FR3118651B1 - Dispositif de chauffage et pompe à vide turbomoléculaire - Google Patents

Dispositif de chauffage et pompe à vide turbomoléculaire Download PDF

Info

Publication number
FR3118651B1
FR3118651B1 FR2100090A FR2100090A FR3118651B1 FR 3118651 B1 FR3118651 B1 FR 3118651B1 FR 2100090 A FR2100090 A FR 2100090A FR 2100090 A FR2100090 A FR 2100090A FR 3118651 B1 FR3118651 B1 FR 3118651B1
Authority
FR
France
Prior art keywords
heating device
vacuum pump
turbomolecular vacuum
radiating body
turbomolecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2100090A
Other languages
English (en)
Other versions
FR3118651A1 (fr
Inventor
Pierre-Emmanuel Cavarec
Romain Criado
François Roger
Eric Dulac
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Priority to FR2100090A priority Critical patent/FR3118651B1/fr
Priority to TW110149570A priority patent/TW202237986A/zh
Priority to US18/253,800 priority patent/US20240018972A1/en
Priority to PCT/EP2022/050068 priority patent/WO2022148745A1/fr
Publication of FR3118651A1 publication Critical patent/FR3118651A1/fr
Application granted granted Critical
Publication of FR3118651B1 publication Critical patent/FR3118651B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)

Abstract

Dispositif de chauffage (103) pour ligne de vide (100) dans laquelle des gaz pompés sont destinés à circuler, caractérisé en ce qu’il comporte au moins un corps rayonnant (20) configuré pour rayonner dans l’infrarouge lorsqu’il est chauffé à une température supérieure à 150°C, le au moins un corps rayonnant (20) étant agencé dans le chemin de pompage des gaz. Figure d’abrégé : figure 1
FR2100090A 2021-01-06 2021-01-06 Dispositif de chauffage et pompe à vide turbomoléculaire Active FR3118651B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR2100090A FR3118651B1 (fr) 2021-01-06 2021-01-06 Dispositif de chauffage et pompe à vide turbomoléculaire
TW110149570A TW202237986A (zh) 2021-01-06 2021-12-30 加熱裝置及真空泵
US18/253,800 US20240018972A1 (en) 2021-01-06 2022-01-04 Heating device and vacuum pump
PCT/EP2022/050068 WO2022148745A1 (fr) 2021-01-06 2022-01-04 Dispositif de chauffage et pompe à vide

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2100090 2021-01-06
FR2100090A FR3118651B1 (fr) 2021-01-06 2021-01-06 Dispositif de chauffage et pompe à vide turbomoléculaire

Publications (2)

Publication Number Publication Date
FR3118651A1 FR3118651A1 (fr) 2022-07-08
FR3118651B1 true FR3118651B1 (fr) 2023-03-31

Family

ID=74860195

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2100090A Active FR3118651B1 (fr) 2021-01-06 2021-01-06 Dispositif de chauffage et pompe à vide turbomoléculaire

Country Status (4)

Country Link
US (1) US20240018972A1 (fr)
FR (1) FR3118651B1 (fr)
TW (1) TW202237986A (fr)
WO (1) WO2022148745A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020186687A (ja) * 2019-05-15 2020-11-19 エドワーズ株式会社 真空ポンプとそのネジ溝ポンプ部の固定部品

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2527398B2 (ja) * 1992-06-05 1996-08-21 財団法人真空科学研究所 タ―ボ分子ポンプ
DE69409555T2 (de) * 1993-01-11 1998-12-03 Applied Materials Inc Turbomolekularpumpe
DE102013207059A1 (de) * 2013-04-18 2014-10-23 Agilent Technologies, Inc. - A Delaware Corporation - Turbomolekularpumpe mit Stator- und/oder Rotorelementen mit Metalloxid-Oberfläche mit hohem Strahlungsvermögen
JP6484919B2 (ja) * 2013-09-24 2019-03-20 株式会社島津製作所 ターボ分子ポンプ
JP6398337B2 (ja) * 2014-06-04 2018-10-03 株式会社島津製作所 ターボ分子ポンプ
JP6666696B2 (ja) * 2015-11-16 2020-03-18 エドワーズ株式会社 真空ポンプ

Also Published As

Publication number Publication date
TW202237986A (zh) 2022-10-01
WO2022148745A1 (fr) 2022-07-14
FR3118651A1 (fr) 2022-07-08
US20240018972A1 (en) 2024-01-18

Similar Documents

Publication Publication Date Title
FR3118651B1 (fr) Dispositif de chauffage et pompe à vide turbomoléculaire
FR3047884B1 (fr) Appareil de cuisson a flux d'air
JP6432404B2 (ja) 液化二酸化炭素送液ポンプとそれを備えた超臨界流体クロマトグラフ
RU2014127657A (ru) Способ и насос для перекачивания высоковязких текучих сред
EP2473786A1 (fr) Four à circulation d'air
KR101621491B1 (ko) 연속 사용이 가능한 교육용 소화기
FR3092879B1 (fr) Pompe à vide primaire de type sèche
FR2394040A1 (fr) Dispositif d'alimentation pour cryostat
MX2023005413A (es) Ensamble de soplador de calentador de agua que tiene un puerto de escape bajo.
JP2003207135A (ja) ガスこんろ
FR3103132B1 (fr) Enceinte chauffée à volume variable.
CN109386855A (zh) 节能罩和燃气灶
CN210204448U (zh) 一种即热式出水装置及茶吧机
NL2006919C2 (nl) Direct gasgestookt verwarmingsapparaat.
FR3130288A1 (fr) Chauffage vendanges et mouts, thermovinification.
FR3104685A3 (fr) Installation de chauffage à conduits radiants
US11382465B1 (en) Portable apparatus for heated showers
FR3115862B1 (fr) Système de récupération de chaleur fatale évacuée dans des rejets gazeux comprenant deux ventilateurs d’aspiration indépendants.
RU2579859C2 (ru) Передвижная печь для термической обработки металлов
JP3031403B2 (ja) 温風暖房機
JP1741477S (ja) 携行用小型調理テーブル
FR2609157A1 (fr) Perfectionnements a des tubes radiants a gaz
FR3118691B1 (fr) Récipient portatif autochauffant
FR3093793B1 (fr) Dispositif de chauffage local portatif économique à liquide à air pulsé
FR2983210B1 (fr) Chauffage vendanges et mouts, thermovinification

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 2

PLSC Publication of the preliminary search report

Effective date: 20220708

PLFP Fee payment

Year of fee payment: 3

PLFP Fee payment

Year of fee payment: 4