FR3075983B1 - NANO-MANIPULATION DEVICE AND CHARACTERIZATION METHOD USING SUCH A DEVICE - Google Patents

NANO-MANIPULATION DEVICE AND CHARACTERIZATION METHOD USING SUCH A DEVICE Download PDF

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Publication number
FR3075983B1
FR3075983B1 FR1762934A FR1762934A FR3075983B1 FR 3075983 B1 FR3075983 B1 FR 3075983B1 FR 1762934 A FR1762934 A FR 1762934A FR 1762934 A FR1762934 A FR 1762934A FR 3075983 B1 FR3075983 B1 FR 3075983B1
Authority
FR
France
Prior art keywords
characterization method
nano
manipulation
nanomanipulation
subject
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1762934A
Other languages
French (fr)
Other versions
FR3075983A1 (en
Inventor
Jean-Louis Mansot
Yves Bercion
Cuka Andi Mikosch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Des Antilles, University of
Original Assignee
Des Antilles, University of
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Des Antilles, University of filed Critical Des Antilles, University of
Priority to FR1762934A priority Critical patent/FR3075983B1/en
Publication of FR3075983A1 publication Critical patent/FR3075983A1/en
Application granted granted Critical
Publication of FR3075983B1 publication Critical patent/FR3075983B1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/26—Stages; Adjusting means therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/32—Micromanipulators structurally combined with microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/206—Modifying objects while observing
    • H01J2237/2062—Mechanical constraints
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/206—Modifying objects while observing
    • H01J2237/2067—Surface alteration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/208—Elements or methods for movement independent of sample stage for influencing or moving or contacting or transferring the sample or parts thereof, e.g. prober needles or transfer needles in FIB/SEM systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2813—Scanning microscopes characterised by the application

Abstract

L'invention a pour objet un dispositif de nano-manipulation comprenant deux bras aptes à se mouvoir dans les trois directions de l'espace avec une précision de positionnement nanométrique. Chacun de ces deux bras comprend en outre une platine rotative latérale configurée pour maintenir et mettre en rotation un porte-échantillon, ledit porte-échantillon étant configuré pour recevoir au moins un nano-outil. L'invention a également pour objet un procédé de caractérisation utilisant un tel dispositif de nano-manipulation.The subject of the invention is a nanomanipulation device comprising two arms capable of moving in the three directions of space with nanometric positioning precision. Each of these two arms further comprises a lateral rotating stage configured to hold and rotate a sample holder, said sample holder being configured to receive at least one nanotool. The subject of the invention is also a characterization method using such a nanomanipulation device.

FR1762934A 2017-12-22 2017-12-22 NANO-MANIPULATION DEVICE AND CHARACTERIZATION METHOD USING SUCH A DEVICE Expired - Fee Related FR3075983B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1762934A FR3075983B1 (en) 2017-12-22 2017-12-22 NANO-MANIPULATION DEVICE AND CHARACTERIZATION METHOD USING SUCH A DEVICE

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1762934 2017-12-22
FR1762934A FR3075983B1 (en) 2017-12-22 2017-12-22 NANO-MANIPULATION DEVICE AND CHARACTERIZATION METHOD USING SUCH A DEVICE

Publications (2)

Publication Number Publication Date
FR3075983A1 FR3075983A1 (en) 2019-06-28
FR3075983B1 true FR3075983B1 (en) 2021-07-23

Family

ID=62167426

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1762934A Expired - Fee Related FR3075983B1 (en) 2017-12-22 2017-12-22 NANO-MANIPULATION DEVICE AND CHARACTERIZATION METHOD USING SUCH A DEVICE

Country Status (1)

Country Link
FR (1) FR3075983B1 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4200665B2 (en) * 2001-05-08 2008-12-24 株式会社日立製作所 Processing equipment
JP4722969B2 (en) * 2007-06-29 2011-07-13 エフ イー アイ カンパニ How to attach the sample to the manipulator
JP5928900B2 (en) * 2010-08-06 2016-06-01 日本精工株式会社 Manipulator system and operation method of minute operation object
WO2013049641A1 (en) * 2011-09-28 2013-04-04 Hysitron, Inc. Testing assembly including a multiple degree of freedom stage

Also Published As

Publication number Publication date
FR3075983A1 (en) 2019-06-28

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