FR3071492B1 - MICRO-DEVICE INCLUDING AN ELEMENT PROTECTED AGAINST HF ENGRAVING AND SHAPED AS A MATERIAL INCLUDING A SEMICONDUCTOR AND A METAL - Google Patents

MICRO-DEVICE INCLUDING AN ELEMENT PROTECTED AGAINST HF ENGRAVING AND SHAPED AS A MATERIAL INCLUDING A SEMICONDUCTOR AND A METAL Download PDF

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Publication number
FR3071492B1
FR3071492B1 FR1758848A FR1758848A FR3071492B1 FR 3071492 B1 FR3071492 B1 FR 3071492B1 FR 1758848 A FR1758848 A FR 1758848A FR 1758848 A FR1758848 A FR 1758848A FR 3071492 B1 FR3071492 B1 FR 3071492B1
Authority
FR
France
Prior art keywords
semiconductor
micro
metal
engraving
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1758848A
Other languages
French (fr)
Other versions
FR3071492A1 (en
Inventor
Stephanus Louwers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1758848A priority Critical patent/FR3071492B1/en
Priority to EP18196058.4A priority patent/EP3459907B1/en
Priority to US16/138,061 priority patent/US11027969B2/en
Publication of FR3071492A1 publication Critical patent/FR3071492A1/en
Application granted granted Critical
Publication of FR3071492B1 publication Critical patent/FR3071492B1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00555—Achieving a desired geometry, i.e. controlling etch rates, anisotropy or selectivity
    • B81C1/00595—Control etch selectivity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00777—Preserve existing structures from alteration, e.g. temporary protection during manufacturing
    • B81C1/00785—Avoid chemical alteration, e.g. contamination, oxidation or unwanted etching
    • B81C1/00801—Avoid alteration of functional structures by etching, e.g. using a passivation layer or an etch stop layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0097—Devices comprising flexible or deformable elements not provided for in groups B81B3/0002 - B81B3/0094
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0136—Comb structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2207/00—Microstructural systems or auxiliary parts thereof
    • B81B2207/01—Microstructural systems or auxiliary parts thereof comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS
    • B81B2207/015—Microstructural systems or auxiliary parts thereof comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS the micromechanical device and the control or processing electronics being integrated on the same substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
    • B81C1/00468—Releasing structures
    • B81C1/00476—Releasing structures removing a sacrificial layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0102—Surface micromachining
    • B81C2201/0105—Sacrificial layer
    • B81C2201/0109—Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0132—Dry etching, i.e. plasma etching, barrel etching, reactive ion etching [RIE], sputter etching or ion milling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0133—Wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0135—Controlling etch progression
    • B81C2201/014—Controlling etch progression by depositing an etch stop layer, e.g. silicon nitride, silicon oxide, metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/0181—Physical Vapour Deposition [PVD], i.e. evaporation, sputtering, ion plating or plasma assisted deposition, ion cluster beam technology

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Micromachines (AREA)
  • Bipolar Transistors (AREA)

Abstract

Micro-dispositif (100) comportant au moins un premier élément (101) comprenant au moins : - une portion de matériau (106) correspondant à un composé d'au moins un semi-conducteur et d'au moins un métal, - des première et deuxième couches de protection (108, 110) recouvrant chacune une de deux faces opposées de ladite portion de matériau, telles que la première couche de protection comprenne au moins un premier matériau apte à résister à une gravure HF, que la deuxième couche de protection comprenne au moins un deuxième matériau apte à résister à la gravure HF, et qu'au moins l'un des premier et deuxième matériaux aptes à résister à la gravure HF comporte le semi-conducteur.Micro-device (100) comprising at least a first element (101) comprising at least: - a portion of material (106) corresponding to a compound of at least one semiconductor and at least one metal, - first and second protective layers (108, 110) each covering one of two opposite faces of said portion of material, such that the first protective layer comprises at least a first material capable of withstanding HF etching, than the second protective layer comprises at least one second material capable of resisting HF etching, and that at least one of the first and second materials capable of resisting HF etching comprises the semiconductor.

