FR3115180B1 - Appareil de génération de plasma - Google Patents
Appareil de génération de plasma Download PDFInfo
- Publication number
- FR3115180B1 FR3115180B1 FR2010519A FR2010519A FR3115180B1 FR 3115180 B1 FR3115180 B1 FR 3115180B1 FR 2010519 A FR2010519 A FR 2010519A FR 2010519 A FR2010519 A FR 2010519A FR 3115180 B1 FR3115180 B1 FR 3115180B1
- Authority
- FR
- France
- Prior art keywords
- cathode
- chamber
- plasma
- cathode electrode
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000015556 catabolic process Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 abstract 1
- 230000001052 transient effect Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/48—Generating plasma using an arc
- H05H1/481—Hollow cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32596—Hollow cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32917—Plasma diagnostics
- H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32917—Plasma diagnostics
- H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
- H01J37/32944—Arc detection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32917—Plasma diagnostics
- H01J37/3299—Feedback systems
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2242/00—Auxiliary systems
- H05H2242/20—Power circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2245/00—Applications of plasma devices
- H05H2245/10—Treatment of gases
- H05H2245/15—Ambient air; Ozonisers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Plasma Technology (AREA)
- Drying Of Semiconductors (AREA)
Abstract
(Abrégé) Appareil de génération de plasma L’invention concerne un appareil pour générer un plasma via l’effet de décharge à cathode creuse transitoire. L’appareil comprend une chambre comprenant une entrée à travers laquelle le gaz peut entrer dans la chambre et une sortie à travers laquelle le gaz peut sortir de la chambre, une électrode de cathode disposée dans la chambre, l’électrode de cathode comprenant une pluralité de cathodes creuses, une électrode d’anode espacée de la cathode, une alimentation électrique et un dispositif de commande d’alimentation électrique configuré pour réduire un niveau d’énergie de l’énergie électrique en dessous d’un niveau requis pour maintenir le plasma au niveau de la pluralité de cathodes creuses, après un claquage électrique. Chaque cathode creuse comprend un trou traversant l’épaisseur à travers lequel le gaz peut passer d’un côté de l’électrode de cathode à un autre côté de l’électrode de cathode. Un appareil modulaire est également décrit, comprenant une pluralité de modules de réacteur à plasma agencés en série et/ou en parallèle.
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR2010519A FR3115180B1 (fr) | 2020-10-14 | 2020-10-14 | Appareil de génération de plasma |
BR112023011748A BR112023011748A2 (pt) | 2020-10-14 | 2021-10-14 | Aparelho gerador de plasma |
PCT/EP2021/078523 WO2022079203A1 (fr) | 2020-10-14 | 2021-10-14 | Appareil de génération de plasma |
JP2023534211A JP2023551617A (ja) | 2020-10-14 | 2021-10-14 | プラズマ発生装置 |
CN202180082970.9A CN116569657A (zh) | 2020-10-14 | 2021-10-14 | 等离子体生成装置 |
US18/031,697 US20230386797A1 (en) | 2020-10-14 | 2021-10-14 | Plasma generating apparatus |
EP21791382.1A EP4260664A1 (fr) | 2020-10-14 | 2021-10-14 | Appareil de génération de plasma |
ZA2023/05266A ZA202305266B (en) | 2020-10-14 | 2023-05-12 | Plasma generating apparatus |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR2010519A FR3115180B1 (fr) | 2020-10-14 | 2020-10-14 | Appareil de génération de plasma |
FR2010519 | 2020-10-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3115180A1 FR3115180A1 (fr) | 2022-04-15 |
FR3115180B1 true FR3115180B1 (fr) | 2022-11-04 |
Family
ID=76375089
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR2010519A Expired - Fee Related FR3115180B1 (fr) | 2020-10-14 | 2020-10-14 | Appareil de génération de plasma |
Country Status (8)
Country | Link |
---|---|
US (1) | US20230386797A1 (fr) |
EP (1) | EP4260664A1 (fr) |
JP (1) | JP2023551617A (fr) |
CN (1) | CN116569657A (fr) |
BR (1) | BR112023011748A2 (fr) |
FR (1) | FR3115180B1 (fr) |
WO (1) | WO2022079203A1 (fr) |
ZA (1) | ZA202305266B (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115020177B (zh) * | 2022-05-11 | 2023-04-28 | 北京科技大学 | 一种气相沉积空心阴极复合电极涡旋气体输入装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE503141C2 (sv) * | 1994-11-18 | 1996-04-01 | Ladislav Bardos | Apparat för alstring av linjär ljusbågsurladdning för plasmabearbetning |
DE19722624C2 (de) * | 1997-05-30 | 2001-08-09 | Je Plasmaconsult Gmbh | Vorrichtung zur Erzeugung einer Vielzahl von Niedertemperatur-Plasmajets |
SE516722C2 (sv) * | 1999-04-28 | 2002-02-19 | Hana Barankova | Förfarande och apparat för plasmabehandling av gas |
KR100507334B1 (ko) * | 2003-02-20 | 2005-08-08 | 위순임 | 대기압 프라즈마 가속장치 |
KR101092881B1 (ko) * | 2010-01-14 | 2011-12-12 | 한국과학기술원 | 축전 결합 플라즈마 발생 장치 및 축전 결합 플라즈마 발생 방법 |
JP5804059B2 (ja) * | 2011-07-14 | 2015-11-04 | 株式会社島津製作所 | プラズマ処理装置 |
US9685297B2 (en) * | 2012-08-28 | 2017-06-20 | Advanced Energy Industries, Inc. | Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system |
EP3054472A1 (fr) * | 2015-02-03 | 2016-08-10 | TRUMPF Huettinger Sp. Z o. o. | Dispositif et procédé de traitement d'arcs |
-
2020
- 2020-10-14 FR FR2010519A patent/FR3115180B1/fr not_active Expired - Fee Related
-
2021
- 2021-10-14 US US18/031,697 patent/US20230386797A1/en active Pending
- 2021-10-14 BR BR112023011748A patent/BR112023011748A2/pt unknown
- 2021-10-14 JP JP2023534211A patent/JP2023551617A/ja active Pending
- 2021-10-14 WO PCT/EP2021/078523 patent/WO2022079203A1/fr active Application Filing
- 2021-10-14 EP EP21791382.1A patent/EP4260664A1/fr active Pending
- 2021-10-14 CN CN202180082970.9A patent/CN116569657A/zh active Pending
-
2023
- 2023-05-12 ZA ZA2023/05266A patent/ZA202305266B/en unknown
Also Published As
Publication number | Publication date |
---|---|
CN116569657A (zh) | 2023-08-08 |
ZA202305266B (en) | 2023-12-20 |
US20230386797A1 (en) | 2023-11-30 |
WO2022079203A1 (fr) | 2022-04-21 |
BR112023011748A2 (pt) | 2023-12-26 |
JP2023551617A (ja) | 2023-12-11 |
FR3115180A1 (fr) | 2022-04-15 |
EP4260664A1 (fr) | 2023-10-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLFP | Fee payment |
Year of fee payment: 2 |
|
PLSC | Publication of the preliminary search report |
Effective date: 20220415 |
|
PLFP | Fee payment |
Year of fee payment: 3 |
|
ST | Notification of lapse |
Effective date: 20240606 |