FR3091347B1 - Method for characterizing a sample by phase imaging - Google Patents

Method for characterizing a sample by phase imaging Download PDF

Info

Publication number
FR3091347B1
FR3091347B1 FR1874187A FR1874187A FR3091347B1 FR 3091347 B1 FR3091347 B1 FR 3091347B1 FR 1874187 A FR1874187 A FR 1874187A FR 1874187 A FR1874187 A FR 1874187A FR 3091347 B1 FR3091347 B1 FR 3091347B1
Authority
FR
France
Prior art keywords
sample
characterizing
illumination
during step
phase image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1874187A
Other languages
French (fr)
Other versions
FR3091347A1 (en
Inventor
Cardinal De Kernier Isaure Le
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba ABX SAS
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Horiba ABX SAS
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Horiba ABX SAS, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1874187A priority Critical patent/FR3091347B1/en
Priority to PCT/FR2019/053284 priority patent/WO2020136346A1/en
Priority to EP19849033.6A priority patent/EP3903098B1/en
Publication of FR3091347A1 publication Critical patent/FR3091347A1/en
Application granted granted Critical
Publication of FR3091347B1 publication Critical patent/FR3091347B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G02B21/082—Condensers for incident illumination only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G02B21/086—Condensers for transillumination only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G02B21/14—Condensers affording illumination for phase-contrast observation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365—Control or image processing arrangements for digital or video microscopes
    • G02B21/367—Control or image processing arrangements for digital or video microscopes providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8861—Determining coordinates of flaws
    • G01N2021/8864—Mapping zones of defects

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Multimedia (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

Procédé de caractérisation d'un échantillon (10), s'étendant selon un plan d'échantillon, le procédé comportant les étapes suivantes: illumination de l'échantillon à l'aide d'une source de lumière (11, 11'), de telle sorte que sous l'effet de l'illumination, un capteur d'image (20) est exposé à une onde lumineuse d'exposition (14) transmise ou réfléchie par l'échantillon, obtention de plusieurs images défocalisées (I z ) de l'échantillon à partir des images obtenues lors de l'étape b), calcul, en différentes coordonnées radiales (r), selon le plan de détection (P), d'une variation axiale ; à partir de la variation axiale calculée lors de l'étape c), obtention d'une image de phase (Iφ) ; caractérisation de l'échantillon à partir de l'image de phase obtenue (Iφ) ;Method for characterizing a sample (10), extending along a sample plane, the method comprising the following steps: illumination of the sample using a light source (11, 11'), such that under the effect of illumination, an image sensor (20) is exposed to an exposure light wave (14) transmitted or reflected by the sample, obtaining several defocused images (I z) of the sample from the images obtained during step b), calculation, in different radial coordinates (r), according to the detection plane (P), of an axial variation; from the axial variation calculated during step c), obtaining a phase image (Iφ); characterization of the sample from the phase image obtained (Iφ);

FR1874187A 2018-12-26 2018-12-26 Method for characterizing a sample by phase imaging Active FR3091347B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR1874187A FR3091347B1 (en) 2018-12-26 2018-12-26 Method for characterizing a sample by phase imaging
PCT/FR2019/053284 WO2020136346A1 (en) 2018-12-26 2019-12-23 Method for characterising a sample by phase imaging
EP19849033.6A EP3903098B1 (en) 2018-12-26 2019-12-23 Method for characterising a sample by phase imaging

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1874187A FR3091347B1 (en) 2018-12-26 2018-12-26 Method for characterizing a sample by phase imaging

Publications (2)

Publication Number Publication Date
FR3091347A1 FR3091347A1 (en) 2020-07-03
FR3091347B1 true FR3091347B1 (en) 2021-11-05

Family

ID=67107605

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1874187A Active FR3091347B1 (en) 2018-12-26 2018-12-26 Method for characterizing a sample by phase imaging

Country Status (3)

Country Link
EP (1) EP3903098B1 (en)
FR (1) FR3091347B1 (en)
WO (1) WO2020136346A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116430581B (en) * 2023-03-03 2024-05-24 中国科学院上海高等研究院 Method for calculating propagation of partially coherent light through free space and optical element

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AUPP690098A0 (en) * 1998-11-02 1998-11-26 University Of Melbourne, The Phase determination of a radiation wave field
US20150100278A1 (en) * 2013-10-04 2015-04-09 Georgia Tech Research Corporation Systems and methods for quantitative phase imaging with partially coherent illumination

Also Published As

Publication number Publication date
WO2020136346A1 (en) 2020-07-02
FR3091347A1 (en) 2020-07-03
EP3903098A1 (en) 2021-11-03
EP3903098B1 (en) 2023-10-25

Similar Documents

Publication Publication Date Title
EP3139213A3 (en) Defect inspecting method, sorting method and producing method for photomask blank
JP2008298767A5 (en)
JP2010279681A5 (en) Optical imaging apparatus and method
JP2011215134A5 (en)
JP2012014078A5 (en)
JP2010539469A (en) Imaging system with periodic pattern illumination and TDI
KR20170051194A (en) Full-field swept-source optical coherence tomography system and three-dimensional image compensation method for same
FR3091347B1 (en) Method for characterizing a sample by phase imaging
CN113646627B (en) Defect inspection apparatus and defect inspection method
JP2018163075A (en) Correction method, correction device and inspection device
US20170205497A1 (en) Signal harmonic error cancellation method and apparatus
US7791008B2 (en) Single spot focus control
TWI500963B (en) An image capturing device and method
NO328737B1 (en) Method and apparatus for inspecting objects
US10955354B2 (en) Cylindrical body surface inspection device and cylindrical body surface inspection method
CN110121629B (en) Determining an arrangement of sample objects by means of angularly selected illumination
US20230062821A1 (en) Defect inspection device and defect inspection method
JP6359819B2 (en) Fluorescence imaging device
TW202001209A (en) Optical distance measurement device and machining device
JP2012228544A5 (en)
JP2017101977A (en) Inspection system and inspection method
RU2020118483A (en) EXPERIMENTAL METHOD FOR ANALYSIS OF HAIR USING POLARIZED LIGHT
JP2014089156A (en) Visual inspection method
JP6660774B2 (en) Height data processing device, surface shape measuring device, height data correction method, and program
MA54018A1 (en) Maturity detection system using hue color space and peak search

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 2

PLSC Publication of the preliminary search report

Effective date: 20200703

PLFP Fee payment

Year of fee payment: 3

PLFP Fee payment

Year of fee payment: 4

PLFP Fee payment

Year of fee payment: 5

PLFP Fee payment

Year of fee payment: 6