FR3116309B1 - Vacuum pump - Google Patents

Vacuum pump Download PDF

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Publication number
FR3116309B1
FR3116309B1 FR2011894A FR2011894A FR3116309B1 FR 3116309 B1 FR3116309 B1 FR 3116309B1 FR 2011894 A FR2011894 A FR 2011894A FR 2011894 A FR2011894 A FR 2011894A FR 3116309 B1 FR3116309 B1 FR 3116309B1
Authority
FR
France
Prior art keywords
stator
vacuum pump
rotor
pumped
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2011894A
Other languages
French (fr)
Other versions
FR3116309A1 (en
Inventor
Emmanuel Beaujon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Priority to FR2011894A priority Critical patent/FR3116309B1/en
Priority to PCT/EP2021/073985 priority patent/WO2022106085A1/en
Priority to KR1020237020471A priority patent/KR20230098909A/en
Priority to TW110133735A priority patent/TW202221231A/en
Publication of FR3116309A1 publication Critical patent/FR3116309A1/en
Priority to FR2303597A priority patent/FR3134435A1/en
Application granted granted Critical
Publication of FR3116309B1 publication Critical patent/FR3116309B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
    • F04C15/0096—Heating; Cooling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Pompe à vide (1) sèche comportant :- un stator (2) présentant au moins une chambre de compression (3) dans laquelle les gaz à pomper sont destinés à circuler,- deux rotors (4) configurés pour tourner dans la au moins une chambre de compression (3) du stator (2) pour entrainer le gaz à pomper entre un orifice d’aspiration (5) et un orifice de refoulement du stator (2), caractérisée en ce que la pompe à vide (1) comporte en outre au moins un aimant (9) agencé dans au moins un rotor (4) de manière à faire face à une surface (10, 12, 16) en matériau ferromagnétique du stator (2) à chaque rotation du au moins un rotor (4) afin que la rotation du au moins un rotor (4) entraine un échauffement de la surface (10, 12, 16) en matériau ferromagnétique par induction magnétique. - Figure 2 -Dry vacuum pump (1) comprising:- a stator (2) having at least one compression chamber (3) in which the gases to be pumped are intended to circulate,- two rotors (4) configured to rotate in the at least one compression chamber (3) of the stator (2) for driving the gas to be pumped between a suction orifice (5) and a discharge orifice of the stator (2), characterized in that the vacuum pump (1) comprises furthermore at least one magnet (9) arranged in at least one rotor (4) so as to face a surface (10, 12, 16) made of ferromagnetic material of the stator (2) on each rotation of the at least one rotor (4 ) so that the rotation of at least one rotor (4) causes heating of the surface (10, 12, 16) of ferromagnetic material by magnetic induction. - Picture 2 -

FR2011894A 2020-11-19 2020-11-19 Vacuum pump Active FR3116309B1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR2011894A FR3116309B1 (en) 2020-11-19 2020-11-19 Vacuum pump
PCT/EP2021/073985 WO2022106085A1 (en) 2020-11-19 2021-08-31 Vacuum pump
KR1020237020471A KR20230098909A (en) 2020-11-19 2021-08-31 vacuum pump
TW110133735A TW202221231A (en) 2020-11-19 2021-09-10 Vacuum pump
FR2303597A FR3134435A1 (en) 2020-11-19 2023-04-11 Vacuum pump

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2011894A FR3116309B1 (en) 2020-11-19 2020-11-19 Vacuum pump
FR2011894 2020-11-19

Related Child Applications (1)

Application Number Title Priority Date Filing Date
FR2303597A Division FR3134435A1 (en) 2020-11-19 2023-04-11 Vacuum pump

Publications (2)

Publication Number Publication Date
FR3116309A1 FR3116309A1 (en) 2022-05-20
FR3116309B1 true FR3116309B1 (en) 2023-06-30

Family

ID=74125508

Family Applications (2)

Application Number Title Priority Date Filing Date
FR2011894A Active FR3116309B1 (en) 2020-11-19 2020-11-19 Vacuum pump
FR2303597A Pending FR3134435A1 (en) 2020-11-19 2023-04-11 Vacuum pump

Family Applications After (1)

Application Number Title Priority Date Filing Date
FR2303597A Pending FR3134435A1 (en) 2020-11-19 2023-04-11 Vacuum pump

Country Status (4)

Country Link
KR (1) KR20230098909A (en)
FR (2) FR3116309B1 (en)
TW (1) TW202221231A (en)
WO (1) WO2022106085A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2621345A (en) * 2022-08-09 2024-02-14 Leybold Gmbh Vacuum pump

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3456558B2 (en) * 1995-07-24 2003-10-14 株式会社島津製作所 Turbo molecular pump
JP4017365B2 (en) * 2001-07-19 2007-12-05 株式会社荏原製作所 Dry vacuum pump

Also Published As

Publication number Publication date
FR3116309A1 (en) 2022-05-20
FR3134435A1 (en) 2023-10-13
WO2022106085A1 (en) 2022-05-27
TW202221231A (en) 2022-06-01
KR20230098909A (en) 2023-07-04

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