FR3112972B1 - Dispositif et procede de depot de revetements epais de nitrures metaliques par la voie fluides supercritique - Google Patents

Dispositif et procede de depot de revetements epais de nitrures metaliques par la voie fluides supercritique Download PDF

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Publication number
FR3112972B1
FR3112972B1 FR2008073A FR2008073A FR3112972B1 FR 3112972 B1 FR3112972 B1 FR 3112972B1 FR 2008073 A FR2008073 A FR 2008073A FR 2008073 A FR2008073 A FR 2008073A FR 3112972 B1 FR3112972 B1 FR 3112972B1
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FR
France
Prior art keywords
enclosure
volume
supercritical fluid
metal nitrides
depositing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2008073A
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English (en)
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FR3112972A1 (fr
Inventor
Marjorie Christine Cavarroc
Cyril Aymonier
Baptiste Simon Giroire
Bertrand Guillaume
Angélique Nadine Jeanne Poulon
Guillaume Aubert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Universite des Sciences et Tech (Bordeaux 1)
Safran SA
Original Assignee
Centre National de la Recherche Scientifique CNRS
Universite des Sciences et Tech (Bordeaux 1)
Safran SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Universite des Sciences et Tech (Bordeaux 1), Safran SA filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR2008073A priority Critical patent/FR3112972B1/fr
Priority to US18/006,840 priority patent/US20230304159A1/en
Priority to CN202180059156.5A priority patent/CN116157553A/zh
Priority to PCT/FR2021/051364 priority patent/WO2022023647A1/fr
Priority to EP21752089.9A priority patent/EP4189137A1/fr
Publication of FR3112972A1 publication Critical patent/FR3112972A1/fr
Application granted granted Critical
Publication of FR3112972B1 publication Critical patent/FR3112972B1/fr
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/125—Process of deposition of the inorganic material
    • C23C18/1291—Process of deposition of the inorganic material by heating of the substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/50—Improvements relating to the production of bulk chemicals
    • Y02P20/54—Improvements relating to the production of bulk chemicals using solvents, e.g. supercritical solvents or ionic liquids

Abstract

Dispositif et procédé de dépôt de revêtements épais de nitrures métalliques par la voie fluides supercritiques Dispositif (100) de dépôt d’un nitrure métallique épais sur un échantillon (104) par la voie fluides supercritiques comprenant : Une première enceinte (110) formant un premier volume fermé (V1) ; Une deuxième enceinte (120) placé dans la première enceinte et délimitée par des parois internes (102) transparentes aux rayonnements électromagnétiques formant un second volume fermé (V2) destiné à comprendre un fluide en conditions supercritiques ; Un fluide diélectrique caloporteur circulant dans le premier volume autour de la deuxième enceinte ; Un porte-échantillon (105) présent dans le second volume ; Un dispositif de chauffage par induction (103) entourant la deuxième enceinte ; Des entrées (150, 151) pour introduire dans la deuxième enceinte un fluide et au moins un matériau précurseur ; et Une sortie (152) pour purger le second volume. Figure pour l’abrégé : Fig. 1
FR2008073A 2020-07-30 2020-07-30 Dispositif et procede de depot de revetements epais de nitrures metaliques par la voie fluides supercritique Active FR3112972B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR2008073A FR3112972B1 (fr) 2020-07-30 2020-07-30 Dispositif et procede de depot de revetements epais de nitrures metaliques par la voie fluides supercritique
US18/006,840 US20230304159A1 (en) 2020-07-30 2021-07-21 Device and method for depositing thick metal nitride coatings by the supercritical fluid route
CN202180059156.5A CN116157553A (zh) 2020-07-30 2021-07-21 通过超临界流体路径沉积厚金属氮化物涂层的装置和方法
PCT/FR2021/051364 WO2022023647A1 (fr) 2020-07-30 2021-07-21 Dispositif et procede de depot de revetements epais de nitrures metalliques par la voie fluides supercritiques
EP21752089.9A EP4189137A1 (fr) 2020-07-30 2021-07-21 Dispositif et procede de depot de revetements epais de nitrures metalliques par la voie fluides supercritiques

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2008073A FR3112972B1 (fr) 2020-07-30 2020-07-30 Dispositif et procede de depot de revetements epais de nitrures metaliques par la voie fluides supercritique
FR2008073 2020-07-30

Publications (2)

Publication Number Publication Date
FR3112972A1 FR3112972A1 (fr) 2022-02-04
FR3112972B1 true FR3112972B1 (fr) 2022-11-04

Family

ID=73643017

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2008073A Active FR3112972B1 (fr) 2020-07-30 2020-07-30 Dispositif et procede de depot de revetements epais de nitrures metaliques par la voie fluides supercritique

Country Status (5)

Country Link
US (1) US20230304159A1 (fr)
EP (1) EP4189137A1 (fr)
CN (1) CN116157553A (fr)
FR (1) FR3112972B1 (fr)
WO (1) WO2022023647A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3139144A1 (fr) 2022-08-30 2024-03-01 Safran Procédé de dépôt d'un revêtement en oxyde d'aluminium

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7119418B2 (en) * 2001-12-31 2006-10-10 Advanced Technology Materials, Inc. Supercritical fluid-assisted deposition of materials on semiconductor substrates
US20080220244A1 (en) * 2004-01-21 2008-09-11 Chien M Wai Supercritical Fluids in the Formation and Modification of Nanostructures and Nanocomposites
FR2915753B1 (fr) * 2007-05-02 2009-09-04 Commissariat Energie Atomique Procede et dispositif de preparation d'un revetement multicouche sur un substrat
CN106222707B (zh) * 2014-12-11 2018-02-06 江苏理工学院 基于超临界流体3d电沉积加工装置

Also Published As

Publication number Publication date
CN116157553A (zh) 2023-05-23
FR3112972A1 (fr) 2022-02-04
US20230304159A1 (en) 2023-09-28
WO2022023647A1 (fr) 2022-02-03
EP4189137A1 (fr) 2023-06-07

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