FR3097599B1 - Pompe à vide primaire de type sèche et procédé de contrôle de l’injection d’un gaz de purge - Google Patents
Pompe à vide primaire de type sèche et procédé de contrôle de l’injection d’un gaz de purge Download PDFInfo
- Publication number
- FR3097599B1 FR3097599B1 FR1906546A FR1906546A FR3097599B1 FR 3097599 B1 FR3097599 B1 FR 3097599B1 FR 1906546 A FR1906546 A FR 1906546A FR 1906546 A FR1906546 A FR 1906546A FR 3097599 B1 FR3097599 B1 FR 3097599B1
- Authority
- FR
- France
- Prior art keywords
- dry
- controlling
- vacuum pump
- purge gas
- type primary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000002347 injection Methods 0.000 title abstract 3
- 239000007924 injection Substances 0.000 title abstract 3
- 238000010926 purge Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title 1
- 238000009530 blood pressure measurement Methods 0.000 abstract 1
- 238000005086 pumping Methods 0.000 abstract 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/80—Other components
- F04C2240/81—Sensor, e.g. electronic sensor for control or monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/18—Pressure
- F04C2270/185—Controlled or regulated
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/58—Valve parameters
- F04C2270/585—Controlled or regulated
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2280/00—Arrangements for preventing or removing deposits or corrosion
- F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
L’invention concerne une pompe à vide (1) primaire de type sèche comportant un dispositif d’injection (9) configuré pour distribuer un gaz de purge dans les étages de pompage (2a-2e), le dispositif d’injection (9) comportant :o un premier capteur de pression (12) agencé sur une portion commune (15) du distributeur (10),o un deuxième capteur de pression (13a-13e) agencé sur chaque branche (16a-16e) du distributeur (10), et o une unité de contrôle (14) configurée pour générer un signal de commande par modulation de largeur d’impulsions pour le contrôle des vannes de régulation (11a-11e) indépendamment les unes des autres en fonction des différences de mesure de pression entre le premier capteur de pression (12) et les deuxièmes capteurs de pression (13a-13e). Figure pour l’abrégé : Fig. 1
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1906546A FR3097599B1 (fr) | 2019-06-18 | 2019-06-18 | Pompe à vide primaire de type sèche et procédé de contrôle de l’injection d’un gaz de purge |
TW109115729A TWI829927B (zh) | 2019-06-18 | 2020-05-12 | 乾式主真空泵及控制沖洗氣體注入之方法 |
PCT/EP2020/063590 WO2020254043A1 (fr) | 2019-06-18 | 2020-05-15 | Pompe à vide primaire de type sèche et procédé de contrôle de l'injection d'un gaz de purge |
DE112020002927.1T DE112020002927T5 (de) | 2019-06-18 | 2020-05-15 | Trockenvorvakuumpumpe und Verfahren zur Steuerung der Einleitung eines Spülgases |
US17/619,394 US11725659B2 (en) | 2019-06-18 | 2020-05-15 | Dry-type primary vacuum pump and method for controlling the injection of a purging gas |
CN202080044689.1A CN114008325B (zh) | 2019-06-18 | 2020-05-15 | 干式粗真空泵和用于控制吹扫气体的喷射的方法 |
KR1020217041887A KR20220024140A (ko) | 2019-06-18 | 2020-05-15 | 건식 1차 진공 펌프 및 퍼징 가스의 주입을 제어하기 위한 방법 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1906546A FR3097599B1 (fr) | 2019-06-18 | 2019-06-18 | Pompe à vide primaire de type sèche et procédé de contrôle de l’injection d’un gaz de purge |
FR1906546 | 2019-06-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3097599A1 FR3097599A1 (fr) | 2020-12-25 |
FR3097599B1 true FR3097599B1 (fr) | 2021-06-25 |
Family
ID=67514988
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1906546A Active FR3097599B1 (fr) | 2019-06-18 | 2019-06-18 | Pompe à vide primaire de type sèche et procédé de contrôle de l’injection d’un gaz de purge |
Country Status (7)
Country | Link |
---|---|
US (1) | US11725659B2 (fr) |
KR (1) | KR20220024140A (fr) |
CN (1) | CN114008325B (fr) |
DE (1) | DE112020002927T5 (fr) |
FR (1) | FR3097599B1 (fr) |
TW (1) | TWI829927B (fr) |
WO (1) | WO2020254043A1 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR3129851A1 (fr) * | 2021-12-08 | 2023-06-09 | Pfeiffer Vacuum | Ligne de vide et installation comportant la ligne de vide |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0413776D0 (en) * | 2004-06-18 | 2004-07-21 | Boc Group Plc | Vacuum pump |
GB2423555A (en) * | 2005-02-26 | 2006-08-30 | Energetix Group Ltd | Pulsed fluid supply to positive displacement expander |
GB0922564D0 (en) * | 2009-12-24 | 2010-02-10 | Edwards Ltd | Pump |
GB2500610A (en) * | 2012-03-26 | 2013-10-02 | Edwards Ltd | Apparatus to supply purge gas to a multistage vacuum pump |
FR2993614B1 (fr) | 2012-07-19 | 2018-06-15 | Pfeiffer Vacuum | Procede et dispositif de pompage d'une chambre de procedes |
US9038489B2 (en) * | 2012-10-15 | 2015-05-26 | GM Global Technology Operations LLC | System and method for controlling a vacuum pump that is used to check for leaks in an evaporative emissions system |
DE202012012359U1 (de) * | 2012-12-22 | 2014-03-24 | Oerlikon Leybold Vacuum Gmbh | Pumpstand zum Pumpen leichter Gase |
FR3001263B1 (fr) * | 2013-01-18 | 2015-02-20 | Adixen Vacuum Products | Pompe a vide multi-etagee de type seche |
ES2785202T3 (es) * | 2014-10-02 | 2020-10-06 | Ateliers Busch S A | Sistema de bombeo para generar un vacío y procedimiento de bombeo por medio de este sistema de bombeo |
FR3086705B1 (fr) * | 2018-09-27 | 2020-10-23 | Pfeiffer Vacuum | Pompe a vide primaire de type seche et procede de controle de l'injection d'un gaz de purge |
-
2019
- 2019-06-18 FR FR1906546A patent/FR3097599B1/fr active Active
-
2020
- 2020-05-12 TW TW109115729A patent/TWI829927B/zh active
- 2020-05-15 US US17/619,394 patent/US11725659B2/en active Active
- 2020-05-15 KR KR1020217041887A patent/KR20220024140A/ko unknown
- 2020-05-15 CN CN202080044689.1A patent/CN114008325B/zh active Active
- 2020-05-15 WO PCT/EP2020/063590 patent/WO2020254043A1/fr active Application Filing
- 2020-05-15 DE DE112020002927.1T patent/DE112020002927T5/de active Pending
Also Published As
Publication number | Publication date |
---|---|
TW202100869A (zh) | 2021-01-01 |
KR20220024140A (ko) | 2022-03-03 |
DE112020002927T5 (de) | 2022-03-03 |
CN114008325A (zh) | 2022-02-01 |
WO2020254043A1 (fr) | 2020-12-24 |
US20220372979A1 (en) | 2022-11-24 |
FR3097599A1 (fr) | 2020-12-25 |
CN114008325B (zh) | 2024-05-03 |
TWI829927B (zh) | 2024-01-21 |
US11725659B2 (en) | 2023-08-15 |
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Legal Events
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PLFP | Fee payment |
Year of fee payment: 2 |
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PLSC | Publication of the preliminary search report |
Effective date: 20201225 |
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Year of fee payment: 3 |
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