FR3085231B1 - Capteur d'images a grande dynamique et faible bruit - Google Patents
Capteur d'images a grande dynamique et faible bruit Download PDFInfo
- Publication number
- FR3085231B1 FR3085231B1 FR1857634A FR1857634A FR3085231B1 FR 3085231 B1 FR3085231 B1 FR 3085231B1 FR 1857634 A FR1857634 A FR 1857634A FR 1857634 A FR1857634 A FR 1857634A FR 3085231 B1 FR3085231 B1 FR 3085231B1
- Authority
- FR
- France
- Prior art keywords
- image sensor
- low noise
- conductive core
- high dynamic
- potential
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 abstract 3
- 239000004065 semiconductor Substances 0.000 abstract 2
- 238000005286 illumination Methods 0.000 abstract 1
- 238000002955 isolation Methods 0.000 abstract 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
- H01L27/14612—Pixel-elements with integrated switching, control, storage or amplification elements involving a transistor
- H01L27/14614—Pixel-elements with integrated switching, control, storage or amplification elements involving a transistor having a special gate structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
- H01L27/1461—Pixel-elements with integrated switching, control, storage or amplification elements characterised by the photosensitive area
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
- H01L27/14612—Pixel-elements with integrated switching, control, storage or amplification elements involving a transistor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1463—Pixel isolation structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14636—Interconnect structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1464—Back illuminated imager structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14621—Colour filter arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
- H01L27/14627—Microlenses
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/50—Control of the SSIS exposure
- H04N25/57—Control of the dynamic range
- H04N25/59—Control of the dynamic range by controlling the amount of charge storable in the pixel, e.g. modification of the charge conversion ratio of the floating node capacitance
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Abstract
La présente description concerne un capteur d'images à semiconducteur. Chaque pixel du capteur comprend un substrat semiconducteur (10) ayant des faces avant et arrière opposées et délimité latéralement par un premier mur d'isolement (11) comprenant un premier coeur conducteur (12) isolé du substrat, des paires électrons-trous étant susceptibles de se former dans le substrat par suite d'un éclairement par la face arrière. Un circuit est configuré pour maintenir, pendant une première phase dans un premier mode de fonctionnement, le premier coeur conducteur à un premier potentiel et pour maintenir, pendant au moins une partie de la première phase dans un deuxième mode de fonctionnement, le premier coeur conducteur à un deuxième potentiel différent du premier potentiel.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1857634A FR3085231B1 (fr) | 2018-08-24 | 2018-08-24 | Capteur d'images a grande dynamique et faible bruit |
US16/547,231 US11195872B2 (en) | 2018-08-24 | 2019-08-21 | Low-noise wide dynamic range image sensor |
US17/514,953 US11695028B2 (en) | 2018-08-24 | 2021-10-29 | Low-noise wide dynamic range image sensor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1857634A FR3085231B1 (fr) | 2018-08-24 | 2018-08-24 | Capteur d'images a grande dynamique et faible bruit |
FR1857634 | 2018-08-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3085231A1 FR3085231A1 (fr) | 2020-02-28 |
FR3085231B1 true FR3085231B1 (fr) | 2020-09-25 |
Family
ID=65685458
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1857634A Active FR3085231B1 (fr) | 2018-08-24 | 2018-08-24 | Capteur d'images a grande dynamique et faible bruit |
Country Status (2)
Country | Link |
---|---|
US (2) | US11195872B2 (fr) |
FR (1) | FR3085231B1 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR3085231B1 (fr) * | 2018-08-24 | 2020-09-25 | St Microelectronics Crolles 2 Sas | Capteur d'images a grande dynamique et faible bruit |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7205584B2 (en) * | 2003-12-22 | 2007-04-17 | Micron Technology, Inc. | Image sensor for reduced dark current |
JP4341421B2 (ja) * | 2004-02-04 | 2009-10-07 | ソニー株式会社 | 固体撮像装置 |
JP2007096271A (ja) * | 2005-09-05 | 2007-04-12 | Toshiba Corp | 固体撮像装置及びその製造方法 |
US7485940B2 (en) * | 2007-01-24 | 2009-02-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | Guard ring structure for improving crosstalk of backside illuminated image sensor |
CN101669218B (zh) * | 2007-04-24 | 2012-01-11 | 皇家飞利浦电子股份有限公司 | 光电二极管及其制作 |
TWI479887B (zh) * | 2007-05-24 | 2015-04-01 | Sony Corp | 背向照明固態成像裝置及照相機 |
ITTO20080045A1 (it) * | 2008-01-18 | 2009-07-19 | St Microelectronics Srl | Schiera di fotodiodi operanti in modalita' geiger reciprocamente isolati e relativo procedimento di fabbricazione |
EP2216817B1 (fr) * | 2009-02-05 | 2014-01-08 | STMicroelectronics (Crolles 2) SAS | Capteur d'images à semiconducteur à éclairement par la face arrière |
FR2963187A1 (fr) * | 2010-07-21 | 2012-01-27 | St Microelectronics Crolles 2 | Dispositif d'imagerie a performances ameliorees et procede de commande. |
US9613916B2 (en) * | 2015-03-12 | 2017-04-04 | Taiwan Semiconductor Manufacturing Co., Ltd. | Protection ring for image sensors |
FR3046295A1 (fr) * | 2015-12-28 | 2017-06-30 | St Microelectronics Crolles 2 Sas | Pixel a eclairement par la face arriere |
FR3052297A1 (fr) * | 2016-06-06 | 2017-12-08 | St Microelectronics Crolles 2 Sas | Capteur d'image de type a obturation globale |
US20180158860A1 (en) * | 2016-12-01 | 2018-06-07 | Stmicroelectronics (Crolles 2) Sas | Stacked image sensor with interconnects made of doped semiconductor material |
FR3065836B1 (fr) * | 2017-04-28 | 2020-02-07 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Zone de stockage pour un pixel d'une matrice d'image |
US10971533B2 (en) * | 2018-01-29 | 2021-04-06 | Stmicroelectronics (Crolles 2) Sas | Vertical transfer gate with charge transfer and charge storage capabilities |
FR3085231B1 (fr) * | 2018-08-24 | 2020-09-25 | St Microelectronics Crolles 2 Sas | Capteur d'images a grande dynamique et faible bruit |
FR3100657B1 (fr) * | 2019-09-09 | 2023-02-10 | St Microelectronics Crolles 2 Sas | Pixel comprenant une photodiode |
-
2018
- 2018-08-24 FR FR1857634A patent/FR3085231B1/fr active Active
-
2019
- 2019-08-21 US US16/547,231 patent/US11195872B2/en active Active
-
2021
- 2021-10-29 US US17/514,953 patent/US11695028B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
FR3085231A1 (fr) | 2020-02-28 |
US20200066780A1 (en) | 2020-02-27 |
US11195872B2 (en) | 2021-12-07 |
US20220052104A1 (en) | 2022-02-17 |
US11695028B2 (en) | 2023-07-04 |
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