FR3097046B1 - Microbolometer with reduced pixel pitch - Google Patents

Microbolometer with reduced pixel pitch Download PDF

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Publication number
FR3097046B1
FR3097046B1 FR1905962A FR1905962A FR3097046B1 FR 3097046 B1 FR3097046 B1 FR 3097046B1 FR 1905962 A FR1905962 A FR 1905962A FR 1905962 A FR1905962 A FR 1905962A FR 3097046 B1 FR3097046 B1 FR 3097046B1
Authority
FR
France
Prior art keywords
microbolometer
pixel
detection
absorption layer
pixel pitch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1905962A
Other languages
French (fr)
Other versions
FR3097046A1 (en
Inventor
Nicolas Boudou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lynred SAS
Original Assignee
Lynred SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lynred SAS filed Critical Lynred SAS
Priority to FR1905962A priority Critical patent/FR3097046B1/en
Priority to KR1020217041774A priority patent/KR20220030942A/en
Priority to EP20733541.5A priority patent/EP3980736A1/en
Priority to PCT/EP2020/065677 priority patent/WO2020245394A1/en
Priority to CN202080050798.4A priority patent/CN114127523A/en
Priority to US17/614,830 priority patent/US20220236114A1/en
Publication of FR3097046A1 publication Critical patent/FR3097046A1/en
Application granted granted Critical
Publication of FR3097046B1 publication Critical patent/FR3097046B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0853—Optical arrangements having infrared absorbers other than the usual absorber layers deposited on infrared detectors like bolometers, wherein the heat propagation between the absorber and the detecting element occurs within a solid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0801—Means for wavelength selection or discrimination
    • G01J5/0802—Optical filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J2005/0077—Imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G01J2005/202—Arrays

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)

Abstract

Microbolomètre ayant un pas de pixel réduit La présente description concerne un microbolomètre comprenant une matrice de pixels, chaque pixel comprenant une ou plusieurs cellules de détection, chaque cellule de détection comprenant une couche d’absorption (530), dans lequel : le pas des cellules de détection dans au moins une direction dans le plan de la matrice de pixels est compris entre 5 et 11 µm ; un facteur de remplissage de pixel FF de la couche d’absorption (530) desdites une ou plusieurs cellules de détection dans chaque pixel est dans une plage de 0,10 à 0,50 ; et une résistance par carré Rs de la couche d’absorption (530) de chaque cellule de détection est comprise entre 16 et 189 ohms par carré. Figure pour l'abrégé : Fig. 5Microbolometer having a reduced pixel pitch The present description relates to a microbolometer comprising an array of pixels, each pixel comprising one or more detection cells, each detection cell comprising an absorption layer (530), in which: the cell pitch detection in at least one direction in the plane of the pixel array is between 5 and 11 µm; a pixel fill factor FF of the absorption layer (530) of said one or more detection cells in each pixel is in a range of 0.10 to 0.50; and a resistance per square Rs of the absorption layer (530) of each detection cell is between 16 and 189 ohms per square. Figure for the abstract: Fig. 5

FR1905962A 2019-06-05 2019-06-05 Microbolometer with reduced pixel pitch Active FR3097046B1 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR1905962A FR3097046B1 (en) 2019-06-05 2019-06-05 Microbolometer with reduced pixel pitch
KR1020217041774A KR20220030942A (en) 2019-06-05 2020-06-05 Microbolometers with reduced pixel pitch
EP20733541.5A EP3980736A1 (en) 2019-06-05 2020-06-05 Microbolometer having reduced pixel pitch
PCT/EP2020/065677 WO2020245394A1 (en) 2019-06-05 2020-06-05 Microbolometer having reduced pixel pitch
CN202080050798.4A CN114127523A (en) 2019-06-05 2020-06-05 Microbolometer with reduced pixel pitch
US17/614,830 US20220236114A1 (en) 2019-06-05 2020-06-05 Microbolometer having reduced pixel pitch

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1905962A FR3097046B1 (en) 2019-06-05 2019-06-05 Microbolometer with reduced pixel pitch
FR1905962 2019-06-05

Publications (2)

Publication Number Publication Date
FR3097046A1 FR3097046A1 (en) 2020-12-11
FR3097046B1 true FR3097046B1 (en) 2021-05-21

Family

ID=68806838

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1905962A Active FR3097046B1 (en) 2019-06-05 2019-06-05 Microbolometer with reduced pixel pitch

Country Status (6)

Country Link
US (1) US20220236114A1 (en)
EP (1) EP3980736A1 (en)
KR (1) KR20220030942A (en)
CN (1) CN114127523A (en)
FR (1) FR3097046B1 (en)
WO (1) WO2020245394A1 (en)

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6621083B2 (en) * 2000-12-29 2003-09-16 Honeywell International Inc. High-absorption wide-band pixel for bolometer arrays
US8513605B2 (en) * 2010-04-28 2013-08-20 L-3 Communications Corporation Optically transitioning thermal detector structures
FR2966925B1 (en) * 2010-11-03 2012-11-02 Commissariat Energie Atomique INFRARED DETECTOR BASED ON SUSPENDED BOLOMETRIC MICRO-PLANKS
FR2977937B1 (en) * 2011-07-15 2013-08-16 Centre Nat Rech Scient BOLOMETRIC DETECTOR WITH IMPROVED PERFORMANCES
FR2983953B1 (en) * 2011-12-09 2014-01-03 Commissariat Energie Atomique BOLOMETRIC DETECTOR OF ELECTROMAGNETIC RADIATION IN THE DOMAIN OF TERAHERTZ AND MATRIX DETECTION DEVICE COMPRISING SUCH DETECTORS
US8900906B2 (en) * 2012-03-08 2014-12-02 Robert Bosch Gmbh Atomic layer deposition strengthening members and method of manufacture
FR2999805B1 (en) * 2012-12-17 2017-12-22 Commissariat Energie Atomique METHOD FOR PRODUCING AN INFRARED DETECTION DEVICE
KR101910573B1 (en) * 2012-12-20 2018-10-22 삼성전자주식회사 Infrared detector including broadband light absorber
FR3045148B1 (en) * 2015-12-15 2017-12-08 Ulis DETECTION DEVICE WITH SUSPENDED BOLOMETRIC MEMBRANES WITH HIGH ABSORPTION EFFICIENCY AND SIGNAL-TO-NOISE RATIO
CN105737993B (en) * 2016-02-02 2019-04-26 烟台睿创微纳技术股份有限公司 A kind of tunable micro-metering bolometer pixel structure and pixel array

Also Published As

Publication number Publication date
CN114127523A (en) 2022-03-01
KR20220030942A (en) 2022-03-11
FR3097046A1 (en) 2020-12-11
US20220236114A1 (en) 2022-07-28
EP3980736A1 (en) 2022-04-13
WO2020245394A1 (en) 2020-12-10

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