electrode; - production of a second electrode (142) on the part of the bottom wall of the cavity. Figure for abstract: Figure 10.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR2101603A FR3119888B1 (en) | 2021-02-18 | 2021-02-18 | PYROELECTRIC DEVICE COMPRISING A SUBSTRATE WITH PYROELECTRIC SURFACE LAYER AND METHOD FOR PRODUCING IT |
PCT/FR2022/050247 WO2022175618A1 (en) | 2021-02-18 | 2022-02-11 | Pyroelectric device comprising a substrate having a pyroelectric surface layer, and method for producing same |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR2101603 | 2021-02-18 | ||
FR2101603A FR3119888B1 (en) | 2021-02-18 | 2021-02-18 | PYROELECTRIC DEVICE COMPRISING A SUBSTRATE WITH PYROELECTRIC SURFACE LAYER AND METHOD FOR PRODUCING IT |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3119888A1 FR3119888A1 (en) | 2022-08-19 |
FR3119888B1 true FR3119888B1 (en) | 2023-11-17 |
Family
ID=76730617
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR2101603A Active FR3119888B1 (en) | 2021-02-18 | 2021-02-18 | PYROELECTRIC DEVICE COMPRISING A SUBSTRATE WITH PYROELECTRIC SURFACE LAYER AND METHOD FOR PRODUCING IT |
Country Status (2)
Country | Link |
---|---|
FR (1) | FR3119888B1 (en) |
WO (1) | WO2022175618A1 (en) |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60171425A (en) * | 1984-02-17 | 1985-09-04 | Matsushita Electric Ind Co Ltd | Pyroelectric type heat detection element |
JPS6135320A (en) * | 1984-07-27 | 1986-02-19 | Matsushita Electric Ind Co Ltd | Pyroelectric type infrared detecting element and its manufacture |
JPS6327722A (en) * | 1986-07-21 | 1988-02-05 | Meidensha Electric Mfg Co Ltd | Pyroelectric matrix sensor and its preparation |
JP2564526B2 (en) * | 1986-11-20 | 1996-12-18 | 松下電器産業株式会社 | Pyroelectric infrared array element and manufacturing method thereof |
JPS63131032A (en) * | 1986-11-20 | 1988-06-03 | Matsushita Electric Ind Co Ltd | Pyroelectric type infrared ray detector |
JP2560560B2 (en) * | 1991-04-22 | 1996-12-04 | 株式会社島津製作所 | Method for manufacturing thermal photodetector and its support |
US5286975A (en) * | 1991-05-29 | 1994-02-15 | Matsushita Electric Industrial Co., Ltd. | Pyro-electric type infrared-ray sensor |
US5471060A (en) * | 1993-08-23 | 1995-11-28 | Matsushita Electric Industrial Co., Ltd. | Pyroelectric infrared radiation detector and method of producing the same |
JP2015052517A (en) * | 2013-09-06 | 2015-03-19 | 住友精密工業株式会社 | Infrared sensor manufacturing method and infrared sensor |
-
2021
- 2021-02-18 FR FR2101603A patent/FR3119888B1/en active Active
-
2022
- 2022-02-11 WO PCT/FR2022/050247 patent/WO2022175618A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2022175618A1 (en) | 2022-08-25 |
FR3119888A1 (en) | 2022-08-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLFP | Fee payment |
Year of fee payment: 2 |
|
PLSC | Publication of the preliminary search report |
Effective date: 20220819 |
|
PLFP | Fee payment |
Year of fee payment: 3 |