FR1758848A 2017-09-25 2017-09-25 MICRO-DEVICE INCLUDING AN ELEMENT PROTECTED AGAINST HF ENGRAVING AND SHAPED AS A MATERIAL INCLUDING A SEMICONDUCTOR AND A METAL Expired - Fee Related FR3071492B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR1758848A FR3071492B1 (en) 2017-09-25 2017-09-25 MICRO-DEVICE INCLUDING AN ELEMENT PROTECTED AGAINST HF ENGRAVING AND SHAPED AS A MATERIAL INCLUDING A SEMICONDUCTOR AND A METAL
EP18196058.4A EP3459907B1 (en) 2017-09-25 2018-09-21 Microdevice comprising an element protected against hf etching and formed from a material comprising a semiconductor and a metal
US16/138,061 US11027969B2 (en) 2017-09-25 2018-09-21 Micro-device having a metal-semiconductor compound layer protected against HF etching and method for making the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1758848A FR3071492B1 (en) 2017-09-25 2017-09-25 MICRO-DEVICE INCLUDING AN ELEMENT PROTECTED AGAINST HF ENGRAVING AND SHAPED AS A MATERIAL INCLUDING A SEMICONDUCTOR AND A METAL
FR1758848 2017-09-25

Publications (2)

Publication Number Publication Date
FR3071492A1 FR3071492A1 (en) 2019-03-29
FR3071492B1 true FR3071492B1 (en) 2021-07-09

Family

ID=60627795

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1758848A Expired - Fee Related FR3071492B1 (en) 2017-09-25 2017-09-25 MICRO-DEVICE INCLUDING AN ELEMENT PROTECTED AGAINST HF ENGRAVING AND SHAPED AS A MATERIAL INCLUDING A SEMICONDUCTOR AND A METAL

Country Status (3)

Country Link
US (1) US11027969B2 (en)
EP (1) EP3459907B1 (en)
FR (1) FR3071492B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3101726B1 (en) * 2019-10-04 2021-10-01 Commissariat Energie Atomique manufacturing process of an electronic device

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69734280D1 (en) * 1997-07-10 2006-02-09 St Microelectronics Srl Method for producing highly sensitive, capacitive and resonant integrated sensors, in particular accelerometers and gyros, and sensors manufactured therewith
US6020272A (en) * 1998-10-08 2000-02-01 Sandia Corporation Method for forming suspended micromechanical structures
DE10152254A1 (en) * 2001-10-20 2003-04-30 Bosch Gmbh Robert Micromechanical component and corresponding manufacturing method
JP4724488B2 (en) * 2005-02-25 2011-07-13 日立オートモティブシステムズ株式会社 Integrated microelectromechanical system
US7538401B2 (en) * 2005-05-03 2009-05-26 Rosemount Aerospace Inc. Transducer for use in harsh environments
US7816166B1 (en) * 2007-03-09 2010-10-19 Silicon Labs Sc, Inc. Method to form a MEMS structure having a suspended portion
US8318606B2 (en) * 2009-08-25 2012-11-27 Lsi Corporation Dielectric etching
US9586811B2 (en) * 2011-06-10 2017-03-07 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor devices with moving members and methods for making the same
US8440523B1 (en) * 2011-12-07 2013-05-14 International Business Machines Corporation Micromechanical device and methods to fabricate same using hard mask resistant to structure release etch
US9340412B2 (en) * 2014-07-28 2016-05-17 Ams International Ag Suspended membrane for capacitive pressure sensor

Also Published As

Publication number Publication date
US20190092632A1 (en) 2019-03-28
EP3459907A1 (en) 2019-03-27
US11027969B2 (en) 2021-06-08
FR3071492A1 (en) 2019-03-29
EP3459907B1 (en) 2020-08-12

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Effective date: 20190329

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